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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 楊申語 | |
dc.contributor.author | Chia-Lin Wu | en |
dc.contributor.author | 吳佳霖 | zh_TW |
dc.date.accessioned | 2021-06-16T23:42:00Z | - |
dc.date.available | 2014-08-03 | |
dc.date.copyright | 2012-08-03 | |
dc.date.issued | 2012 | |
dc.date.submitted | 2012-07-25 | |
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dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/65423 | - |
dc.description.abstract | 使用滾輪製作微結構是目前最能夠高速且連續製作的方法,但是使用滾輪熱壓成型製作微結構,加熱冷卻的過程會使材料收縮產生翹曲;而使用滾輪紫外光固化成型製作微結構,在基材上會有殘留層。為了解決翹曲與殘留層的問題,本研究開發氣囊輪輔助墨水轉印滾壓製程來製作微結構。
本研究應用氣體均勻加壓的優點,設計氣囊加壓滾輪,藉氣體使壓力均勻分佈於轉印基材上,模具採用PDMS軟模製作,加上以高含水性的發泡PVA供墨滾輪,使用捲對捲連續送料系統,可於180 μm厚的PC塑膠基材表面製作出寬幅250 mm均勻的微米陣列孔洞結構,孔洞直徑130 μm,間距200 μm。實驗結果發現氣囊滾輪比傳統的金屬滾輪及橡膠滾輪有更大的操作窗,更易成型微結構,並且沒有殘留層。本研究也改變孔洞大小及間距的模具進行測試,發現模具與基材真實接觸面的轉印壓力,是影響微結構成型的主因之一。 接著應用本研究開發的設備進行彩色濾光片的製作,目前彩色濾光片多使用曝光顯影製程,手續繁雜且昂貴,本研究設備無殘留層且連續轉印的特性,適合用在彩色濾光片黑色矩陣及彩色色塊的印製上。本研究利用多道手續的轉印,將黑色、紅色、綠色及藍色光阻轉印製PC薄膜上,透過機台上架設的數位顯微鏡,可以準確地對位各色塊轉印位置。本論文製作出230 x 400 mm2大小的彩色濾光片,每個色塊大小為130 x 300 μm2,經由量測色塊的亮度差異小於7 %,印證氣囊輪輔助墨水轉印滾壓製程具有應用於產業的潛力。 | zh_TW |
dc.description.abstract | Roller imprinting has attracted grate attention due to its rapid, continuous nature; it is especially good for mass production. But there are still some problems need to be improved, such as warpage im roller hot embossing or residual layer. In roller UV inprinting This study is devoted to developing gasbag-roller-assisted ink roller imprinting process and its application.
The technique combines ink roller imprinting technique, gasbag-roller press and PDMS (Polydimethylsiloxane) flexible mold to replicate patterns on the polymeric film. Due to the isotropic pressure provided by the gasbag roller, the contact area between the mold and the substrate is increased and the uniformity of the imprinting pressure is enhanced. The photoresist is coated onto the PDMS mold roller surface by PVA (Polyvinyl acetate) foam roller. The polymer film is fed in-between gasbag-roller and PDMS mold roller, and the photoresist is then transferred from PDMS mold to PC (polycarbonate) film. Finally, the photoresist is cured by UV light. The micro-hole array is successfully fabricated on the PC film. The gasbag-roller-assisted ink roller imprinting technique is further employed to manufacture color filter, which consists of black matrix and RGB (red, green, blue) color block structures. The black matrix is imprinted on PC film first. The red, blue, and green blocks with dimension of 130 × 300 μm2 are precisely imprinted on the PC film after the roller/film alignments are verified with a high-resolution camera. The color filters with dimension of 250 × 400 mm2 have been fabricated. The variation in brightness between colors is less than 7%. This proves the potential of applying gasbag-roller-assisted ink roller imprinting technique on industry. | en |
dc.description.provenance | Made available in DSpace on 2021-06-16T23:42:00Z (GMT). No. of bitstreams: 1 ntu-101-D98522008-1.pdf: 10182855 bytes, checksum: 4e2e18541cba5f98ba73dfbfe8f0d72f (MD5) Previous issue date: 2012 | en |
dc.description.tableofcontents | 目錄
致謝 Ⅰ 摘要 Ⅱ Abstract Ⅲ 目錄 Ⅳ 圖目錄 Ⅴ 表目錄 Ⅹ 第一章 導論 1 1.1微結構製作技術 1 1.2微結構複製技術 2 1.3滾輪壓印成型技術 3 1.4滾輪壓印成型技術之問題 3 1.5軟微影製程技術 4 1.6紫外光滾輪壓印成型技術 5 1.7 轉印成型技術 5 1.8 研究動機與目標 6 1.9 論文內容與架構 8 第二章 文獻回顧 19 2.1 軟微影技術 19 2.2 微奈米壓印技術 20 2.3氣體輔助壓印成型技術 21 2.4 微結構滾輪轉印成型技術 22 2.5 微結構滾輪製作技術 23 2.6 文獻回顧總結與研究創新 24 第三章 氣囊輪輔助轉印滾壓製程開發與設計 52 3.1墨水選用條件 52 3.2氣囊滾輪轉印機制 53 3.3氣囊輪輔助轉印滾壓設備開發 49 3.4設備性能測試 57 3.4.1模具與基板表面能計算 57 3.4.2氣囊滾輪輔助效果測試 58 3.4.3轉印壓力量測與分析 59 3.4 量測設備 62 3.5 本章結論 63 第四章 製程參數探討 89 4.1 實驗模具與墨水備製 89 4.1.1 PDMS模具製作方法 89 4.1.2光阻備製 91 4.2 氣囊輪輔助轉印滾壓製程步驟 92 4.3 實驗參數規劃 93 4.4 操作條件對壓印成果影響分析 94 4.4.1 氣囊壓力對轉印成果影響 94 4.4.2 氣缸壓力對轉印成果影響 95 4.4.3 轉印速度對轉印成果影響 95 4.5轉印結構影響 96 4.6本章結論 97 第五章 彩色濾光片製作 113 5.1 彩色濾光片原理 113 5.2 彩色濾光片傳統製作方法 114 5.3實驗模具與墨水備製 115 5.3.1模具製作 115 5.3.2光阻備製 119 5.4 彩色濾光片滾輪沾印製程開發 120 5.5 彩色濾光片製作成果 121 5.6 本章結論 122 第六章 結論與未來研究方向 134 6.1 研究成果總結 134 6.2 創研究貢獻 135 6.3 未來研究方向與展望 135 參考文獻 139 附錄A 液滴法量測表面能原理 146 附錄B 墨水轉印機制 149 附錄C 氣體輔助熱壓 154 附錄D 軟性電路板製作 156 | |
dc.language.iso | zh-TW | |
dc.title | 氣囊輪輔助墨水轉印滾壓製程之研發及應用 | zh_TW |
dc.title | Development of a Gasbag-Roller-Assisted Ink Roller Imprinting Process and Its Application | en |
dc.type | Thesis | |
dc.date.schoolyear | 100-2 | |
dc.description.degree | 博士 | |
dc.contributor.oralexamcommittee | 陳炤彰,沈永康,黃仁清,劉士榮,鄭芳松 | |
dc.subject.keyword | 氣體輔助加壓,轉印,滾輪壓印,光阻轉印,彩色濾光片, | zh_TW |
dc.subject.keyword | gasbag-roller,roller imprinting,photoresist stamping,color filter, | en |
dc.relation.page | 158 | |
dc.rights.note | 有償授權 | |
dc.date.accepted | 2012-07-25 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 機械工程學研究所 | zh_TW |
顯示於系所單位: | 機械工程學系 |
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