循環經濟在半導體產業的應用 —以電子級化學品回收再生為例

Abstract

台灣半導體產業今年產值高達新台幣3兆元，全球市占率約是20%，排名第二名地位；半導體產業對於資源的消耗也非常大，尤其對於極為缺乏天然資源的台灣，關鍵材料幾乎仰賴進口。 半導體生產製造過程中，需要消耗大量電子級化學品，使用後產生大量化學品廢液，包含去光阻及蝕刻、清洗晶片後所產出廢液；大致可分為酸鹼廢液及含氟廢液兩大類，其中最大宗為清洗晶片所產生廢硫酸。 假若這些廢液沒有得到妥善的處理，對地球環境將是一場大災難。早期國內半導體產業都採用廠內自行酸鹼中和與凝集沉澱方式處理，或委外廢棄物清運業者負責清運至合法場所進行處理；花費大量成本委外處理，卻時常遇到不良廢棄物清運業者隨意傾到，往往造成嚴重環境汙染事件及新聞報導。 目前全球對於地球生態、環保議題、環境法規及永續發展越來越重視，尤其先進歐美日各國政府都在積極鼓勵產業創新發展與循環經濟應用，我國半導體產業若能在政府法規及配套下，鼓勵設備商投入回收再生系統研發，並推動半導體業者重視永續發展及循環再生觀念，大量增設回收再生設備意願，增加廢液回收利用率，不僅可以降低對環境污染與衝擊，亦可減輕對地球資源的消耗與破壞，半導體產業也才能永續發展。

Taiwan ’s semiconductor industry ’s output value this year is up to NT $ 3 trillion, with a global market share of about 20%, ranking second. The semiconductor industry ’s consumption of resources is also very large, especially for Taiwan, which lacks natural resources, key materials depend almost on imports. During the semiconductor manufacturing process, a large amount of electronic-grade chemicals need to be consumed, and a large amount of chemical waste liquid is generated after use, including waste liquid produced after photoresist removal, etching, and wafer cleaning; roughly divided into acid, alkali waste liquid and fluorine There are two types of waste liquid, the largest of which is waste sulfuric acid produced by wafer cleaning. If these waste liquids are not properly handled, it will be a major disaster for the global environment. In the early days of the domestic semiconductor industry, the in-plant wastewater plant acid-base neutralization method or precipitation method was used for treatment, or the outsourced waste removal and removal company was responsible for removal and removal to the prescribed place for disposal. In addition to spending a lot of costs on outsourced treatment, often encountering bad company, waste is dumped at will, causing serious environmental pollution incidents and news reports. At present, the world pays more and more attention to earth ecology, environmental protection issues, environmental regulations and sustainable development. In particular, the governments of advanced countries in Europe, America, and Japan are actively encouraging industrial innovation and circular economy applications. If the Taiwanese semiconductor industry can cooperate with government regulations, encourage equipment suppliers to invest in the research and development of recycling systems, and promote semiconductor industry's attention to sustainable development and The concept of recycling, the willingness to add a large number of recycling and recycling equipment, and increasing the recovery rate of waste liquid can not only reduce the environmental pollution and impact, but also reduce the consumption and destruction of the earth's resources, and the semiconductor industry can also develop sustainably.