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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 黃光裕(Kuang-Yuh Huang) | |
dc.contributor.author | Dao-Xuan Han | en |
dc.contributor.author | 韓道宣 | zh_TW |
dc.date.accessioned | 2021-06-17T03:28:24Z | - |
dc.date.available | 2018-04-18 | |
dc.date.copyright | 2018-04-18 | |
dc.date.issued | 2017 | |
dc.date.submitted | 2018-03-22 | |
dc.identifier.citation | [1] Binnig G. and Rohrer H., “Scanning Tunneling Microscopy”, IBM Journal of Research and Development, Vol. 44, 2000, pp. 279-293.
[2] Michael J. B., Shahal I., Charles M. M., and Paul L. M., “Electrical Transport in Single-Wall Carbon Nanotubes “, Topics Application Physics, Vol. 111, 2008, pp. 455-493. [3] Kim J. Y. , Kim M. S. , Uhm T. K. , and Youn S. K.,’’A Study on the Dynamic Range Expansion of the Shack-Hartmann Wavefront Sensor using Image Processing’’, Proc. SPIE Vol. 6691,2007,66910S. [4] Chia C. M., Huang K. Y., and Chang E., “Hough transform used on the spot- centroiding algorithm for the Shack–Hartmann wavefront sensor”, Optical Engineering, Vol. 55, January 22 2016. [5] Otsubo M., Okada K., and Tsujiuchi J., “Measurement of large plane surface shapes by connecting small-aperture interferograms” Optical Engineering, Vol.33(2), 1994, pp.608-613. [6] Zhao C. ,and James H., “ Stitching of off-axis sub-aperture null measurements of an aspheric surface”, Proc. SPIE Vol. 7063,2008,706316-1-7. [7] Heder V. B., “Efficient Cartesian representation of Zernike polynomials in computer memory”, Proc. SPIE Vol. 3190, 1997,0277-786X. [8] James H. ,and Zhao C., “Applications of subaperture stitching interferometry for very large mirrors”, Proc. of SPIE Vol. 8450, 2012,84500X. [9] Murphy P. , DeVries G., Fleig J., Forbes G., Kulawiec A., and Miladinovic D., “ Measurement of high-departure aspheric surfaces using subaperture stitching with variable null optics”, , Proc. SPIE Vol. 7426,2009,74260P. [10] Floriot J. , Levecqa X. , Bucourta S. ,Thomassetb M., Polackb F. , Idirb M., Mercèreb P. , Brochetb S. ,and Morenob T.,” Surface metrology with a stitching Shack-Hartmann profilometric head”, Proc. of SPIE Vol. 6616,2007, 66162A. [11] Idir M. ,and Dovillaire G. , ’’A 2 D high accuracy slope measuring system based on a Stitching Shack Hartmann Optical Head”, Optical Society of America Vol. 22, 2014,No. 3. [12] 許俊榮,2016,光波前表面變形量測系統之設計與開發(Design and Development of Shack-Hartmann Surface Deformation Measuring System), 國立臺灣大學工學院機械工程學研究所碩士論文。 [13] Akondi V., Roopashree M. B. , and Prasad B. R. , ’’ Optimization of Existing Centroiding Algorithms for Shack Hartmann Sensor’’, Proceedings of the National Conference NAC- CISS09, 2009, pp.400-405. [14] Hudgin R. H., “Wavefront Reconstruction for Compensated Imaging,” Journal of the Optical Society of America, Vol. 67, 1976, pp. 375-378. [15] Fengzhao D. , Feng T. , Wang X. Wang, Osami S. , and Feng P. , ” Modal Wavefront Reconstruction based on Zernike Polynomials for Lateral Shearing Interferometry: Comparisons of Existing Algorithms’’, Optical Society of America, Vol. 51, 2012, pp. 5028-5037. [16] 陳郁茗,2015,氣動封包式微劑量霧化氣及光學劑量檢測系統之設計開發 (Design and Development of Pneumatic Micro-dose Nebulizer with Optical Dosage Monitoring),國立臺灣大學工學院機械工程學研究所碩士論文。 | |
dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/69798 | - |
dc.description.abstract | 隨著元件加工尺寸日益縮小,精密量測需求也日益重要,擁有非接觸性與高解析度的光學量測必然是精密量測發展重點之一。在光學量測系統中各光學元件的品質好壞也直接影響量測系統的性能,因此光學元件之量測系統是研發精密光學量測系統重要的一環,如透射式光學元件常以出射光與入射光的相位差作為品質好壞的依據。Shack-Hartmann光波前感測器與干涉儀同樣是量測光的相位差,以相位差得到光路中的反射或透射物的表面輪廓或特性,然而Shack-Hartmann光波前感測器不同於干涉儀,有較易於架設與較強的環境干擾的特性。
本論文設計開發出光波前拼接式量測系統,分析因拼接所造成的光波前輪廓誤差,以輪廓誤差特性訂定修正項次,運用拼接誤差修正運算法估算誤差得修正量。藉由光學軟體進行實驗光路設計與分析,並使用模擬數據探討拼接誤差修正運算法之適用範圍與特性,透過實驗結果驗證誤差修正運算法能夠大幅降低拼接所造成的光波前輪廓誤差,並增加系統的量測結果穩定度,將拼接誤差PV值控制至0.8λ以下,以及RMS值至0.2λ以下,開發之系統解析度PV值為0.061λ,以及解析度RMS值為0.004λ,所開發機台最大可拼接量測範圍為直徑6.73 mm。 | zh_TW |
dc.description.abstract | Nowadays, the sizes of the mechanical components have been scaling down, the requirement of precise measurement is higher increasingly. Optical measurements with the advantages of non-contact and high resolution is one of the main developing technologies in precision measurements. The performance of optical measurement system is influenced by the quality of the optical component. Therefore, the measurement system for optical component plays an important part in the field of researching and development of precision optical measurement. The quality of transmissive optical components is usually judged by the phase difference between the incident beam and exit beam. Shack-Hartmann wavefront sensor (SHWS) and interferometer is able to measure the phase difference of light beam and capture the surface contour or feature of reflective or transmissive component. Howerever, SHWS with the advantages of simple set-up and anti - environmental interference is different from interferometer.
A wavefront measurement system based on stitching method is designed and developed in this paper. By analyzing the error contour of wavefront caused by stitching, the correction polynomial is determined and the stitching error correction algorithm is able to estimate correction quantity. The optical set-up is designed and analyzed by optical simulation software, Zemax, which is used to generate simulation data to study the effective range and feature of stitching error correction algorithm. The experiment shows that stitching error correction algorithm is able to reduce the error caused by stitching and improve stability of system. Finally, the P-V error of wavefront can be reduced to 0.8 λ, and the RMS error of wavefront is under 0.2 λ. Resolution reaches 0.061λin P-V error and 0.004 λ in RMS error. The maximum measurement range of stitching diameter reaches 6.73 mm. | en |
dc.description.provenance | Made available in DSpace on 2021-06-17T03:28:24Z (GMT). No. of bitstreams: 1 ntu-106-R04522628-1.pdf: 4340937 bytes, checksum: 28446df5c0890e0b964680064dbae256 (MD5) Previous issue date: 2017 | en |
dc.description.tableofcontents | 口試委員審定書 II
致謝 III 中文摘要 IVII Abstract V 圖目錄 IX 表目錄 XI 符號表 XII 第一章 緒論 1 1.1研究背景與動機 1 1.2 文獻回顧 2 1.3 研究目標 4 1.4 內容簡介 4 第二章 光波前拼接量測系統原理與架構 5 2.1 整體系統架構 5 2.2 光源與光路系統 6 2.3 SHWS光路之校準機構 11 2.4 可調光圈承載旋轉平台 14 第三章 光波前理論與拼接式運算法 16 3.1 光波前與像差 16 3.2 光波前拼接法 18 3.3 光波前重建運算法 25 第四章 光學模擬與分析 28 4.1 模擬光學模型 28 4.2 修正運算法特性分析 30 4.3 光圈傾斜誤差模擬 44 第五章 拼接式量測系統總體性能測試 47 5.1 實驗架構 47 5.2 系統調校 48 5.2.1光圈水平度調校 48 5.2.2光路調校 49 5.3 光波前拼接式量測測試與分析 51 第六章 結論與未來展望 58 結論 58 研究成果 58 未來展望 58 參考文獻 60 | |
dc.language.iso | zh-TW | |
dc.title | 光波前拼接式量測系統之設計與開發 | zh_TW |
dc.title | Design and Development of Stitching Wavefront Measurement System | en |
dc.type | Thesis | |
dc.date.schoolyear | 106-2 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 蔡得民,林沛群 | |
dc.subject.keyword | Shark-Hartmann 光波前感測器,拼接誤差修正運算法,透鏡量測,拼接量測方法, | zh_TW |
dc.subject.keyword | Shark-Hartmann wavefront sensor,stitching error correction algorithm,Lens measurement,stitching method, | en |
dc.relation.page | 61 | |
dc.identifier.doi | 10.6342/NTU201701422 | |
dc.rights.note | 有償授權 | |
dc.date.accepted | 2018-03-22 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 機械工程學研究所 | zh_TW |
顯示於系所單位: | 機械工程學系 |
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