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  1. NTU Theses and Dissertations Repository
  2. 電機資訊學院
  3. 光電工程學研究所
請用此 Handle URI 來引用此文件: http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/63500
完整後設資料紀錄
DC 欄位值語言
dc.contributor.advisor蘇國棟(Guo-Dung (John)
dc.contributor.authorChanokchon Siritanyaraten
dc.contributor.author王豐德zh_TW
dc.date.accessioned2021-06-16T16:45:46Z-
dc.date.available2017-08-27
dc.date.copyright2012-08-27
dc.date.issued2012
dc.date.submitted2012-08-20
dc.identifier.citation[1] T. Bifano, et al., 'Micromachined deformable mirrors for adaptive optics,' in Proc SPIE Int Soc Opt Eng,Seattle, WA, United states, 2002, pp. 10-13.
[2] G. Vdovin and P. M. Sarro, 'Flexible mirror micromachined in silicon,' Appl Opt, vol. 34, 1995, pp. 2968-2968.
[3] Yu-Hung Lin, Yen-Liang Liu, and Guo-Dung J. Su*, “Optical zoom module based on two deformable mirrors for mobile device applications”, APPLIED OPTICS, Vol. 51, Issue 11, 2012, pp. 1804-1810.
[4] Meng-Hsuan Lin, Hsin-Ta Hsieh, Wei-Yao Hsu, Yuan-Chieh Cheng. Cheng-Hsien Wu, and Guo-Dong J. Su*, “Auto-Focus Imaging Systems with MEMS Deformable Mirrors”, Proc. SPIE Vol. 7428, 74280Q-1, 2009.
[5] K. Oguro, et al., 'Polymer film actuator driven by a low voltage,' in Proceedings of 4th InternationalSymposium on Micro Machine and Human Science at Nagoya, 1993, pp. 39-40.
[6] Binayak Bhandari1, Gil-Yong Lee and Sung-Hoon Ahn*, “A Review on IPMC Material as Actuators and Sensors:Fabrications, Characteristics and Applications”, Int. Journal of precision engineering and manufacturing Vol. 13. No. 1, 2012, pp. 141-163.
[7] A. Punning, M. Kruusmaa, and A. Aabloo, “Surface resistance experiments with IPMC sensors and actuators,” Sensors and Actuators, A 133, 2007, pp. 200-209.
[8] F. Carpi and E. Smela, “Biomedical Applications of Electroactive Polymer Actuators”, John Wiley & Sons, 2009.
[9] B. E. Conway, R. E. White, and J. O. Bockris, “Modern Aspects of Electrochemistry”, Springer, 1985.
[10] DuPont™, http://www2.dupont.com/Our_Company/en_US/.
[11] Jen-Liang Wang, “Compact Imaging System with Deformable Mirror Auto-Focusing & Zoom,” Master thesis, June 2007.
[12] Yu-Hung Lin and Guo-Dung Su, “Design and Applications of Reflective Optics System: Zoom System and Head-up Display System for Automobile”, 2011.
[13] Po-Yu Lin, Hsin-Ta Hsieh, and Guo-Dung John Su*, “Fabrication and Simulation of Large-Scale MEMS Deformable Mirror for Wave Front Active Control”, Proc. of SPIE Vol. 7816 78160L-1, 2010.
[14] Hsiang-Chun Wei, Guo-Dung John Su*, “A low voltage deformable mirror using Ionic-Polymer Metal Composite”, Proc. of SPIE Vol. 7788 77880C-1, 2010.
dc.identifier.urihttp://tdr.lib.ntu.edu.tw/jspui/handle/123456789/63500-
dc.description.abstract在這篇論文當中,我們運用離子高分子材料來運用做為光學系統中的可形變面鏡,以達到自動變焦以及放大的功能。 離子高分子材料跟傳統的電驅動高分子材料(EAP) 比較,在三個方面上都顯示出了更佳的在可形變鏡面應用上的潛力: 更好的可撓性、更大的形變量以及更低的制動電壓 (約1-3伏特)。 在這篇論文當中,我們應用有限元素法(FEM)來模擬並預測離子高分子可形變鏡面的設計。 我們可以以應用灰盒模型近似 (gray-box model approximation) 的有限元素分析法來得到解析解。接著,我們以三個以上不同設計的量測結果來確認模擬值的正確性,另外更多細節以及複雜的設計將會在後段的章節加以討論。 大部分的模擬結果都能夠符合光學系統中對可形變面鏡的要求zh_TW
dc.description.abstractIn this thesis, Ionic Polymer Metal Composite is used as Deformable mirror in an optical system for auto-focus and zoom functions. Ionic Polymer Metal Composite or IPMC shows greater potentials equivalent to or better than the conventional Electro-active polymer (EAP) as deformable mirror in these three aspects; more flexible, large deformation displacement (comparable to conventional one), low input voltage (1-3V to activate). Finite Element Method or FEM was used in this thesis for simulation process and prediction of IPMC Deformable Mirror (DM) design. From FEM analysis with gray box model approximation, the analytical solution can be obtained. Then, verification process with more than three different designs is conducted to confirm the correctness of the analytical solution. In addition, more details and complex design are reported in the latter chapter. Most of the simulation process seems to be satisfied the requirements as Deformable Mirror in optical system.en
dc.description.provenanceMade available in DSpace on 2021-06-16T16:45:46Z (GMT). No. of bitstreams: 1
ntu-101-R99941109-1.pdf: 2933692 bytes, checksum: 11415ee39d26d117b062c9c0ad9db96b (MD5)
Previous issue date: 2012
en
dc.description.tableofcontents口試委員會審定書 #
Acknowledgement i
中文摘要 ii
ABSTRACT iii
CONTENTS iv
LIST OF FIGURES vi
LIST OF TABLES x
Chapter 1 Introduction 1
1.1 Ionic Polymer Metal Composite 3
1.2 Freeform MEMs Deformable Mirror 8
Chapter 2 Design 19
2.1 FEM simulation model used in ANSYS APDL software 19
2.2 FEM simulation model used in ANSYS Workbench software 24
2.3 The Verification process 27
Chapter 3 Fabrication process 32
3.1 Standard IPMC Fabrication Process 32
3.2 Photolithography based and patterned IPMC fabrication process 35
3.2.1 Lithography based IPMC fabrication process 35
3.2.2 Patterned IPMC fabrication process 38
3.3 Methodology to solve analyrical resultant surface force for simulation processes 40
Chapter 4 Simulation results & Improvement 42
4.1 Verification Results 42
4.2 Improvement in designs 50
4.3 Collaborated work related to Freeform MEMs Deformable Mirror 61
Chapter 5 Conclusion and Future Work 63
5.1 Conclusion for IPMC DM part 63
5.2 Conclusion for Freeform DM collaborated work 65
5.3 Future Work 65
REFERENCE 66
APPENDIX 68
dc.language.isoen
dc.subject離子高分子金屬複合物zh_TW
dc.subject變形反射鏡zh_TW
dc.subject有限元模擬zh_TW
dc.subject自動對焦系統zh_TW
dc.subject變焦系統zh_TW
dc.subjectANSYS Workbenchzh_TW
dc.subjectIPMCen
dc.subjectDeformable mirroren
dc.subjectFEM simulationen
dc.subjectAuto-focus systemen
dc.subjectzoom systemen
dc.subjectANSYS Workbench.en
dc.title有限元素分析法應用在離子高分子金屬複合物製作的可型變鏡面zh_TW
dc.titleFEM simulation of ionic polymer metal composite for deformable mirror applicationsen
dc.typeThesis
dc.date.schoolyear100-2
dc.description.degree碩士
dc.contributor.oralexamcommittee林晃巖(Hoang-Yan Lin),黃鼎偉(Ding-Wei Huang)
dc.subject.keyword離子高分子金屬複合物,變形反射鏡,有限元模擬,自動對焦系統,變焦系統,ANSYS Workbench,zh_TW
dc.subject.keywordIPMC,Deformable mirror,FEM simulation,Auto-focus system,zoom system,ANSYS Workbench.,en
dc.relation.page71
dc.rights.note有償授權
dc.date.accepted2012-08-21
dc.contributor.author-college電機資訊學院zh_TW
dc.contributor.author-dept光電工程學研究所zh_TW
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