單根陽極氧化鋁奈米管之成長及其孔洞結構之演化

Abstract

由於陽極氧化鋁薄膜是由排列整齊且高深寬比的氧化鋁奈米管所組成的孔洞狀材料，因此被廣泛的運用於成長奈米材料的底板。然而，對於氧化鋁奈米管的生長行為卻沒有被清楚地研究。在此篇研究中，我們利用微影的技術成功得成長出單根孤立的陽極氧化鋁奈米管，並且我們還發現其不斷地分岔進而形成一個樹枝狀的結構，此樹枝狀結構最後形成一個外觀為半球狀的孔洞結構。若仔細觀察此孔洞結構，其孔洞隨著時間演化成不同的形狀。我們也發現應力會影響孔洞狀氧化鋁的成長速率，並且應力亦會改變孔洞的形狀。此研究可以幫助我們了解陽極氧化鋁奈米管的成長機制，並且提供我們許多創新的想法，藉以改變氧化鋁孔洞的形狀以製作出不同結構的奈米材料。

Porous anodic aluminum oxide (AAO) membranes have been widely used as templates for growing nanomaterials because of their ordered nanochannel arrays with high aspect ratio and uniform pore diameter. However, the intrinsic growth behavior of an individual AAO nanochannel has never been carefully studied for the lack means to fabricate a single isolated anodic alumina nanochannel (SIAAN). In this study, we develop a lithographic method to fabricate a SIAAN, which grows into a porous hemispherical structure with its pores exhibiting fascinating morphological evolution during anodization. We also discover the mechanical stress affects the growth rate and pore morphology of AAO porous structure. This study helps reveal the growth mechanism of arrayed AAO nanochannels grown on a flat aluminum surface and provides insights to help pave the way to alter the geometry of nanochannels on AAO templates for the fabrication of advanced nanocomposite materials.