在高定義電極形狀來製作光滑可調適鏡面

Abstract

可形變鏡面在光學系統中是一重要的反射元件，可在鏡子表面形變時改變聚焦長度，現今有幾種可用來做可形變鏡面的材料，例如液態透鏡或是微機電技術等，而微機電可形變鏡面已在我們實驗室研發多時，但其高致動電壓一直都是難以解決的問題。 在此篇論文中，我們提出一個叫離子性聚合物金屬複合材料(IPMC)來製作可形變鏡面，其優勢在於低電壓高形變量。藉由遮蔽罩子可成功的定義任意形狀的電極在IPMC上，對於圓形電極的IPMC其效果於2伏特下，可達到中心最大位移350μm，我們相信這種新的材料未來在光學系統中可當作可形變鏡面的材料。

Deformable mirror is a very important reflective component in optical system, which can vary the focal length while the surface deform. Nowadays several type of material were used as deformable mirror, such as liquid lens and MEMS deformable mirror. MEMS deformable mirror have been developed in our group and shows the potential. However, the problem of high actuation voltage is not easy to solve. In this thesis, we proposed using low voltage applied material, which is called Ionic-Polymer Metal Composite (IPMC) with the advantage of low applied voltage but high actuation performance. Arbitrary-shaped electrode IPMC was successfully fabricated by simply covering a shadow mask during electroless plating. Maximum central displacement of ellipsoid-shaped electrode IPMC can be achieved up to 350 μm under 2.5 volts applied. We believe this technique can be used in optical system as a deformable mirror in the future.