生產排程與保養整合最適策略

Abstract

離子植入區在半導體晶圓製造的諸多步驟之中扮演十分重要的腳色，其中製程類別選擇排序的特點是不同種類的在製品批量順序會直接影響到機台當機機率的消長。因此生產規畫決策須同時考量到機台維護保養的議題。國內企業為了追求生產上的效率，往往忽略掉機台維護保養的重要性，沒有同時將兩種問題整合，太早進行機台的維護會增加設定轉換的次數及時間成本。然而，太晚進行則是會發生嚴重的當機情形，會耗費多的時間及不必要的成本進行修復。所以維修保養的時點以及如何整合至生產排程之中高科技製造業的重要決策問題。 本研究的主要目的是先建構離子植入區機台的失效率估計模型，並建立兩種不同考量的風險規避策略在針對製程類別排序行為的排程模擬。透過模擬結果進一步找出針對整合機台維修保養與生產效率的控制閥值。 本研究主要的貢獻除了建構與分析不同使用情境下的離子植入區燈絲失效率評估模型外，並透過上述模型提供最適製程排序方法，來降低在複雜的製造過程中不確定性因素，如當機及其他不必要的損失。

Ion implant area is one of the most important processes in semiconductor fabrication industry. The characteristic of this area is that the sequence for different arrival rate of WIP type would affect the variation of machine failure rate. This means the scheduling decision making is just machine maintenance work. Many companies only pursue production efficiency but ignore the importance of maintenance work. We should integrate them simultaneously The main purpose of this study is to construct the unique failure rate estimation model for the machine, and the establishment of risk aversion strategies in the schedule for the sort of process behavior simulation of two different considerations. Second, determine the most suitable scheduling method. Finally, using simulation results to further identify the control threshold for the integration of machine maintenance and production efficiency. The main contribution of this study in addition to construction of the analysis of different use the context of ion implantation filament failure rate estimation model, and through methods described above to provide the optimum dispatching method which can reduce the uncertainties in the complex manufacturing process, such as breakdown of machine suddenly.