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| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 陳亮嘉(Liang-Chia Chen) | |
| dc.contributor.author | Yi-Qun Dong | en |
| dc.contributor.author | 董軼群 | zh_TW |
| dc.date.accessioned | 2021-06-17T01:48:13Z | - |
| dc.date.available | 2017-07-27 | |
| dc.date.copyright | 2017-07-27 | |
| dc.date.issued | 2017 | |
| dc.date.submitted | 2017-07-25 | |
| dc.identifier.citation | 1.許萬里，鄭偉，苑惠娟，用相移干涉法測量表面三維輪廓的研究。感測器技術。2001，20(8):19-21。
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| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/67759 | - |
| dc.description.abstract | 本研究研發一套運用多波長菲佐干涉術的量測系統，并在未來可與工業研究院十二軸位移平台進行整合。本系統以系統簡單化及探頭微小化為目的，以利未來進一步研發出體積小、方便架設並具有擴展性之量測系統。此系統包含光纖及探頭兩部分，由單模光纖 (SM fiber)、高密度波長分波多工器、光循環器和光偵測器等元件作為光纖系統組成元件；自聚焦透鏡、訂製的分光矽試片和位移平台作為探頭系統組成元件。
本研究之技術發展將整合多波長干涉術、相移術等原理達成量測距離目標。光源部分利用紅外光頻譜找出三個相近的波段進行多波長干涉並減少相位模糊問題，在Free-Space階段使用精密奈米級壓電位移平台進行相移術，最後用光偵測器及電腦進行訊號處理同時得到距離資訊。 經過多次實驗證明後，本系統於良好環境控制下進行單波長位移距離量測時，兩量測點之間最大距離約為300 nm，並擁有約0.5 nm以內的誤差，換算後量測誤差百分比大約是0.17 %，使用單波長記錄週期的方法可將量測範圍擴大至數十個毫米，誤差約為30 nm。多波長距離量測部分，應用雙波長量測，兩量測點之間最大距離約為750 μm，經誤差修正後，擁有約0.6 μm 的誤差，換算後量測誤差百分比大約是0.08 %；進行雙波長絕對距離量測時，量測範圍約700 μm，可得到1 μm以內的誤差，換算後量測誤差百分比大約是0.13 %。此系統除前述優點外，亦具備開發成為小型化探頭的潛力，未來甚至可將此量測系統加入其他工具機的位移量測中，為一套極具發展潛力及擴展性的量測系統。 | zh_TW |
| dc.description.provenance | Made available in DSpace on 2021-06-17T01:48:13Z (GMT). No. of bitstreams: 1 ntu-106-R04522736-1.pdf: 5198706 bytes, checksum: 9ab197307ce6ee84515871d3afa0fd33 (MD5) Previous issue date: 2017 | en |
| dc.description.tableofcontents | 第1章 緒論 1
1.1 研究背景 1 1.2 研究目的 1 1.3 研究目標 2 1.4 論文架構 3 第2章 文獻探討 5 2.1 菲佐干涉術 5 2.2 相移術 6 2.3 多波長干涉術 8 2.4 多波長菲佐干涉儀 11 2.5 同步相移干涉術 13 2.6 雙波長菲佐干涉術之距離角度同步量測法 14 2.7 十二軸位移模組 16 2.8 總結 17 第3章 研究方法 18 3.1 整體系統架構 19 3.2 探頭內部架構 20 3.3 相移干涉量測原理及應用 20 3.4 距離量測系統訊號處理 26 3.5 試片鍍膜設計 29 第4章 系統架構與實驗設計 31 4.1 系統架構設計 31 4.2 光源與高密度波長分波多工器匹配度實驗 40 4.3 光源穩定性實驗 42 4.4 相對距離量測實驗 42 4.5 絕對距離量測實驗 43 4.6 長距離距離量測實驗 43 4.7 量測系統與十二軸位移平台整合設計 44 第5章 實驗結果及討論 48 5.1 光源與高密度波長分波多工器匹配度實驗 48 5.2 光源穩定性實驗 48 5.3 相對距離量測實驗 – 單波長 49 5.4 相對距離量測實驗 – 多波長 51 5.5 絕對距離量測實驗 54 5.6 長距離量測實驗 57 5.7 誤差分析與修正 59 5.7.1 系統誤差 59 5.7.2 外部干擾 61 5.7.3 誤差修正 61 第6章 結論與展望 68 6.1 結論 68 6.2 未來展望 69 參考文獻 73 | |
| dc.language.iso | zh-TW | |
| dc.subject | 多波長干涉；位移量測；??距离量測；光纖量測系統；菲佐干涉術 | zh_TW |
| dc.subject | multi-wavelength interferometry | en |
| dc.subject | displacement measurement | en |
| dc.subject | absolute distance | en |
| dc.subject | fiber-based measuring system | en |
| dc.subject | Fizeau interferometry | en |
| dc.title | 以多波長菲佐干涉術對位移與絕對距離量測技術之研發 | zh_TW |
| dc.title | Development of Precise Displacement and Absolute Distance Measurement Using Multi-wavelength Fizeau Interferometry | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 105-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 林世聰(Shyh-Tsong Lin),蕭金廷(Chin-ting Hsiao),傅尉恩(Wei-En Fu) | |
| dc.subject.keyword | 多波長干涉；位移量測；??距离量測；光纖量測系統；菲佐干涉術, | zh_TW |
| dc.subject.keyword | multi-wavelength interferometry,displacement measurement,absolute distance,fiber-based measuring system,Fizeau interferometry, | en |
| dc.relation.page | 76 | |
| dc.identifier.doi | 10.6342/NTU201701994 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2017-07-26 | |
| dc.contributor.author-college | 工學院 | zh_TW |
| dc.contributor.author-dept | 機械工程學研究所 | zh_TW |
| 顯示於系所單位： | 機械工程學系 | |
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