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http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/67376完整後設資料紀錄
| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 管傑雄 | |
| dc.contributor.author | I-Chen Lee | en |
| dc.contributor.author | 李沂臻 | zh_TW |
| dc.date.accessioned | 2021-06-17T01:29:47Z | - |
| dc.date.available | 2022-08-24 | |
| dc.date.copyright | 2017-08-24 | |
| dc.date.issued | 2017 | |
| dc.date.submitted | 2017-08-04 | |
| dc.identifier.citation | [1] Jason Valentine, Shuang Zhang, Thomas Zentgraf, Erick Ulin-Avila, Dentcho A. Genov, Guy Bartal & Xiang Zhang, “Three-dimensional optical metamaterial with a negative refractive index”, Nature 0724 18 Sep. 2008
[2] Nanfang Yu, Francesco Aieta, Patrice Genevet, Mikhail A. Kats, Zeno Gaburro, and Federico Capasso, “A Broadband, Background-Free Quarter-Wave Plate Based on Plasmonic Metasurfaces”, Nano Lett. 2012, 12, 6328−6333 [3] Yuanmu Yang, Wenyi Wang, Parikshit Moitra, Ivan I. Kravchenko, Dayrl P. Briggs, and Jason Valentine, “Dielectric Meta-Reflectarray for Broadband Linear Polarization Conversion and Optical Vortex Generation”, Nano Lett.2014, 14, 1394−1399 [4] Shulin Sun, Kuang-Yu Yang, Chih-Ming Wang, Ta-Ko Juan, Wei Ting Chen, Chun Yen Liao, Qiong He, Shiyi Xiao, Wen-Ting Kung, Guang-Yu Guo, Lei Zhou, and Din Ping Tsai, “High-Efficiency Broadband Anomalous Reflection by Gradient MetaSurfaces”, Nano Lett. 2012, 12, 6223−6229 [5] Nanfang Yu, Patrice Genevet, Mikhail A. Kats, Francesco Aieta, Jean-Philippe Tetienne, Federico Capasso, Zeno Gaburro, “Light Propagation with Phase Discontinuities: Generalized Laws of Reflection and Refraction”, SCIENCE VOL 334 21 OCTOBER 2011 [6] Qian Zhao, Lei Kang, B. Du, H. Zhao, Q. Xie, X. Huang, B. Li, J. Zhou, and L. Li, “Experimental Demonstration of Isotropic Negative Permeability in a Three-Dimensional Dielectric Composite”, PRL 101, 027402 (2008) [7] Yang Y M, Wang W Y, Moitra P, Kravchenko I I, Briggs D P and Valentine J, “ Nano Lett. 14 1394–9 2014 [8] Amir Arbabi, Yu Horie, Mahmood Bagheri and Andrei Faraon, “Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission”, NATURE NANOTECHNOLOGY | VOL 10 | NOVEMBER 2015 [9] Amir Arbabi, Yu Horie, Alexander J. Ball, Mahmood Bagheri & Andrei Faraon, “Subwavelength-thick lenses with high numerical apertures and large efficiency based on high-contrast transmitarrays”, NATURE COMMUNICATIONS | 6:7069 | DOI: 10.1038/ncomms8069 [10] Mohammadreza Khorasaninejad, Wei Ting Chen, Robert C. Devlin, Jaewon Oh, Alexander Y. Zhu, Federico Capasso, “Metalenses at visible wavelengths: Diffraction-limited focusing and subwavelength resolution imaging”, SCIENCE 3 JUNE 2016 • VOL 352 ISSUE 6290 [11]邱文政, 國家奈米元件實驗室/蝕刻薄膜阻, 金屬有機化學氣相沉積 [12] Wikipedia, scanning electron microscope | |
| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/67376 | - |
| dc.description.abstract | 超穎透鏡具有體積小且幾乎感受不到重量的優點。在傳統光學元件中，若需要達到消色差或是其他光學用途，必須透過多個鏡組來實現。這不僅會增加重量，而且現在的光學透鏡都是玻璃組成，非常易碎。穿透式超穎透鏡是由次波長結構來組成，穿透率接近100％，且具有2π的相位補償。其中可以藉由PB Phase的概念來達到2π的相位補償。
本論文的超穎透鏡是選用氮化鎵來當作介電質矩形結構的材料。利用電感耦合式電漿乾蝕刻來蝕刻氮化鎵的深度達600奈米。在乾蝕刻過程中，遇到了嚴重影響光學行為的針狀效應。本論文將深入探討針狀效應的生成原因以及解決方法。 最後以雙面拋光的藍寶作為基板，且以氮化鎵作為介電質矩形結構之材料，製作而成的穿透式超穎透鏡分為兩種：正向聚焦以及斜向聚焦。兩者的穿透效率分別高達91%以及71%。 | zh_TW |
| dc.description.abstract | Metalens have advantages of light and small. There are many disadvantages of traditional optical components such as bulky and fragile if ones want to get the purpose of achromatization. Transparent metalens are made of subwavelength structures. They perform nearly 100% in transmittance, and are capable of offering 2π phase compensation. 2π phase compensation can be achieved by PB phase.
In the thesis, we chose GaN as the material of rods, using ICP-RIE to etch 600nm depth of GaN. During the process of etching GaN, we found needle effect which seriously affect optical behavior. We will discuss what reasons caused needle effect, and offer solutions to it. Last but not least, we chose double-polished sapphire as substrate, and GaN as rods to fabricate our transparent metalens. There are two different kinds of transparent metalens in the thesis, normal focusing and oblique focusing. The transmittance of two metalens are 91% and 71% respectively. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-17T01:29:47Z (GMT). No. of bitstreams: 1 ntu-106-R04943178-1.pdf: 9461467 bytes, checksum: b023c63c229cfd30320bdfd5eac372da (MD5) Previous issue date: 2017 | en |
| dc.description.tableofcontents | 口試委員審定書……………………………………………………………………I
致謝…………………………………………………………………………………II 中文摘要……………………………………………………………………….III Abstract…………………………………………………………………………IV 目錄………………………………………………………………………………V 圖目錄…………………………………………………………………………….VIII 表目錄…………………………………………………………………………….XV 第一章 超穎表面的原理及發展……………………………………………………..1 1-1 前言………………………………………………………………………….1 1-1-1 傳統光學元件……………………………………………………….1 1-1-2 超穎材料 (Metamaterials)…………………………………………..1 1-1-3 超穎表面 (Metasurfaces)…………………………………………...2 1-2 研究動機……………………………………………………………………3 1-2-1 金屬超穎表面……………………………………………………….3 1-2-2 廣義的司乃爾定律(Generalized Snell’s Law)……………………5 1-2-3 反射式介電質超穎表面…………………………………………….6 1-2-4 穿透式介電質超穎表面…………………………………………...10 1-2-5 可見光波段的穿透式介電質超穎表面…………………………...13 1-2-6 小結與研究動機…………………………………………………...17 1-3 章節概要…………………………………………………………………...17 第二章 實驗儀器與樣品製備………………………………………………………18 2-1 製程儀器介紹……………………………………………………………...18 2-1-1 金屬有機化學氣相沉積…………………………………………...18 2-1-2 電漿輔助化學氣相沉積…………………………………………...19 2-1-3 微影技術與電子束微影系統……………………………………...19 2-1-4 電子槍蒸鍍系統…………………………………………………...22 2-1-5 反應離子蝕刻……………………………………………………...23 2-1-6 感應式耦合電漿蝕刻……………………………………………...24 2-2 量測儀器介紹……………………………………………………………...25 2-2-1 掃描式電子顯微鏡………………………………………………...25 2-3 樣品製備…………………………………………………………………...27 第三章 電感耦合式電漿乾蝕刻……………………………………………………34 3-1 電感耦合式電漿乾蝕刻原理及針狀效應………………………………...34 3-2 實驗結果……………………………………………………………….…..36 3-2-1 調整氯氣(Cl2)、三氯化硼(BCl3)以及 ICP power…………….…36 3-2-2 調整 ICP power、Bias…………………………………………….41 3-2-3 量化側壁傾斜的程度……………………………………………...44 3-2-4 優化側壁傾斜的程度……………………………………………...49 3-2-5 復機後的穩定性比較……………………………………………...54 3-3 光電製程實驗室之 ICP-RIE 之實驗結果……………………………….58 3-4 ICP-RIE 之穩定性測試……………………………………………………61 第四章 實驗結果與討論……………………………………………………………62 4-1 超穎透鏡之設計概念…………………………………….……...………...62 4-1-1 材料………………………………………………………………...62 4-1-2 週期………………………………………………………………...63 4-1-3 氮化鎵之厚度……………………………………………………...64 4-1-4 介電質矩形結構之長度和寬度…………………………………...65 4-2 原理………………………………………………………………………..67 4-2-1 正向聚焦之相位及相位分佈……………………………………...67 4-2-2 斜向聚焦之相位及相位分佈……………………………………...69 4-2-3 Pancharatnam–Berry phase…………………………………………71 4-3 實驗一:正向入射、正向收光…………………………………………….72 4-3-1 模擬與設計………………………………………………………...72 4-3-2 量測的光路架設…………………………………………………...75 4-3-3 正向聚焦之實驗結果……………………………………………...75 4-4 實驗二:正向入射、斜向收光…………………………………………….79 4-4-1 斜向聚焦之計算…………………………………………………...79 4-4-2 模擬與設計………………………………………………………...80 4-4-3 斜向聚焦之實驗結果……………………………………………...82 第五章 總結論與未來展望………………………………………………………....85 5-1 總結論……………………………………………………………………...85 5-2 未來研究方向……………………………………………………………...85 參考文獻……………………………………………………………………………..86 | |
| dc.language.iso | zh-TW | |
| dc.subject | 針狀效應 | zh_TW |
| dc.subject | 電感耦合式電漿乾蝕刻 | zh_TW |
| dc.subject | 超穎透鏡 | zh_TW |
| dc.subject | 氮化鎵 | zh_TW |
| dc.subject | 穿透式 | zh_TW |
| dc.subject | 電子束微影 | zh_TW |
| dc.subject | e-beam lithography | en |
| dc.subject | transparent | en |
| dc.subject | PB phase | en |
| dc.subject | GaN | en |
| dc.subject | inductively coupled plasma reactive ion etching | en |
| dc.subject | needle effect | en |
| dc.subject | metalens | en |
| dc.title | 穿透式單一波長超穎透鏡 | zh_TW |
| dc.title | Single Wavelength Transparent Metalens | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 105-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 吳肇欣,孫建文,孫允武,徐大正 | |
| dc.subject.keyword | 超穎透鏡,穿透式,氮化鎵,電感耦合式電漿乾蝕刻,針狀效應,電子束微影, | zh_TW |
| dc.subject.keyword | metalens,transparent,PB phase,GaN,inductively coupled plasma reactive ion etching,needle effect,e-beam lithography, | en |
| dc.relation.page | 87 | |
| dc.identifier.doi | 10.6342/NTU201701850 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2017-08-04 | |
| dc.contributor.author-college | 電機資訊學院 | zh_TW |
| dc.contributor.author-dept | 電子工程學研究所 | zh_TW |
| 顯示於系所單位： | 電子工程學研究所 | |
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