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| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 范光照 | |
| dc.contributor.author | Chao-Min Huang | en |
| dc.contributor.author | 黃兆民 | zh_TW |
| dc.date.accessioned | 2021-06-16T17:17:51Z | - |
| dc.date.available | 2012-08-22 | |
| dc.date.copyright | 2012-08-22 | |
| dc.date.issued | 2012 | |
| dc.date.submitted | 2012-08-17 | |
| dc.identifier.citation | [1] Taniguchi, N., “Current State in, and Future Trends of, Ultraprecision Machining and Ultrafine Materials Process”, Annals of CIRP, 32(2), 573-582(1993)
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A., Leach, R.R., “Modelling the Interaction Forces between an Ideal Measurement Surface and Stylus Tip of a Novel Vibrating Micro-scale CMM Probe”, IFIP AICT 315, 131-138 (2010) [33] Beer, F.P., Johnston, E.R., Dewolf, J.T., “Mechanics of Materials”, 3rd edition (2004) [34] Hermann, G., “Design of Tactile Measuring Probes for Coordinate Measuring Machines”, Acta Polytechnica Hungarica, Vol 6, No 1, 63-77 (2009) [35] Bos, E. J. C., Heldens, R. W. P., Delbressine, F. L. M., Schellekens, P. H. J., Dietzel, A., ”Compensation of the anisotropic behavior of single crystalline silicon in a 3D tactile sensor,” Sens. Actuat. A 134, 374–381 (2006). 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| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/63742 | - |
| dc.description.abstract | 本研究發展出高精度接觸式三維量測探頭，以懸浮片機構結合探針為基礎，搭配光學式位移感測器，測量探針接觸到工件後探球的三維位置變化。經精密儀器校正後，在行程20微米範圍內，各項性能之標準差皆在20奈米內。
有別於現今市面上製造程序複雜的探頭，本研究所提出之探頭可用傳統機械加工的方式完成，搭配三套自製微型化雷射干涉儀，可滿足現今微奈米級三次元量測儀之規格。 | zh_TW |
| dc.description.abstract | In this research, a high precision tactile 3D probe is proposed. Based on suspension mechanism with a stylus, the probe is able to detect the 3D displacement on the ball tip using optical sensors. Calibrations with a nano measuring and positioning machine proved the excellent performances in the whole measuring range.
Rather than complicated fabricating processes, this probe can be made by conventional machining processes. With three miniature interferometers, this probe could fill all requirements for the basic concepts of micro-/nano- CMM. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-16T17:17:51Z (GMT). No. of bitstreams: 1 ntu-101-R99522728-1.pdf: 3562953 bytes, checksum: dc0a704b92b0ceeb25411ddffd45a062 (MD5) Previous issue date: 2012 | en |
| dc.description.tableofcontents | 致謝 ii
中文摘要 iii Abstract iv 目錄 v 圖目錄 viii 表目錄 xi 第一章 緒論 1 1.1 研究動機 1 1.1.1 微奈米級三次元座標量測儀與探頭系統 2 1.1.2 研究目標 4 1.2 文獻回顧 5 1.2.1 壓敏電阻感測類： 5 1.2.2 電感及電容感測類： 7 1.2.3 光學量測類 9 1.2.4 自激共振類 12 第二章 探頭結構與量測原理 16 2.1 探頭結構設計 16 2.1.1 懸浮機構設計 16 2.1.2 探頭系統組裝 18 2.1.3 影響裝置 19 2.2 感測器原理 20 2.2.1 麥克森干涉儀 20 2.2.2 抗偏擺式干涉儀 24 2.2.3 測力計 25 2.2.4 訊號處理 28 第三章 探頭校正與矩陣運算 31 3.1 轉換矩陣 32 3.2 參數校正 34 3.2.1 X方向校正 35 3.2.2 Y方向校正 36 3.2.3 Z方向校正 37 3.2.4 校正結果 38 3.3 掃描性能 40 3.3.1 應用轉換矩陣於校正方向 40 3.3.2 水平45°方向矩陣驗證 42 3.4 觸發性能 43 3.4.1 觸發點判別 43 第四章 力學分析 46 4.1 力學推導 46 4.1.1 Euler-Bernoulli懸臂梁理論 46 4.1.2 剛性矩陣 48 4.1.3 座標轉換 50 4.1.4 X方向受力 51 4.1.5 Y方向受力 54 4.1.6 Z方向受力 56 4.1.7 均剛性條件 57 4.2 有限元素分析與模擬 58 4.3 剛性實驗 61 4.3.1 測力計校正 61 4.3.2 剛性實驗原理 63 4.3.3 實驗結果 65 4.3.4 變更桿長調整剛性 67 4.4 綜合比較 68 第五章 結論與未來展望 71 5.1 結論 71 5.2 未來展望 71 參考文獻 73 | |
| dc.language.iso | zh-TW | |
| dc.subject | 接觸式探頭 | zh_TW |
| dc.subject | 三次元量測儀 | zh_TW |
| dc.subject | 麥克森雷射干涉儀 | zh_TW |
| dc.subject | 懸浮機構 | zh_TW |
| dc.subject | CMM | en |
| dc.subject | contact probe | en |
| dc.subject | suspension mechanism | en |
| dc.subject | Michelson interferometer | en |
| dc.title | 三次元量測儀之微奈米級接觸式掃描探頭之研製 | zh_TW |
| dc.title | Fabrication of a tactile Scanning Probe for Micro/Nano CMM | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 100-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 覺文郁,李朱育 | |
| dc.subject.keyword | 三次元量測儀,接觸式探頭,懸浮機構,麥克森雷射干涉儀, | zh_TW |
| dc.subject.keyword | CMM,contact probe,suspension mechanism,Michelson interferometer, | en |
| dc.relation.page | 76 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2012-08-18 | |
| dc.contributor.author-college | 工學院 | zh_TW |
| dc.contributor.author-dept | 機械工程學研究所 | zh_TW |
| 顯示於系所單位： | 機械工程學系 | |
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