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  1. NTU Theses and Dissertations Repository
  2. 電機資訊學院
  3. 光電工程學研究所
請用此 Handle URI 來引用此文件: http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/68794
完整後設資料紀錄
DC 欄位值語言
dc.contributor.advisor吳育任(Yuh-Renn Wu)
dc.contributor.authorChen-Ming Chuangen
dc.contributor.author莊鎮名zh_TW
dc.date.accessioned2021-06-17T02:35:42Z-
dc.date.available2020-08-21
dc.date.copyright2020-08-21
dc.date.issued2020
dc.date.submitted2020-08-18
dc.identifier.citation[1] H. Soda, K.-i. Iga, C. Kitahara, and Y. Suematsu, “GaInAsP/InP surface emitting injection lasers,” Japanese Journal of Applied Physics, vol. 18, no. 12, p. 2329, 1979.
[2] K. V. Chellappan, E. Erden, and H. Urey, “Laser-based displays: a review,” Applied optics, vol. 49, no. 25, pp. 79–98, 2010.
[3] A. Larsson, “Advances in VCSELs for communication and sensing,” IEEE Journal of selected topics in quantum electronics, vol. 17, no. 6, pp. 1552–1567, 2011.
[4] S. Shinada, F. Koyama, N. Nishiyama, M. Arai, and K. Iga, “Analysis and fabrication of microaperture GaAs-GaAlAs surface-emitting laser for near-field optical data storage,” IEEE Journal of Selected Topics in Quantum Electronics, vol. 7, no. 2, pp. 365–370, 2001.
[5] D. K. Serkland, G. M. Peake, K. M. Geib, R. Lutwak, R. M. Garvey, M. Varghese, and M. Mescher, “VCSELs for atomic clocks,” in Vertical-Cavity Surface-Emitting Lasers X, vol. 6132, p. 613208, International Society for Optics and Photonics, 2006.
[6] M. Grabherr, M. Miller, R. Jager, R. Michalzik, U. Martin, H. J.Unold, and K. J. Ebeling, “High-power VCSELs: single devices and densely packed 2-D-arrays,” IEEE Journal of Selected Topics in Quantum Electronics, vol. 5, no. 3, pp. 495–502, 1999.
[7] A. V. Krishnamoorthy, K. Goossen, L. Chirovsky, R. Rozier, P. Chandramani, S. Hui, J. Lopata, J. Walker, and L. D’Asaro, “16 x 16 VCSEL array flip-chip bonded to CMOS VLSI circuit,” IEEE Photonics Technology Letters, vol. 12, no. 8, pp. 1073–1075, 2000.
[8] R. A. Litjens, T. I. Quickenden, and C. G. Freeman, “Visible and near-ultraviolet absorption spectrum of liquid water,” Applied optics, vol. 38, no. 7, pp. 1216–1223, 1999.
[9] V. S. Langford, A. J. McKinley, and T. I. Quickenden, “Temperature dependence of the visible-near-infrared absorption spectrum of liquid water,” The Journal of Physical Chemistry A, vol. 105, no. 39, pp. 8916–8921, 2001.
[10] T. Hamaguchi, H. Nakajima, and N. Fuutagawa, “GaN-based vertical-cavity surface-emitting lasers incorporating dielectric distributed bragg reflectors,” Applied Sciences, vol. 9, no. 4, p. 733, 2019.
[11] K. Matsui, Y. Kozuka, K. Ikeyama, K. Horikawa, T. Furuta, T. Akagi, T. Takeuchi, S. Kamiyama, M. Iwaya, and I. Akasaki, “GaN-based vertical cavity surface emitting lasers with periodic gain structures,” Japanese Journal of Applied Physics, vol. 55, no. 5S, p. 05FJ08, 2016.
[12] M. Kuramoto, S. Kobayashi, T. Akagi, K. Tazawa, K. Tanaka, T. Saito, and T. Takeuchi, “High-power GaN-based vertical cavity surface-emitting lasers with AlInN/GaN distributed Bragg reflectors,” Applied Sciences, vol. 9, no. 3, p. 416, 2019.
[13] Z. Zheng, H. Long, S. Matta, M. Leroux, J. Brault, L. Ying, Z. Zheng, and B. Zhang, “Photoassisted chemical smoothing of AlGaN surface after laser lift-off,” Journal of Vacuum Science Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, vol. 38, no. 4, p. 042207, 2020.
[14] B. T. Tran and H. Hirayama, “Growth and fabrication of high external quantum efficiency AlGaN-based deep ultraviolet light emitting diode grown on pattern Si substrate,” Scientific reports, vol. 7, no. 1, pp. 1–6, 2017.
[15] W. Muranaga, T. Akagi, R. Fuwa, S. Yoshida, J. Ogimoto, Y. Akatsuka, S. Iwayama, T. Takeuchi, S. Kamiyama, M. Iwaya, et al., “GaN-based vertical-cavity surface-emitting lasers using n-type conductive AlInN/GaN bottom distributed Bragg reflectors with graded interfaces,” Japanese Journal of Applied Physics, vol. 58, no. SC, p. SCCC01, 2019.
[16] Z.-H. Young, “Electro-optical numerical modeling for the optimization of InGaN based vertical-cavity surface-emitting laser diodes,” Master’s thesis, National Taiwan University, 2020.
[17] H.-C. Yu, Z.-W. Zheng, Y. Mei, R.-B. Xu, J.-P. Liu, H. Yang, B.-P. Zhang, T.-C. Lu, and H.-C. Kuo, “Progress and prospects of GaN-based VCSEL from near UV to green emission,” Progress in Quantum Electronics, vol. 57, pp. 1–19, 2018.
[18] C. Zhang, R. ElAfandy, and J. Han, “Distributed bragg reflectors for GaN-based vertical-cavity surface-emitting lasers,” Applied Sciences, vol. 9, no. 8, p. 1593, 2019.
[19] T.-C. Lu, C.-C. Kao, H.-C. Kuo, G.-S. Huang, and S.-C. Wang, “CW lasing of current injection blue GaN-based vertical cavity surface emitting laser,” Applied Physics Letters, vol. 92, no. 14, p. 141102, 2008.
[20] T. Onishi, O. Imafuji, K. Nagamatsu, M. Kawaguchi, K. Yamanaka, and S. Takigawa, “Continuous wave operation of GaN vertical cavity surface emitting lasers at room temperature,” IEEE Journal of Quantum Electronics, vol. 48, no. 9, pp. 1107–1112, 2012.
[21] N. Hayashi, J. Ogimoto, K. Matsui, T. Furuta, T. Akagi, S. Iwayama, T. Takeuchi, S. Kamiyama, M. Iwaya, and I. Akasaki, “A GaN-based VCSEL with a convex structure for optical guiding,” physica status solidi (a), vol. 215, no. 10, p. 1700648, 2018.
[22] C.-C. Shen, Y.-T. Lu, Y.-W. Yeh, C.-Y. Chen, Y.-T. Chen, C.-W. Sher, P.-T. Lee, Y.-H. Shih, T.-C. Lu, T. Wu, C.-H. Chiu, and H.-C. Kuo, “Design and fabrication of the reliable GaN based vertical-cavity surface-emitting laser via tunnel junction,” Crystals, vol. 9, p. 187, 2019.
[23] K. Mehta, Y.-S. Liu, J. Wang, H. Jeong, T. Detchprohm, Y. J. Park, S. R. Alugubelli, S. Wang, F. A. Ponce, S.-C. Shen, et al., “Lateral current spreading in III-N ultraviolet vertical-cavity surface-emitting lasers using modulation-doped short period superlattices,” IEEE Journal of Quantum Electronics, vol. 54, no. 4, pp. 1–7, 2018.
[24] D. Becerra, D. Cohen, R. Farrell, S. Denbaars, and S. Nakamura, “Effects of active region design on gain and carrier injection and transport of CW (20-2-1) semipolar InGaN laser diodes,” Applied Physics Express, vol. 9, p. 092104, 2016.
[25] S. Nakamura, M. Senoh, S.-i. Nagahama, N. Iwasa, T. Matsushita, and T. Mukai, “Blue InGaN-based laser diodes with an emission wavelength of 450 nm,” Applied Physics Letters, vol. 76, pp. 22–24, 01 2000.
[26] A. Z. Goharrizi, G. Alahyarizadeh, Z. Hassan, and H. A. Hassan, “Study on effect of quantum well number on performance characteristics of GaN-based vertical cavity surface emitting laser,” Physica E: Low-dimensional Systems and Nanostructures, vol. 50, pp. 61–66, 2013.
[27] Y. Higuchi, K. Omae, H. Matsumura, and T. Mukai, “Room temperature CW lasing of a GaN-based vertical-cavity surface emitting laser by current injection,” Applied Physics Express, vol. 1, no. 12, p. 121102, 2008.
[28] J.-Y. Zhang, L.-E. Cai, B.-P. Zhang, S.-Q. Li, F. Lin, J.-Z. Shang, D.-X. Wang, K.-C. Lin, J.-Z. Yu, and Q.-M. Wang, “Low threshold lasing of GaN-based vertical cavity surface emitting lasers with an asymmetric coupled quantum well active region,” Applied Physics Letters, vol. 93, pp. 191118–191118, 2008.
[29] M. Kawaguchi, O. Imafuji, K. Nagamatsu, K. Yamanaka, S. Takigawa, and T. Katayama, “Design and lasing characteristics of GaN vertical elongated cavity surface emitting lasers,” in Gallium Nitride Materials and Devices IX, vol. 8986, p. 89861K, International Society for Optics and Photonics, 2014.
[30] Y.-R. Wu, R. Shivaraman, K.-C. Wang, and J. S. Speck, “Analyzing the physical properties of InGaN multiple quantum well light emitting diodes from nano scale structure,” Applied Physics Letters, vol. 101, no. 8, p. 083505, 2012.
[31] Y.-R. Wu, C. Chiu, C.-Y. Chang, P. Yu, and H.-C. Kuo, “Size dependent strain relaxation and optical characteristics of InGaN/GaN nanorod LEDs,” IEEE Journal of Selected Topics in Quantum Electronics, vol. 15, no. 4, pp. 1226–1233, 2009.
[32] T.-J. Yang, R. Shivaraman, J. S. Speck, and Y.-R. Wu, “The influence of random indium alloy fluctuations in indium gallium nitride quantum wells on the device behavior,” Journal of Applied Physics, vol. 116, no. 11, p. 113104, 2014.
[33] Y.-R. Wu, Y.-Y. Lin, H.-H. Huang, and J. Singh, “Electronic and optical properties of InGaN quantum dot based light emitters for solid state lighting,” Journal of applied physics, vol. 105, no. 1, p. 013117, 2009
[34] J. Piprek, “Efficiency droop in nitride-based light-emitting diodes,” physica status solidi (a), vol. 207, no. 10, pp. 2217–2225, 2010.
[35] X. Chen and Y.-R. Wu, “Numerical study of current spreading and light extraction in deep UV light-emitting diode,” in Light Emitting Diodes: Materials, Devices, and Applications for Solid State Lighting XIX, vol. 9383, p. 93830Q, International Society for Optics and Photonics, 2015.
[36] M. Filoche, M. Piccardo, Y.-R. Wu, C.-K. Li, C. Weisbuch, and S. Mayboroda, “Localization landscape theory of disorder in semiconductors. I. Theory and modeling,” Physical Review B, vol. 95, no. 14, p. 144204, 2017.
[37] M. Piccardo, C.-K. Li, Y.-R. Wu, J. S. Speck, B. Bonef, R. M. Farrell, M. Filoche, L. Martinelli, J. Peretti, and C. Weisbuch, “Localization landscape theory of disorder in semiconductors. II. Urbach tails of disordered quantum well layers,” Physical Review B, vol. 95, no. 14, p. 144205, 2017.
[38] C.-K. Li, M. Piccardo, L.-S. Lu, S. Mayboroda, L. Martinelli, J. Peretti, J. S. Speck, C. Weisbuch, M. Filoche, and Y.-R. Wu, “Localization landscape theory of disorder in semiconductors. III. Application to carrier transport and recombination in light emitting diodes,” Physical Review B, vol. 95, no. 14, p. 144206, 2017.
[39] M. Moharam and T. Gaylord, “Rigorous coupled-wave analysis of planar-grating diffraction,” Journal of the Optical Society of America, vol. 71, no. 7, 1981.
[40] D. L. Wood, K. Nassau, T. Kometani, and D. Nash, “Optical properties of cubic hafnia stabilized with yttria,” Applied optics, vol. 29, no. 4, pp. 604–607, 1990.
[41] L. V. Rodr´ıguez-de Marcos, J. I. Larruquert, J. A. M´endez, and J. A. Azn´arez, “Self-consistent optical constants of SiO2 and Ta2O5 films,” Optical Materials Express, vol. 6, no. 11, pp. 3622–3637, 2016.
[42] T. A. Konig, P. A. Ledin, J. Kerszulis, M. A. Mahmoud, M. A. ElSayed, J. R. Reynolds, and V. V. Tsukruk, “Electrically tunable plasmonic behavior of nanocube–polymer nanomaterials induced by a redox-active electrochromic polymer,” ACS nano, vol. 8, no. 6, pp. 6182–6192, 2014.
[43] U. Tisch, B. Meyler, O. Katz, E. Finkman, and J. Salzman, “Dependence of the refractive index of Alx Ga1−xN on temperature and composition at elevated temperatures,” Journal of Applied Physics, vol. 89, no. 5, pp. 2676–2685, 2001.
[44] B. El-Kareh and L. N. Hutter, Fundamentals of semiconductor processing technology. Springer Science Business Media, 2012.
[45] S. Wiechmann and J. Mu¨ller, “Thermo-optic properties of TiO2, Ta2O5 and Al2O3 thin films for integrated optics on silicon,” Thin solid films, vol. 517, no. 24, pp. 6847–6849, 2009.
[46] A. Elements, “Hafnium Oxide American Elements.”
[47] I. Vurgaftman, J. ´a. Meyer, and L. ´a. Ram-Mohan, “Band parameters for III–V compound semiconductors and their alloys,” Journal of applied physics, vol. 89, no. 11, pp. 5815–5875, 2001.
[48] M. E. Levinshtein, S. L. Rumyantsev, and M. S. Shur, Properties of Advanced Semiconductor Materials: GaN, AIN, InN, BN, SiC, SiGe. John Wiley Sons, 2001.
[49] N. Watanabe, T. Kimoto, and J. Suda, “Thermo-optic coefficients of 4H-SiC, GaN, and AlN for ultraviolet to infrared regions up to 500◦ C,” Japanese Journal of Applied Physics, vol. 51, no. 11R, p. 112101, 2012.
[50] J. Wu, W. Walukiewicz, W. Shan, K. Yu, J. Ager Iii, S. Li, E. Haller, H. Lu, and W. J. Schaff, “Temperature dependence of the fundamental band gap of InN,” Journal of Aplied Physics, vol. 94, no. 7, pp. 4457–4460, 2003.
dc.identifier.urihttp://tdr.lib.ntu.edu.tw/jspui/handle/123456789/68794-
dc.description.abstract以氮化鎵為基底的垂直共振腔面射型雷射因為諸多的優點例如: 低閾值電流、圓形光場等等,使之成為非常受矚目的光源。但是,受到製程中磊晶成長的限制,要達到較低的閾值電流仍是相當困難。另外,光增益的峰值與雷射共振腔的共振波長若彼此無法在頻域區間中對準,會降低垂直共振腔雷射的出光特性。本篇論文中使用光電數值模型以分析雷射元件之光電特性,針對低閾值電流及提升雷射光電特性的設計方法會在本文中討論。此外,共振腔特性和模態增益隨著溫度的變化也會利用數值模擬的方法於本文中討論。最後,將熱效應對雷射特性的影響考慮進設計準則中,提出針對不同元件、環境溫度的優化方法。zh_TW
dc.description.abstractGallium nitride (GaN)-based vertical-cavity surface-emitting laser diodes(VCSELs) become an attractive light source due to numerous advantages, which include low threshold current, circular beam profile, etc.. However, the low threshold current is hard to achieve because a quality epitaxial growth is still crucial. In addition, the misalignment between the gain peak and resonance wavelength would deteriorate the performance of VCSELs. The electro-optical numerical model is used to analyze the properties of device. The design rules to achieve a low threshold current and to enhance the performance of VCSELs are discussed. Moreover, the modal gain and the cavity properties are simulated with varying temperature. The designed principle which considers the thermal effect into the simulation model is presented. The relationships between temperature and both the gain characteristics and cavity properties are proposed.en
dc.description.provenanceMade available in DSpace on 2021-06-17T02:35:42Z (GMT). No. of bitstreams: 1
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Previous issue date: 2020
en
dc.description.tableofcontentsVerification letter . . . . . . . . . . . . . . . . . . . . . . . . . . i
Acknowledgement . . . . . . . . . . . . . . . . . . . . . . . . . . ii
Chinese Abstract . . . . . . . . . . . . . . . . . . . . . . . . . . iii
English Abstract . . . . . . . . . . . . . . . . . . . . . . . . . . iv
Contents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . v
List of Figures . . . . . . . . . . . . . . . . . . . . . . . . . . . viii
List of Tables . . . . . . . . . . . . . . . . . . . . . . . . . . . . xiii
1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
1.1 Motivation . . . . . . . . . . . . . . . . . . . . . . . . . 1
1.2 Thesis overview . . . . . . . . . . . . . . . . . . . . . . . 3
2 Methodology . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.1 Simulation flowchart . . . . . . . . . . . . . . . . . . . . 5
3 Design principle of VCSEL devices . . . . . . . . . . . . . . 7
3.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . 7
3.2 Reflectivity with different DBR . . . . . . . . . . . . . . 8
3.3 Thickness of cavity . . . . . . . . . . . . . . . . . . . . . 11
3.3.1 Resonance wavelength . . . . . . . . . . . . . . . . 12
3.3.2 Electric field distribution . . . . . . . . . . . . . . 13
3.4 Quantum well in active region . . . . . . . . . . . . . . . 16
3.4.1 Numbers of quantum well . . . . . . . . . . . . . . 17
3.4.2 Width and composition of quantum well . . . . . . 20
3.5 2-D optical simulation . . . . . . . . . . . . . . . . . . . 23
3.6 Summary . . . . . . . . . . . . . . . . . . . . . . . . . . 24
4 Thermal effect on VCSEL structure . . . . . . . . . . . . . . 28
4.1 Temperature dependent optical properties . . . . . . . . 29
4.1.1 Resonance wavelength shift . . . . . . . . . . . . . 29
4.1.2 Temperature dependence of properties on DBR mirrors . . . . . . . . . . . . . . . . . . . . . . . . . . 32
4.1.3 Change of confinement factor . . . . . . . . . . . . 33
4.2 Gain peak detuning with resonance wavelength . . . . . 35
4.2.1 Temperature dependent bandgap . . . . . . . . . . 35
4.2.2 Carrier injection in quantum well . . . . . . . . . . 36
4.2.3 Summary . . . . . . . . . . . . . . . . . . . . . . . 38
4.3 Thermal design principle . . . . . . . . . . . . . . . . . . 39
4.3.1 2-D optical simulation . . . . . . . . . . . . . . . . 43
5 Conclusion . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
Bibliography . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47
A Appendix Methodology . . . . . . . . . . . . . . . . . . . . . 58
A.1 Homogeneous Plane Wave . . . . . . . . . . . . . . . . . 58
A.2 Multi-layer problems . . . . . . . . . . . . . . . . . . . . 60
A.3 Poisson and drift-diffusion equation solver . . . . . . . . 68
A.4 Localization landscape theory . . . . . . . . . . . . . . . 71
A.5 Schrodinger equation and modal gain . . . . . . . . . . . 72
A.6 Light extraction problem . . . . . . . . . . . . . . . . . . 75
A.7 Rigorous coupled-wave analysis method . . . . . . . . . 76
B Appendix Simulation parameters . . . . . . . . . . . . . . . 84
B.1 Parameters for optical and electrical model . . . . . . . . 84
B.2 Parameters for thermal model . . . . . . . . . . . . . . . 85
dc.language.isoen
dc.subject熱優化zh_TW
dc.subject低閾值電流zh_TW
dc.subject設計準則zh_TW
dc.subject垂直共振腔面射型雷射zh_TW
dc.subject長波紫外光zh_TW
dc.subjectUVA VCSELen
dc.subjectdesigned ruleen
dc.subjectlow threshold currenten
dc.subjectthermal optimizationen
dc.title垂直共振腔面射型雷射之設計與優化zh_TW
dc.titleDesign and Optimization of Vertical-Cavity Surface-Emitting Laser Diodeen
dc.typeThesis
dc.date.schoolyear108-2
dc.description.degree碩士
dc.contributor.oralexamcommittee黃建璋(Jian-Jang Huang),吳肇欣(Chao-Hsin Wu),盧廷昌(Tien-Chang Lu)
dc.subject.keyword長波紫外光,垂直共振腔面射型雷射,設計準則,低閾值電流,熱優化,zh_TW
dc.subject.keywordUVA VCSEL,designed rule,low threshold current,thermal optimization,en
dc.relation.page86
dc.identifier.doi10.6342/NTU202003675
dc.rights.note有償授權
dc.date.accepted2020-08-19
dc.contributor.author-college電機資訊學院zh_TW
dc.contributor.author-dept光電工程學研究所zh_TW
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