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| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 廖先順 | |
| dc.contributor.author | Guan-Teng Huang | en |
| dc.contributor.author | 黃冠騰 | zh_TW |
| dc.date.accessioned | 2021-06-17T06:14:01Z | - |
| dc.date.available | 2023-10-02 | |
| dc.date.copyright | 2018-10-02 | |
| dc.date.issued | 2018 | |
| dc.date.submitted | 2018-09-25 | |
| dc.identifier.citation | [1] 朱柏豪,”表面輪廓儀的用途”,奈米通訊,22卷 No.1, 31-33 (2015).
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[21] Dong, Sheng, and Marcelo Dapino, “Experiments on Ultrasonic Lubrication Using a Piezoelectrically-assisted Tribometer and Optical Profilometer.” Journal of visualized experiments, JoVE103 (2015). [22] Ahmad, A., Dubey, V., Singh, G., Singh, V., & Mehta, D. S. “Quantitative phase imaging of biological cells using spatially low and temporally high coherent light source.” Optics letters, 41(7), 1554-1557. (2016). [23] Deck, L. and P. De Groot. “High-speed non-contact profiler based on scanning white light interferometry.” International Journal of Machine Tools and Manufacture, 35(2), 147-150 (1995). [24] Nishimura, T., Tsukiji, M., Ishii, S., & Ishizuka, K. “Encoder for forming interference fringes by re-diffracted lights from an optical type scale and photoelectrically converting the interference fringes to thereby detect the displacement of the scale.” U.S. Patent No. 4,930,895.(1990). [25] 郭哲佑, “相位移條紋投影輪廓儀之特性與分析”,國立中山大學材料科學研究所碩士論文 (2005). [26] Zapf, T. and R. 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Y. “Development of electromagnetic scanning stage for astigmatic profilometer.” Mechatronics and Automation (ICMA), 2015 IEEE International Conference on. IEEE (2015). [34] Hwu, E. T., Hung, S. K., Yang, C. W., Huang, K. Y., & Hwang, S. “Real-time detection of linear and angular displacements with a modified DVD optical head.” Nanotechnology, 19(11), 115501 (2008). [35] Sun, W. S., Lin, Y. N., & Chang, J. Y. “Optical design and analysis of a laser expander for a Blu-ray pickup head for synchronous detection of the tilt angle and displacement on the test plane.” Japanese Journal of Applied Physics, 50(9S1), 09MA03 (2011). [36] Chieh, J.-W. and S.-K. Hung. “Transforming a CD/DVD pick-up-head into an accelerometer.” Advanced Intelligent Mechatronics, 2009. AIM 2009. IEEE/ASME International Conference on, IEEE (2009). [37] Armstrong, T. and M. Fitzgerald. “An autocollimator based on the laser head of a compact disc player.” Measurement Science and Technology 3(11), 1072 (1992). 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[43] Hwu, E. T., Illers, H., Jusko, L., & Danzebrink, H. U. “A hybrid scanning probe microscope (SPM) module based on a DVD optical head.” Measurement Science and Technology, 20(8), 084005 (2009). [44] 陳彥宏, “像散式讀取頭干涉現象探討與位移量測應用.” 臺灣大學機械工程學研究所學位論文 (2011). | |
| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/71897 | - |
| dc.description.abstract | 光學表面輪廓儀為一表面量測儀器，已被廣泛應用於量測各式精密工件、微機電元件、薄膜、 醫學器材等不同之領域。相較於接觸式表面輪廓儀，光學表面輪廓儀不需直接接觸待測樣品， 具有速度快、不易傷害樣品且不需探針等耗材之優點。像散式光學輪廓儀使用DVD讀取頭作為核心量測元件，其聚焦誤差訊號(Focus Error Signal)可量測奈米級表面結構形貌，具有速度快、高解析度、結構緊緻等優點。然而，聚焦誤差訊號深受表面反射率之影響。因此，除了需要針對樣品反射率進行校正外，若表面上具有不同反射率之材料，將無法得到量化之三維高度影像。為實現定量高度量測，本論文提出Z軸回饋控制模式以及Z軸掃描模式，並自行開發像散式光學輪廓儀系統以及高度計算分析程式。實驗以CS-20NG以及R2L2S1N兩種樣品進行測試。實驗結果顯示所開發之系統可成功定量量測CS-20NG表面上之20 nm微小結構。掃描R2L2S1N1之結果顯示Z軸掃描模式可量測具不同反射率材料之表面，實現定量之結構高度量測。此外，Z軸掃描模式亦可同時對表面反射率之特性進行成像。 | zh_TW |
| dc.description.abstract | The optical profilometer is a powerful instrument for measuring the surface morphology, which has been widely utilized in many different applications such as precise mechanical components, MEMS, membranes, and medical devices. Comparing with the contact profilometer, the optical profilometer doesn't need a stylus to contact with the sample. Therefore, it has advantages such as high speed, sample protection and no cost for the stylus. The astigmatic optical profilometer uses a DVD pick-up head as a core measurement component, and the focus error signal can be used to measure the surface structure at nanoscale. The astigmatic optical profilometer has advantages of high speed, high resolution, and compact size. However, the focus error signal is affected by the surface reflectivity significantly. Therefore, a calibration procedure is required for each sample with reflectivities. Moreover, the quantitative measurement can not be obtained on a sample consisting of complex materials. To solve this problem, two operation modes called the Z-axis feedback control mode and the Z-axis scanning mode were proposed in this thesis. An astigmatic optical profilometer system and a height calculation program were developed. Two stardard samples (CS-20NG and R2L2S1N1) were measured in the experiments. The experimental results show that the 20 nm height structures on CS-20NG can be measured quantitatively. The results on R2L2S1N1 show that the Z-axis scanning mode can achieve quantitative height measurement on the surface consisting of two materials with different reflectivities. Furthermore, the surface reflectivity can also be imaged in the Z-axis scanning mode. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-17T06:14:01Z (GMT). No. of bitstreams: 1 ntu-107-R04543081-1.pdf: 17791243 bytes, checksum: 4af823e56be8b6c61c09d0944eee0b32 (MD5) Previous issue date: 2018 | en |
| dc.description.tableofcontents | 論文審定書................................................................................I
誌謝.........................................................................................II 摘要........................................................................................III 英文摘要.................................................................................IV 目錄.........................................................................................V 表目錄....................................................................................VII 圖目錄...................................................................................VIII 符號表....................................................................................XI 第一章 緒論..............................................................................1 1.1研究背景..............................................................................1 1.2文獻回顧.............................................................................3 1.2.1接觸式表面輪廓儀.............................................................3 1.2.2非接觸式表面輪廓儀.........................................................4 1.3研究目的............................................................................12 1.4內容簡介............................................................................13 第二章 像散式讀取頭原理探討.................................................14 2.1像散式讀取頭原理探討........................................................14 2.2測量模式原理.....................................................................16 2.2.1固定高度掃描模式............................................................16 2.2.2 Z軸掃回饋控制模式........................................................19 2.2.3 Z軸掃描模式..................................................................21 第三章 像散式三維光學輪廓儀之設計.......................................23 3.1概念設計............................................................................23 3.2輪廓儀系統架構與量測元件................................................23 3.2.1像散式讀取頭功能及其結構..............................................26 3.2.2壓電掃描器&控制器.........................................................27 3.2.3控制系統.........................................................................28 3.2.4 XYZ精密微調平台&Z-stage............................................29 3.2.5轉接板.............................................................................30 3.2.6自製放大器......................................................................32 3.2.7讀取頭放大器&雷射驅動器................................................33 3.3操作流程及資料計算方法.....................................................33 3.3.1固定高度掃描模式.............................................................33 3.3.2 Z軸回饋控制模式.............................................................34 3.3.3 Z軸掃描模式....................................................................35 第四章 像散式三圍光學輪廓儀之測試與分析...............................41 4.1樣品上表面反射率相近之測試................................................41 4.1.1固定高度模式測試..............................................................43 4.1.2 Z軸回饋控制模式測試......................................................44 4.1.3 Z軸掃描模式測試.............................................................46 4.2樣品上表面反射率相異之測試................................................51 4.2.1固定高度模式測試..............................................................53 4.2.2 Z軸回饋控制模式測試......................................................54 4.2.3 Z軸掃描模式測試.............................................................55 4.3分析與討論...........................................................................62 4.3.1樣品上表面反射率相近........................................................62 4.3.2樣品上表面反射率相異.......................................................64 第五章 結論與未來展望..............................................................66 5.1結論與未來展望.....................................................................66 參考文獻....................................................................................67 附錄A CS-20NG 樣品規格與特性................................................71 附錄B R2L2S1N1樣品規格與特性................................................72 附錄C DVD讀取頭規格表............................................................73 附錄D 壓電掃描器規格表............................................................74 | |
| dc.language.iso | zh-TW | |
| dc.subject | 光學輪廓儀 | zh_TW |
| dc.subject | 反射率 | zh_TW |
| dc.subject | DVD讀取頭 | zh_TW |
| dc.subject | 像散原理 | zh_TW |
| dc.subject | optical profilometer | en |
| dc.subject | reflectivity | en |
| dc.subject | DVD pick-up head | en |
| dc.subject | astigmatism | en |
| dc.title | 像散式光學輪廓儀之量化高度量測方法之設計與開發 | zh_TW |
| dc.title | Design and Development of novel methods for quantitative height measurement based on an Astigmatic Optical Profilometer | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 107-1 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 楊志文,高豐生 | |
| dc.subject.keyword | 光學輪廓儀,反射率,DVD讀取頭,像散原理, | zh_TW |
| dc.subject.keyword | optical profilometer,reflectivity,DVD pick-up head,astigmatism, | en |
| dc.relation.page | 74 | |
| dc.identifier.doi | 10.6342/NTU201804074 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2018-09-25 | |
| dc.contributor.author-college | 工學院 | zh_TW |
| dc.contributor.author-dept | 機械工程學研究所 | zh_TW |
| 顯示於系所單位： | 機械工程學系 | |
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