大量測範圍力量量測系統之設計與開發

Abstract

原子力顯微鏡為一常用於檢測奈米尺度下之表面物理性質之儀器，其具備不須抽真空且對導體與絕緣體都能有奈米尺度成像之能力，已廣泛被運用於掃描奈米尺度之表面輪廓與機械性質量測。然而目前大多數之商用原子力顯微鏡之掃描範圍僅達數百微米，且可放置之樣品尺寸相當受限，不適合用於如晶圓、面板等具有較大尺寸之樣品。基於原子力顯微鏡之力量檢測原理，本論文開發出具備336 mm × 160 mm大量測範圍之力量量測系統，可用以量測奈米尺度下之樣品黏彈性。此外，所開發之人機介面具有操作簡易以及可彈性修改等優點。利用此自製系統對親水性玻片進行表面黏滯力量測實驗，結果顯示使用紫外光臭氧(Ultraviolet/Ozone, UV/O_3)表面處理過之一球型探針所測得之黏滯力較未經過表面處理之一球型探針大約五倍。此外，此球型探針在未經UV/O_3處理與處理十分鐘之玻片上所量測之黏滯力相差約兩倍，顯示玻片經過越長時間之UV/O_3表面處理會造成越大之黏滯力，此趨勢與商用原子力顯微鏡之測試結果符合。

Atomic force microscope (AFM) is a precision instrument for measuring the surface physical properties at nanoscale. Because the ability to measure both conductive and nonconducting samples in non-vacuum environment, AFM has been widely used to measure surface morphology and mechanical properties at nanoscale. However, the scan range of common AFMs is usually less than several hundred micrometers, and the sample size is limited and not suitable for large samples such as silicon wafers and display panels. In this thesis, a force measurement system with a large measuring range of 400 mm × 240 mm was developed to measure the sample viscoelasticity by using the force detection method of AFM. Moreover, the homemade human-machine interface is user-friendly and flexible for modification. In the experiments, the adhesion force between the AFM tips and the hydrophilic glass slides was measured. The adhesion force measured by a UV/O_3 surface treated spherical tip was five times larger than that measured by an untreated tip. Besides, the adhesion force between the spherical tip and a glass slide after 10 minutes UV/O_3 treatment is five times larger than the result on an untreated glass slide. This result shows that the adhesion force is positively correlated to the treatment time of sample treatment. This trend is coincident with the results obtained by a commercial AFM.