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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
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dc.contributor.advisor | 李佳翰(Jia-Han Li) | |
dc.contributor.author | Li-Jen Chang | en |
dc.contributor.author | 章力仁 | zh_TW |
dc.date.accessioned | 2021-06-16T16:33:19Z | - |
dc.date.available | 2017-11-28 | |
dc.date.copyright | 2012-12-24 | |
dc.date.issued | 2012 | |
dc.date.submitted | 2012-11-30 | |
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dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/63295 | - |
dc.description.abstract | 利用強場雷射激發惰性氣體的高階諧波產生法已經發展有段時間,本實驗希望利用具有表面電漿子之奈米結構增強電場強度,使之達到可以產生高階諧波的強度門檻,進而達到極紫外光波段,相較於以往使用頻脈衝放大技術於高階諧波產生極紫外光光源,更佳小型方便,我們製作了兩種場強增益的奈米結構與模擬,並架設了高階諧波光路系統,期望在未來可以應用在極紫外光微影與檢測。
另外,我們架設了兆赫波時域頻譜系統,利用飛秒雷射作為光源,光導天線作為發射端與接收端,量測到160皮秒的訊號。我們做了外加偏壓與雷射光強的訊號比較,發現場強跟偏壓及雷射光強的相依性。期望往後在生物檢測以及材料檢測上有幫助。 | zh_TW |
dc.description.abstract | It has been long time for using intense laser targeting on noble gas to generate high harmonic generation (HHG). In our experiment, we expect that we can generate extreme ultraviolet (EUV) region by using nanostructures with surface plasmon to enhance laser electric field exceeding the threshold in HHG. Compared with chirped-pulse amplification generating HHG, our experimental setup is small-scale and convenient. We fabricated two nanostructures with field enhancement for HHG and simulated them, and set up HHG system. It is expected to applying EUV inspection or EUV lithography.
Otherwise, we set up terahertz time domain spectroscopy (THz-TDS), using femtosecond laser as light source and using photoconductive antennas as emitter and receiver. We detected signals and the pulse duration is 160 ps. We compared the pulses with bias voltage and optical power, and the amplitude of radiation field depends on bias voltage and optical power. We expect to apply to bio-sensing and inspection of material in the future. | en |
dc.description.provenance | Made available in DSpace on 2021-06-16T16:33:19Z (GMT). No. of bitstreams: 1 ntu-101-R99525077-1.pdf: 2374607 bytes, checksum: c5ee71daa728aec77fabafe1ac48b8d3 (MD5) Previous issue date: 2012 | en |
dc.description.tableofcontents | 口試委員會審定書 #
致謝 ii 中文摘要 iii ABSTRACT iv STATEMENT OF CONTRIBUTION v CONTENTS vi LIST OF FIGURES ix Chapter 1 Introduction 1 1.1 Extreme Ultraviolet 1 1.1.1 Background 1 1.1.2 High harmonic generation 2 1.1.3 Plasmonic nanostructure 4 1.2 Terahertz Radiation 5 1.2.1 Background 5 1.2.2 Property and Application 6 1.2.3 Photoconductive antenna 8 Chapter 2 Extreme Ultraviolet 10 2.1 High Harmonic Generation 10 2.1.1 Optical field ionization 10 2.1.2 Three step model 11 2.2 Plasmonic Nanostructures 12 2.2.1 Localized surface Plasmon 12 2.2.2 Fabrication 13 2.2.3 Simulation 15 2.3 Experiment Setup 16 2.3.1 Optical path for third harmonic wave 16 2.3.2 Optical path for higher harmonic generation 19 2.3.3 Focusing 20 2.3.4 Dispersion compensation 21 2.4 Simulation Result and Experimental Result 24 2.4.1 Nanostructure fabrication and simulation 24 2.4.2 Measurement in EUV system 27 Chapter 3 Terahertz Radiation 30 3.1 Basic Theory 30 3.1.1 Wave equation 30 3.1.2 Drude-Lorentz model 31 3.1.3 Generation of photoconductive antenna 33 3.1.4 Hertzian dipole 36 3.1.5 Detection of photoconductive antenna 37 3.2 Experiment Setup 38 3.2.1 Ultrafast laser 38 3.2.2 Time-resolved pump-probe spectroscopy 39 3.2.3 Optical path in THz experiment 39 3.2.4 Measurement in THz-TDS system 41 Chapter 4 Conclusions and Future Work 45 4.1 Conclusions 45 4.2 Future Work 46 Appendix A 48 REFERENCE 49 VITA 55 | |
dc.language.iso | en | |
dc.title | 應用場強增益之奈米結構於高階諧波之極紫外光系統開發與應用光導天線於兆赫波產生 | zh_TW |
dc.title | Applying Nanostructures with Field Enhancement to Develop Extreme Ultraviolet System from High harmonic Generation and Applying Photoconductive Antennas to Generate Terahertz Radiation | en |
dc.type | Thesis | |
dc.date.schoolyear | 101-1 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 李坤彥(Kung-Yen Lee),鍾添東(Tien-Tung Chung),顏家鈺(Jia-Yush Yen),蔡宗儒(Tsong-Ru Tsai) | |
dc.subject.keyword | 表面電漿子,極紫外光,高階諧波產生,兆赫波,光導天線, | zh_TW |
dc.subject.keyword | surface plasmon,extreme ultraviolet,high harmonic generation,terahertz,photoconductive antenna, | en |
dc.relation.page | 55 | |
dc.rights.note | 有償授權 | |
dc.date.accepted | 2012-11-30 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 工程科學及海洋工程學研究所 | zh_TW |
顯示於系所單位: | 工程科學及海洋工程學系 |
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