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http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/69848
標題: | 自主輸液之超音波霧化噴嘴 Self-Pumping Ultrasonic Atomizer |
作者: | Jasper Jih-Chung Peng 彭日中 |
指導教授: | 周元昉 |
關鍵字: | 微型幫浦,超音波,壓電,霧化, Micropump,Ultrasonic,Piezoelectric,Atomization, |
出版年 : | 2018 |
學位: | 碩士 |
摘要: | 雖微型幫浦問世至今將近30年,工作方式因應用需求發展出各式各樣的形式,但在高頻的壓電式微型幫浦卻是鮮有出現,現行的驅動頻率多為0~10kHz。因此,本研究首創了新的幫浦驅動方式與能以300kHz高頻驅動之新型微型幫浦並建置在本實驗室之霧化噴嘴流道中。
本研究首先以有限元素模擬方式設計一組流道結構與振幅放大器,組合兩者建立自主輸液之霧化噴嘴模型,再使用微機電製程,以矽為材料實際製作,並以其進行實驗,驗證輸液與霧化效果。 接下來以第一組霧化噴嘴之實驗結果進行改良,最後成功做出同時輸液與霧化之霧化噴嘴,並量測其霧化流量與振幅。 Several kinds of micropumps had been developed based on different working principle to satisfy many application needs. Micropumps driven by piezoelectric materials were worked in the frequency range below 10kHz usually. Since ultrasonic atomizers operated at frequencies higher than 300kHz were developed, it is desirable to combine micropumps that can work in the same frequency. Therefore, this thesis designs a self-pumping ultrasonic atomizer. An ultrasonic horn with a build-in microchannel was designed. The microchannel contains several Tesla valves located at antinodes of the horn. This combination gives a self-pumping ultrasonic atomizer. The modal characteristics and pumping performance was checked with FEM. After confirming the mode shape and the flow rectification, the silicon based atomizer was fabricated by MEMS process and driven with PZT plates. At last, we going on testing the abilities of fluid transfer and atomization. The capability of pumping and atomizing simultaneously of this self-pumping ultrasonic atomizer was verified and its performance was also measured. |
URI: | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/69848 |
DOI: | 10.6342/NTU201800529 |
全文授權: | 有償授權 |
顯示於系所單位: | 機械工程學系 |
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