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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 楊燿州 | |
dc.contributor.author | Chuang Yin Wang | en |
dc.contributor.author | 王傳印 | zh_TW |
dc.date.accessioned | 2021-06-17T09:10:54Z | - |
dc.date.available | 2025-07-15 | |
dc.date.copyright | 2020-07-15 | |
dc.date.issued | 2019 | |
dc.date.submitted | 2019-08-12 | |
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dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/74944 | - |
dc.description.abstract | 本研究開發高靈敏度的微型壓力感測器,並將其整合於器官晶片微流道系統以應用於非侵入式且即時量測微流道的流量變化。感測器包含上方浮動式電極與下方電極對,中間之介電層則是採用聚二甲基矽氧烷(Polydimethylsiloxane, PDMS)之微結構薄膜。浮動式電極的設計可以有效減少電容感測器接線上的困難度,使感測器更容易整合於微流道系統。加入PDMS微結構薄膜可以使電容感測器擁有高靈敏度、廣大的量測區間、更線性的電容變化程度與降低遲滯現象等優勢。此外,本研究亦利用Ansys Fluent商用軟體進行流體模擬,分析微流道之流體在層流情況下之運動狀態。因為微流道內流量的改變會造成流道腔體內壓力的變化,因此可以藉由偵測流道內壓力的變化來預估流量。此微流道流量感測器在0~900μl/min的流量範圍內擁有良好的且線性的電容變化。同時在浮動電極結構厚度為100μm時,微流道流量感測器有最佳的靈敏度0.0207%.min/μL。 | zh_TW |
dc.description.abstract | This work presents the design and fabrication of a highly-sensitive miniaturized pressure sensor that can be integrated with an organ-on-chip system for nonintrusive and rapid monitoring of flow rate in microfluidic channels. The proposed device employs a variable capacitor for pressure sensing. The capacitor consists of a sensing electrode pair, a common floating electrode, and a microstructured PDMS dielectric layer sandwiched between the electrodes. The design with the floating electrode can effectively reduce the complexity of the device interconnects for retrieving signals. The microstructured thin film gives advantages such as wide sensing range, low hysteresis, and good linearity. Three dimensional Navier–Stokes simulations is carried out by a Finite Volume Method (FVM) solver in a laminar flow condition in order to investigate the behavior of the fluid in the channel. The pressure in the microfluidic channel can deform the PDMS membrane on the top of the floating electrode, which in turn changes the gap of the capacitance and thus changes the capacitance. Therefore, the pressure change can be detected by measuring the capacitance change. The sensor has the linear response in the range of 0~900μl/min for the optimal sensor performance. The highest sensitivity is about 0.0207%.min/μL for the membrane with a thickness of 100μm. | en |
dc.description.provenance | Made available in DSpace on 2021-06-17T09:10:54Z (GMT). No. of bitstreams: 1 ntu-108-R06522713-1.pdf: 25075877 bytes, checksum: 7d97605b6ecd05a37835b4043863aa7d (MD5) Previous issue date: 2019 | en |
dc.description.tableofcontents | 致謝 I
摘要 III 目錄 VI 圖目錄 VIII 表目錄 XIII 第一章 緒論 1 1.1 前言 1 1.2 文獻回顧 2 1.2.1 器官晶片 2 1.2.2 微流道流量感測器 7 1.2.3 壓力感測器 15 1.3 研究動機與目的 26 1.4 論文架構 27 第二章 感測原理與元件設計分析 29 2.1 電容式感測基本原理 29 2.2 微結構電容式感測器感測機制 34 2.3 浮動式電極電容感測機制 35 2.4 微流道流量感測器之設計與感測原理 38 第三章 製造方法與步驟 45 3.1 製程規劃 45 3.2 流量感測器製程設計與原理 47 3.2.1 微影製程 47 3.2.2 翻模轉印 50 3.2.3 金屬薄膜沉積 51 3.2.4 反應式離子蝕刻 52 3.2.5 非等向性濕蝕刻 53 3.3 流量感測器系統製作 54 3.3.1 微流道層 54 3.3.2 浮動電極層 56 3.3.3 微針結構層薄膜 57 3.3.4 下電極對 59 3.3.5 元件組裝與製作結果 60 第四章 量測結果與討論 63 4.1 電容式壓力感測器之特性量測 63 4.1.1 量測架設 63 4.1.2 不同壓力下的電容變化結果與探討 64 4.1.3 遲滯現象探討 65 4.2 利用計算流體力學模擬微流道腔體之壓力 66 4.2.1 微流道模型推導 66 4.2.2 收斂性分析 68 4.2.3 不同流量下微流道腔體的壓力變化 72 4.3 微流道流量感測器之特性量測 73 4.3.1 量測架設 74 4.3.2 微流道流量感測器結果探討 75 第五章 結論與未來展望 83 5.1 結論 83 5.2 未來展望 85 參考文獻 87 附錄 A 95 | |
dc.language.iso | zh-TW | |
dc.title | 具微針結構電容式流量感測器應用於器官晶片微流道系統 | zh_TW |
dc.title | Development of a Capacitive Flow Rate Sensor with Microstructured Dielectric for Microfluidic Organ-On-Chip System | en |
dc.type | Thesis | |
dc.date.schoolyear | 108-2 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 蘇裕軒,陳國聲 | |
dc.subject.keyword | 流量,器官晶片,浮動電極,電容式壓力感測器,微結構, | zh_TW |
dc.subject.keyword | Flow rate,organ-on-chip,floating electrode,capacitive pressure sensor,microstructure, | en |
dc.relation.page | 100 | |
dc.identifier.doi | 10.6342/NTU201902643 | |
dc.rights.note | 有償授權 | |
dc.date.accepted | 2019-08-13 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 機械工程學研究所 | zh_TW |
顯示於系所單位: | 機械工程學系 |
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