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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 黃光裕(Kuang-Yuh Huang) | |
dc.contributor.author | Tien-Jen Chang | en |
dc.contributor.author | 張天仁 | zh_TW |
dc.date.accessioned | 2021-06-16T16:30:52Z | - |
dc.date.available | 2013-01-16 | |
dc.date.copyright | 2013-01-16 | |
dc.date.issued | 2012 | |
dc.date.submitted | 2012-12-21 | |
dc.identifier.citation | [1]Binning, G., Rohrer, H., Gerber, Ch., and Weibel, E., “Surface Studies by Scanning Tunneling Microscopy”, Rev. Sci. Inst., Vol. 49, No 1, 1982, pp.57
[2] Benning, G., Quate, CF., and Geber, Ch., ”Ato ic Force Microscope”, Phys. Rev. Letters, Vol. 56, No 9, 1986, pp.30 [3] Huang, Kuang-Yuh, Hwu, En-Te, Chow, Hsin-Yi, and Hung, Shao-Kan, “Develop ent of an Optical Pickup Syste for Measuring the Displace ent of the Micro Cantilever in Scanning Probe Microscope”, Proceeding of the 2005 IEEE: International Conference on Mechatronics, 2005, pp.695-698 [4] Hwu, En-Te, Huang, Kuang-Yuh, Hung, Shao-Kang,and Hwang, Ing-Shouh, “Measure ent of Cantilever Displace ent Using a Co pact Disk/Digital Versatile Disk Pickup Head”, Japanese Journal of Applied Physics, Vol. 45, No. 3B, 2006, pp.2368-2371 [5] Hwu, En-Te, “Design and Develop ent of a Multiaxial Astig atic Displace ent Measuring Syste ”, 國立台灣大學機械工程學研究所博士論文, 2006 [6] Juang, Bo-Jing, Huang, Kuang-Yuh, Liao, Hsien-Shun, Leong, Kuok-Chan, and Hwang, Ing-Shouh, ”AFM Pickup Head with Holographic Optical Ele ent (HOE)”, 2010 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, 2010, pp.442-446 [7] Leong, Kuok-Chan, “Design and Develop ent of a Holographic Ato ic Force Microscope”, 國立台灣大學機械工程學研究所碩士論文, 2009 [8] Yen, Shih-Hsun, Wu, Jim-Wei, and Fu, Li-Chen, “Apply Tapping Mode Ato ic Force Microscope with CD/DVD Pickup Head in Fluid”, 2010 A erican Control Conference, 2010 , pp.6549-6554 [9] Yen, Shih-Hsun, “Apply Novel Tapping Mode Ato ic Force Microscope with DVD Pickup Head in Fluid”, 國立台灣大學電機工程學研究所碩士論文, 2009 [10] Sulchek, T., Hsieh, R., Adams, J.D., Minne, S.C., Quate, C.F., and Adderton, D.M., “High-speed atomic force icroscopy in liquid”, Rev. Sci. Instrum., Vol. 71, No. 5, 2000, pp.2097-2099 [11] Xin, Xu, and Arvind, Ra an, “Comparative dynamics of magnetically, acoustically, and Brownian motion driven microcantilevers in liquids” J. Appl. Phys. Vol. 102, No.3, 2007, pp.034303-034303-8 [12] Asakawa, Hitoshi, and Fukuma, Takeshi, “Spurious-free cantilever excitation in liquid by piezoactuator with flexure drive mechanism” , Rev. Sci. Instrum., Vol. 80, No.10, 2009, pp.103703-103703-3 [13] John Elie Sader, ”Frequency response of cantilever beams immersed in viscous fluids with applications to the atomic force microscope”, J. Appl. Phys. Vol. 84, No.1, 1998, pp.64-76 [14] Fischer. R. E., and Tadic-Galeb, B., “Optical Syste Design”, The McGraw-Hill Companies, Inc., 2001 [15] NANOSENSORS 懸臂探針參考型錄, http://www.nanosensors.com/ [16] THORLAB 透鏡資訊參考型錄, http://www.thorlab.com/ [17] 全像式光學元件參考型錄, “Hologra Lasers: GH6D307B5A/GH6D307B5B”, Sharp, Inc [18] Jenkins, Francis A., and White, Harvey E., “Funda entals of Optics”, third edition, Mc-Graw-Hill Book Company, Inc., New York, U.S.A., 1957. [19] 耿繼業 和 何建娃,幾何光學,初版,全欣資訊圖書股份有限公司,1991 [20] 許阿娟、朱嘉雯、林佳芬 和 陳志隆,光學系統設計進階篇,第四版,2002 [21] Skoog, Douglas A., West, Donald M., Holler, F. James, and Crouch, Stanley R., “Funda entals of Analytical Che istry”, 8th Ed, 2003 [22] Ray ond C. S ith and Karen S. Baker, “Optical properties of the clearest natural waters(200-800 n )”, Applied Optics, Vol. 20, No.2, 1981, pp. 177-184 [23] John Downing, “Effects of Light Absorption and Scattering in Water Sa ples on OBSR Measure ents”, 2008 [24] 簡介Beer –Lambert Law, http://pharmaxchange.info/press/2012/04/ultraviolet-visible-uv-vis-spectroscopy-%E2%80%93-derivation-of-beer-lambert-law/ [25] NEWPORT 三軸線性平台MS Miniature Linear Stage 參考型錄, http://www.newport.com/ [26] Martin, Y., Willia s, C. C., and Wickra asinghe, H.K., “Atomic Force Microscope–Force Mapping and Profiling on a sub 100A scale”, J. Appl. Phys. Vol. 61, No. 9, 1987, pp.4723 [27] Liu, Yihan, Wu, Tong, and Fennell, Evans D., “Lateral Force Microscopy Study on the Shear Properties ofSelf-Assembled Monolayers of Dialkylammonium Surfactant on Mica”, Langmuir, Vol. 10, No. 7, 1994, pp.2241-2245 [28] Maivald P., Butt H. J., Gould S.A.C., Prater C.B., Drake B., Gurley J.A., Elings V.B., and Hans a P.K., “Using Force Modulation to Image Surface Elasticities with the Atomic Force Microscope”, Nanotechnology, 1991, pp.103-106 [29] Hart ann U., “MAGNETIC FORCE MICROSCOPY”, Annu. Rev. Mater. Sci., 1999 [30] Yoshida, Shinya, Minami, Kohji, Okada, Kuniaki, Yamamoto, Hiroyuki, Ueyama, Tetsuo, Sakai, Keiji,and Kurata, Yukio, “Optical Pickup E ploying a Hologram-Laser-Photodiode Unit”, Jpn. J. Appl. Phys., Vol. 39, 2000, pp.877-882 [31] Yoshida, Yoshio, Miyake, Takahiro, Sakai, Keiji, and Kurata, Yukio, “Optical Pickup Using Blazed Holographic Optical Ele ent fro Video Disc Players”, Jpn. J. Appl. Phys. Vol. 33, 1993, pp.3947-3951 | |
dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/63253 | - |
dc.description.abstract | 以全像式光學元件搭配準直鏡及物鏡所組成的光路系統作為原子力顯微鏡的量測單元,目前在空氣中量測已有奈米級解析度的掃描結果,本論文依此架構為基礎,改良光路系統的配置以應用於水溶液原子力顯微鏡上。相較於空氣介質對雷射光的聚焦特性,水溶液介質使聚焦雷射光較為發散,導致反射訊號變弱,量測敏感度下降,進而無法感測出微懸臂在水溶液中的動態特性。為了提升對水溶液中微懸臂的量測敏感度,透過光學軟體模擬以及最佳化光路系統聚焦水溶液中的反射訊號,並藉由實驗分析全像式光學元件的聚焦誤差訊號S 曲線,來驗證模擬的趨勢及結果。微懸臂在水溶液中受到流體阻尼的作用力影響,使其動態特性產生改變,共振頻率、振幅及品質因數Q 值皆下降,透過理論公式的分析及有限元素的模擬來推測其下降的幅度及趨勢,並利用實驗驗證。全像式光路系統整合於水溶液原子力顯微鏡也進行實驗驗證,使用石墨樣品來測試整體系統性能,在水溶液中掃描到約2 nm 的石墨台階位移變化。 | zh_TW |
dc.description.abstract | The aim of this thesis is to design and develop an atomic force microscope (AFM) for measurement in liquid, and its optical measurement system is built up with a holographic optical element (HOE), a collimate lens and an object lens. For the measurement in air, the HOE-AFM can achieve nano-scale resolution. However for the measurement in liquid, the liquid makes the laser beam divergent and ablates the beam reflection, thus the measurement sensitivity can be strongly reduced so that the finest cantilever motion cannot be detected. In order to increase its measurement sensitivity in liquid, the optical simulation software is applied to analyze and optimize the optical system. The performance such as the S-curve of focus error signal (FES) of the developed HOE-AFM is also experimentally tested and verified with the simulated results. The micro cantilever is significantly influenced by the fluid damping effect, which decreases its dynamic properties such as resonant frequency, amplitude and quality factor. Besides the experimental testing, both the theoretical and the finite element analyses are carried out for comprehending the dynamic characteristics of the cantilever in liquid. The developed HOE-AFM system is experimentally verified that it can achieve a measurement resolution of 2 nm for detecting graphite layer in liquid. | en |
dc.description.provenance | Made available in DSpace on 2021-06-16T16:30:52Z (GMT). No. of bitstreams: 1 ntu-101-R99522614-1.pdf: 10435765 bytes, checksum: 7a04d3113cb036ffabcd3ca1edbe9f33 (MD5) Previous issue date: 2012 | en |
dc.description.tableofcontents | 口試委員會審定書........................................II
誌謝.................................................III 中文摘要...............................................IV 英文摘要................................................V 目錄..................................................VI 表目錄................................................IX 圖目錄.................................................X 符號表...............................................XIV 第一章 緒論.............................................1 1.1 研究動機和背景.......................................1 1.2 文獻回顧............................................3 1.2.1 掃描穿隧式顯微鏡的發展...............................3 1.2.2 原子力顯微鏡的發展..................................4 1.2.3 水溶液原子力顯微鏡發展...............................6 1.2.4 應用光學讀取頭於原子力顯微鏡..........................9 1.2.5 應用光學讀取頭於水溶液原子力顯微鏡....................11 1.3 研究目標...........................................12 1.4 內容簡介...........................................13 第二章 水溶液原子力顯微鏡原理與架構介紹......................14 2.1 光學感測系統........................................16 2.2 懸臂探針系統........................................19 2.3 三軸掃描平台系統.....................................23 2.4 訊號擷取控制子系統...................................25 第三章 水溶液光學感測及懸臂探針系統之理論分析與模擬............26 3.1 水溶液中光學量測系統之理論分析.........................26 3.1.1 光追蹤法.........................................27 3.1.2 光柵上光偏折分析...................................31 3.1.3 光電感測器上光斑成像分析............................32 3.1.4 聚焦光點之能量分布.................................34 3.1.5 水溶液中光穿透率...................................36 3.2 光學量測子系統之模擬分析..............................37 3.2.1 S曲線之模擬分析....................................37 3.2.2 水層厚度對光強度的影響..............................41 3.2.3 物鏡與準直鏡對量測訊號的影響.........................44 3.2.3.1 模擬平行光束系統中透鏡對聚焦訊號強度的影響............44 3.2.3.2 模擬非平行光束中透鏡對聚焦訊號強度之影響..............46 3.3 懸臂子系統於水溶液之理論分析............................49 3.4 微懸臂於水溶液中之模擬分析..............................51 3.4.1 理論公式計算.......................................51 3.4.2 有限元素模擬.......................................53 第四章 光路性能及微懸臂動態特性之實驗分析探討..................54 4.1 光路性能實驗.........................................54 4.1.1 空氣中與水溶液中S曲線比較............................55 4.1.1.1 空氣...........................................56 4.1.1.2 空氣和蓋玻片....................................56 4.1.1.3 水溶液和蓋玻片...................................57 4.1.1.4 綜合比較........................................58 4.1.2 水層厚度對S曲線之影響...............................59 4.1.3 準直鏡及物鏡配置對水溶液中S曲線之影響..................63 4.1.4 非平行光系統對水溶液中S曲線之影響.....................68 4.2 懸臂激振量測實驗.....................................70 第五章 全像式水溶液原子力顯微鏡性能測試......................73 5.1 整體系統架構........................................73 5.1.1 光路量測子系統....................................75 5.1.2 懸臂探針子系統....................................76 5.1.3 三軸掃描平台子系統.................................77 5.1.4 訊號擷取控制子系統.................................78 5.2 空氣中性能測試......................................79 5.3 水溶液中性能測試.....................................83 第六章 結論與未來展望....................................86 參考文獻...............................................88 附錄..................................................92 | |
dc.language.iso | zh-TW | |
dc.title | 全像式水溶液原子力顯微鏡之設計與開發 | zh_TW |
dc.title | Design and Development of a Holographic Optical Element Atomic Force Microscope in Liquid | en |
dc.type | Thesis | |
dc.date.schoolyear | 101-1 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 林沛群,蔡得民 | |
dc.subject.keyword | 全像光學元件,原子力顯微鏡,水溶液,微懸臂,聚焦誤差訊號,S曲線, | zh_TW |
dc.subject.keyword | Holographic optical element,Atomic force microscope,Liquid,Cantilever,Focus error signal,S-curve, | en |
dc.relation.page | 108 | |
dc.rights.note | 有償授權 | |
dc.date.accepted | 2012-12-22 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 機械工程學研究所 | zh_TW |
顯示於系所單位: | 機械工程學系 |
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