利用低成本奈米球微影術製作奈米級光電元件之研究與應用

Abstract

在本論文中, 我們將會展示各種運用奈米球微影術製作出的奈米及光電元件。首先我們會先運用奈米球徑微影術配合非等向性濕蝕刻以及模板剝離等技術在可撓式和可拉伸式的基板上製作出金奈米粒子陣列和金金字塔陣列,同時我們運用時域有限差分法模擬出其光學特性,並且跟實驗量測結果比較討論。 第二,我們利用時域有限差分法模擬出,當在單一介質環境中,週期性的鋁奈米圓盤陣列能產生一個在可見光範圍的極小限寬共振,而且其共振波長可以隨著陣列的週期和介質環境的折射率變動。我們將運用奈米技術將此陣列製作出來並與增益介質結合,希望能觀察到雷射的現象。最後,我們運用奈米球徑微影術製作矽奈米網場效應電晶體,並測量它的電學特性和將此元件應用於化學及生物感測。

In this study, we will demonstrate several nanoscale optoelectronic devices fabricated using Nanosphere Lithography (NSL). First, periodic nanoparticles and inverted pyramid nanostructures are fabricated on top of flexible substrates using template-stripping method. Optical properties of these nanostructures are investigated experimentally and verified theoretically by using finite-difference time domain (FDTD) methods. Second, optical properties of periodic aluminum nanodisks are also investigated and the simulated extinction spectra reveal a tunable lattice plasmon mode peak within the visible spectra range. We will cover the fabricated nanodisks arrays with gain materials to study the lattice plasmon assisted lasing. In the last part of this dissertation, we will demonstrate the fabrication of silicon nanonet field-effect transistors (FETs). The electric properties of these nanonet FETs are investigated. We will also discuss the results measured by these Si nanonet FETs for chemical and biosensing applications.