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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 謝之真(Chih-Chen Hsieh) | |
dc.contributor.author | I-Min Hsieh | en |
dc.contributor.author | 謝奕民 | zh_TW |
dc.date.accessioned | 2021-06-16T10:48:27Z | - |
dc.date.available | 2018-08-20 | |
dc.date.copyright | 2013-08-20 | |
dc.date.issued | 2013 | |
dc.date.submitted | 2013-08-12 | |
dc.identifier.citation | 第6章 參考文獻
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dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/61133 | - |
dc.description.abstract | 微型化是近幾年來熱門的研究課題,然而如何低成本、高效率地生產微型元件,並兼顧其機械強度與可操控性則是一大瓶頸。本研究以溶膠凝膠(Sol-gel)製程結合靜止流體微影術(Stop-Flow Lithography)可大量製造高強度且帶有磁性之玻璃齒輪。我們在以PDMS製作之微流道中以光刻技術(Photolithography)聚合成高分子齒輪顆粒,在其前驅物溶液中含有高分子單體聚乙二醇二丙烯酸(PEGDA 700)、二氧化矽前驅物正矽酸乙酯(TEOS),且以甲基丙烯酰氧丙基三甲氧基矽烷(MEMO)連結高分子主體結構及二氧化矽前驅物,並加入四氧化三鐵超順磁性微米顆粒(Fe3O4)作為磁性來源。待光聚合反應完成後將高分子顆粒加熱,使TEOS進行熱縮合反應(Thermal condensation)。待縮合反應後使高分子齒輪顆粒於不同溫度(350℃、500℃及1150℃)下進行燒結程序並使高分子降解,發現皆可得到高機械強度之玻璃微齒輪。並測量觀察在各條件下其表面結構與機械性質變化,並確認在各燒結條件下仍可以保留其磁性,並能以外部磁場加以驅動使齒輪轉動。高機械強度之齒輪元件為組裝微型機械之基本條件,而可加以操縱驅動之玻璃微齒輪能夠作為微型機械之動力源,對於微型機械之發展將是一大助力。 | zh_TW |
dc.description.abstract | In recent years, microelectromechanical system has attracted much attention in engineering society. With miniaturization, we could not only reduce the cost of many existing applications but also have many possibilities for developing new applications. However, the mass production of microcomponents for micromachinery is always an issue.
In this study, we synthesized magnetic glass microgears by using the stop-flow lithography and sol-gel process. The microgears with complex shape were polymerized in a PDMS microchannel by photolithography. The prepolymer solution consisted of tetraethyl orthosilicate(TEOS) as the precursor of silicon-dioxide, poly(ethylene glycol) diacrylate (PEGDA 700) as the monomer, Darocur 1173 as the photoinitiator, 3-(Trimethoxysilyl)propyl methacrylate(MEMO) as the bridge monomer and magnetic particles as the source of the magnetism. The polymerized particles were then sintered to generate the glass microgears. These heating steps allowed polymer to burn out and TEOS would condense to SiO2. The resulting microgears were found to have great mechanical strength and can be controlled remotely by an external magnetic field. With these special features, we expect that the magnetic glass microgears have great potential to be used in the applications of micromachines in the future. | en |
dc.description.provenance | Made available in DSpace on 2021-06-16T10:48:27Z (GMT). No. of bitstreams: 1 ntu-102-R00524064-1.pdf: 4577556 bytes, checksum: fbd1085d2935492b57a37728adf9f0f8 (MD5) Previous issue date: 2013 | en |
dc.description.tableofcontents | 目錄
摘要 I Abstract II 目錄 III 圖目錄 VI 表目錄 XI 符號表 XII 希臘符號表 XII 第1章 緒論 1 1.1 前言 1 1.2 研究目的與動機 2 第2章 文獻回顧 3 2.1 光刻技術 3 2.1.1 光刻技術發展回顧 5 2.1.2 流體微影術 8 2.1.3 流體微影術成果介紹 13 2.2 水凝膠高分子(Hydrogel) 19 2.2.1 高分子基本性質 19 2.2.2 高分子反應機構 20 2.3 溶膠凝膠製程 23 2.3.1 二氧化矽(SiO2)製造 23 2.4 微元件製造 26 2.4.1 關於微元件製造新構想 31 第3章 實驗步驟與方法 32 3.1 儀器設備 32 3.2 實驗藥品 34 3.3 實驗方法 36 3.3.1 軟微影製程技術 36 3.3.2 微流道製作 43 3.3.3 溶膠凝膠製程 45 3.3.4 前驅物溶液與架設儀器 47 3.3.5 高分子粒子收集、清洗及熱聚合反應 49 3.3.6 冷凍乾燥法 50 3.3.7 齒輪驅動裝置 51 第4章 實驗結果與討論 52 4.1 實驗結果 52 4.1.1 製造微齒輪過程 52 4.2 燒結前結構成分分析 54 4.3 燒結後結構成分分析 57 4.4 磁性分析 60 4.4.1 四氧化三鐵磁性分析 61 4.4.2 燒結後齒輪磁性測量 61 4.5 成分組成對大小影響 63 4.6 燒結溫度與燒結時間對齒輪成分結構之影響 70 4.6.1 燒結條件Ⅰ-350℃ 70 4.6.2 燒結條件Ⅱ-500℃ 73 4.6.3 燒結條件Ⅲ-1150℃、4小時 75 4.6.4 燒結條件Ⅳ-1150℃、10小時 78 4.6.5 燒結結果整理分析 81 4.7 齒輪機械強度分析 84 4.8 齒輪之驅動 86 第5章 結論與未來展望 89 第6章 參考文獻 90 | |
dc.language.iso | zh-TW | |
dc.title | 以靜止流微影術製造具有磁性之玻璃微元件 | zh_TW |
dc.title | Manufacturing externally controllable magnetic microcomponents using stop-flow lithography | en |
dc.type | Thesis | |
dc.date.schoolyear | 101-2 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 林宏殷(Hung-Yin Lin),童世煌(Shih-Huang Tung),趙玲(Ling Chao) | |
dc.subject.keyword | 靜止流微影術,磁性微元件, | zh_TW |
dc.subject.keyword | stop-flow lithography,microcomponents, | en |
dc.relation.page | 94 | |
dc.rights.note | 有償授權 | |
dc.date.accepted | 2013-08-12 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 化學工程學研究所 | zh_TW |
顯示於系所單位: | 化學工程學系 |
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