請用此 Handle URI 來引用此文件：
http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/60449完整後設資料紀錄
| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 田維誠 | |
| dc.contributor.author | Yu-Sheng Lin | en |
| dc.contributor.author | 林宇聲 | zh_TW |
| dc.date.accessioned | 2021-06-16T10:18:29Z | - |
| dc.date.available | 2018-08-20 | |
| dc.date.copyright | 2013-08-20 | |
| dc.date.issued | 2013 | |
| dc.date.submitted | 2013-08-17 | |
| dc.identifier.citation | REFERENCE
[1] M. Phillips et al., ‘‘Volatile biomarkers of pulmonary tuberculosis in the breath”, Tuberculosis 87, 44-52. (2007) [2] D. Poli et al., ‘‘Exhaled volatile organic compounds in patients with non-small cell lung cancer: cross sectional and nested short-term follow-up study”, Respiratory Research 6, 1-10. (2005) [3] H. P. Chan et al., ‘‘Exhaled breath analysis: Novel approach for early detection of lung cancer”, Lung Cancer 63, 164–168. (2009) [4] H. Kataoka. , ‘‘Derivatization reactions for the determination of amines by gas chromatography and their applications in environmental analysis”, Journal of Chromatography A, 733 19-34.(1996) [5] C. SJ Probert et al., ‘‘Volatile Organic Compounds as Diagnostic Biomarkers in Gastrointestinal and Liver Diseases”, J Gastrointestin Liver Dis, September Vol.18 No 3, 337-343.(2009) [6] M. Phillips et al., ‘‘Volatile organic compounds in breath as markers of lung cancer: a cross-sectional study”, The Lancet, Vol 353, June 5.(1999) [7] M. Phillips et al. , ‘‘Volatile Markers of Breast Cancer in the Breath”, The Breast Journal, Volume 9, Number 3, 184–191.(2003) [8] M. Phillips, R.N. Cataneo, B.A. Ditkoff, P. Fisher, J. Greenberg, R. Gunawardena, C.S. Kwon, F. Rahbari-Oskoui, C.Wong, “Volatile markers of breast cancer in the breath”, Breast J. May-Jun;9(3):184-91.(2003) [9] Biomarkers Definitions Working Group, “Biomarkers and surrogate endpoints: preferred definitions and conceptual framework,” vol. 69, ed. Clinical Pharmacology & Therapeutics, pp. 89-95.(2001) [10] W. Cao and Y. Duan.,‘‘Breath Analysis Potential for Clinical Diagnosis and Exposure Assessment”, Clinical Chemistry; 52:800-11.(2006) [11] W.A. Groves, E.T. Zellers and G.C. Frye, “Analyzing organic vapors in exhaled breath using a surface acoustic wave sensor array with preconcentration: Selection and characterization of the preconcentrator adsorbent”, Anal. Chim. Acta 371 13.(1998) [12] J.W. Grate, N.C. Anheier and D.L. Baldwin, “Progressive Thermal Desorption of Vapor Mixtures from a Preconcentrator with a Porous Metal Foam Internal Architecture and Variable Thermal Ramp Rates”, Anal. Chem. 77 1867.(2005) [13] C.-J. Lu and E.T. Zellers, “A Dual-Adsorbent Preconcentrator for a Portable Indoor-VOC Microsensor System”, Anal. Chem. 73 3449.(2001) [14] S. Mitra and C. Yun, ‘‘Continuous gas chromatographic monitoring of low concentration sample streams using an on-line microtrap”, J. Chromatogr., 648 415-421.(1993) [15] M. Y. Afridi, J. S. Suehle, M. E. Zaghloul, D.W. Berning, A. R. Hefner, R. E. Cavicchi, S. Semancik, C. B. Montgomery, and C. J. Taylor, “A Monolithic CMOS Microhotplate-Based Gas Sensor System”, IEEE Sensors Journal, Vol. 2, No. 6, December.(2002) [16] I.Voiculescu, M. Zaghloul and N. Narasimhan, “Microfabricated chemical preconcentrators for gas-phase microanalytical detection systems”, Trends in Analytical Chemistry, Vol. 27, No. 4.(2008) [17] Frye-Mason, R.J. Kottenstette, P.R. Lewis, E. Heller, R.P. Manginell, D.R. Adkins, G. Dulleck, D. Martinez, D. Sasaki, C. Mowry, C. Matzke and L. Anderson, ‘‘Hand-held miniature chemical analysis system (lChemlab) for detection of trace concentrations of gas phase analytes’’, Proc. l-TAS _00 Workshop, Enschede, The Netherlands.(2000) [18] R.S. Pai, R.A. McGill, S.V. Stepnowski1, J.L. Stepnowski, K.P. Williams, H. Summers, R. Furstenberg, M.T. Rake, V.K. Nguyen, D.L. Simonson, B. Higgins, C. Kendziora and E.J. Houser, ‘‘Towards enhanced detection of chemical agents: design and development of a microfabricated preconcentrator”, Transducers & Eurosensors 14th Conf. Solid-State Sensors, Actuators and Microsystems, Lyon, France, 10–14 June, pp. 2291– 2294. (2007) [19] R.A. McGill, S.V. Stepnowski, E.J. Houser, D. Simonson, V. Nguyen, J.L. Stepnowski, H. Summers, M. Rake, K. Walsh, M. Crain, J. Aebersold and S.K. Ross, ‘‘A Microfabricated Preconcentrator for Enhanced Detection of Chemical Agents and Explosives’’, Eurosensors, Go‥teborg, Sweden.(2006) [20] W.-C. Tian, H.K.L. Chan, S.W. Pang, C.-J. LIP and E.T. Zellers, ‘‘High sensitivity three-stage microfabricated preconcentrator focuser for micro gas chromatography”, 12th Int. Conf. Solid-State Sensors,Actuators and Microsystems, Transducers _03, Boston, MA, USA, pp. 131–134.(2003) [21] C.-J. Lu, W.-C. Tian, W.H. Steinecker, A. Guyon, M. Agahz, M.C. Oborny, R.D. Sacks, K.D. Wise, S.W. Pang and E.T. Zellers,‘‘Functionally integrated MEMS micro gas chromatograph subsystem”, 7th Int. Conf. Miniaturized Chemical and Biochemical Analysts Systems, lTAS 2003, pp. 411–415.(2003) [22] W.-C. Tian and S. W. Pang, ‘‘Thick and thermally isolated Si microheaters for microfabricated preconcentrators”, J. Vac. Sci. Technol. B 211, Jan Feb.(2003) [23] B. Alfeeli and M. Agah, ‘‘MEMS-Based Selective Preconcentration of Trace Level Breath Analytes”, IEEE Sensors Journal, Vol. 9, No. 9, September.(2009) [24] B. Alfeeli, L. T. Taylor, and M. Agah, ‘‘Evaluation of Tenax TA thin films as adsorbent material for micro preconcentration applications”, Microchemical Journal, vol. 95, pp. 259-267.(2010) [25] W. -C. Tian, T.-H. Wu, C.-J. Lu W.-R. Chen and H.-J. Sheen, ‘‘A novel micropreconcentrator employing a laminar flow patterened heater for micro gas chromatography”, J. Micromech. Microeng., 22065014.(2012) [26] Y.-S. Lin, C.-Y. Kuo, W.-C. Tian, T.-H. Wu, H.-J Sheen, H.-Y Kuo, and C.-J. Lu, ‘‘Batch fabrication of micro preconcentrator with thin film microheater using tollen’s reaction”, IEEE Transducer, 15-20 Jun. Barcelona.(2013) [27] S. Takada, T. Nakai, W. Fujita, T. Thurakitseree, J. Shiomi, S. Maruyama, H. Takagi, M.Shuzo, J.-J. Delaunay and I. Yamada, “Evaluation of Adsorption Capacity of Single-walled Carbon Nanotubes for Application to Micro Gas Preconcentrators,” IEEE Sensors 2010 , 1-4 Nov.(2010) [28] C. M. Hussain, C. Saridara and S. Mitra, “Microtrapping characteristics of single and multi-walled carbon nanotubes”, Journal of Chromatography A, vol. 1185, no. 2, pp. 161–166.(2008) [29] I. Gracia, P. Ivanov, F. Blanco, N. Sabate, X. Vilanova, et al., “Subppm gas sensor detection via spiral μ-preconcentrator”, Sensors and Actuators B, vol. 132, no. 1, pp. 149–154.(2008) [30] W. -C. Tian, H. K. L. Chan, C. -J. Lu, S. -W. Pang and E. T. Zellers, “Multiple-stage microfabricated preconcentrator-focuser for micro gas chromatography system”, Journal of Microelectromechanical Systems, vol. 14, no. 3, pp. 498–507.(2005) [31] M.-Y. Wong, W.-R. Cheng, M.-H. Liu, W.-C. Tian, C.-J. Lu, ‘‘A preconcentrator chip employing μ-SPME array coated with in-situ-synthesized carbon adsorbent film for VOCs analysis”, Talanta 101 307–313.(2012) [32] 北區微機電中心，儀器教學手冊 [33] 黃盟欽，碳分子篩/氧化鋁複合膜之製備及特性之研究，國立成功大學化學工程研究所.(2004) [34] 王明怡，晶片型前濃縮裝置於有機揮發性氣體之研究，天主教輔仁大學化學系.(2010) [35] 陳瑋如，碳分子篩薄膜應用於微機電-有機氣體濃縮晶片研製，國立台灣師範大學化學研究所.(2012) [36] K. Dettmer and W. Engewald, Chromatographia, 57, S339.(2003) [37] Wikipedia, Flame ionization detection [38] 戴明鳳、董俊良，熱電偶式與熱敏式電子溫度器.(2009) [39] 陳俊菁，應用紅外線攝溫影像術檢測磁磚黏貼完整性，朝陽科技大學.(2004) [40] Jonas et al., 1998; Wheeler and Robell.(1969) [41] Anton Nagy1, Gerhard Mestl, “High temerature partial oxidation reactions over silver catalysts”, Applied Catalysis A: General 188 337–353.(1999) [42] L. D’Urso, G. Grasso, E. Messina, C. Bongiorno, V. Scuderi, S. Scalese, O. Puglisi, G. Spoto and G. Compagnini, “Role of Linear Carbon Chains in the Aggregation of Copper, Silver, and Gold Nanoparticles”, J. Phys. Chem. C, , 114 (2), pp 907–915.(2010) [43] A.R. Silva1 and G. Unali,” Controlled silver delivery by silver–cellulose nanocomposites prepared by a one-pot green synthesis assisted by microwaves”, Nanotechnology 22 315605.(2011) | |
| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/60449 | - |
| dc.description.abstract | 本研究為開發一種微型前濃縮晶片(Micro Preconcentrator, μPCT)，其為微型氣相層析系統 (Micro Gas Chromatography, μGC)之關鍵元件，氣相層析系統可針對人體所呼出之氣體混合物進行詳細分析，並以非侵入的方式監控人體健康狀況及提前預防肺部相關等疾病，亦可應用於環境監測及空氣汙染檢測等方面。
本研究所提出之微型前濃縮晶片，相較於其他研究團隊之設計，於微流道內製作有高加熱效能之微銀膜加熱器，其透過簡易的微機電製程(MEMS)技術，僅須一道光罩，並結合微流體技術及化學還原反應(多倫反應，Tollens’reaction)即可達到，大幅降低製程所需之時間和成本。並且針對先前研究之前濃縮晶片於量測上所碰到的缺點，進一步加以改善與改良，且可就其填入之吸附劑不同，能吸附不同物性之氣體化合物。並利用微加熱元件，能有效地將吸附之氣體進行分離與濃縮,達到高度的氣體選擇性及氣體濃縮效果。 本研究之μPCT將整合於氣相層析系統，以纖維素燒結碳化之碳膜作為吸附劑，進行揮發性有機氣體(Volatile organic compounds, VOCs)之量測與分析。當輸入功率為5 W時，具有50℃/s 之加熱速度，到達熱脫附之溫度僅需6秒，實驗中以濃度為10 ppm、1ppm、100ppb之Acetone、Benzene及Toluene作為待測氣體，脫附之氣體樣品將經過長度為17公尺之石英分離管柱進行分離，最後再經由火焰離子感測器偵測分離後氣體之訊號並加以分析。新設計前濃縮晶片採樣流速為過去設計的十倍，解決過去研究流阻過高、採樣流速過低的情況，濃縮容量亦較過去設計大，並可針對濃度較低(100ppb)之樣品氣體進行濃縮，濃縮效能表現更好。 | zh_TW |
| dc.description.abstract | We developed a micro preconcentrator (μPCT) for the micro gas chromatography (μGC), which can be employed to analyze the human exhaled breath for the non-invasive monitoring of the health condition of human body. It is believed that one can detect some lung related diseases and apply this device to the environmental and air-pollution monitoring.
A simple micromachined process s based on one photomask combined with microfluidic technique and the Tollens’ reaction is developed for a novel μPCT. The new design of the μPCT solved some problems and shortcomings that previous design encountered during the experiments and the measurements. With high efficient thermal capability and sufficient adsorption capacity, we could coat different kinds of adsorbents to adsorb several targeted gases in μPCT, concentrate the trace analytes, and separate them successfully by its heating element, thus improving the selectivity and the concentration effect of gases. With the micro silver heater, the μPCT can be heated to 300℃ rapidly by applying a constant electrical power of ~5 W with a heating rate of 60℃/s. Three volatile organic compounds (VOCs), acetone, benzene, and toluene, are collected through the proposed novel μPCTs and separated successfully using a 17-m-long gas chromatography (GC) column. The sampling flow rate of the novel μPCT is ten-fold faster than previous design, and the novel μPCT is able to concentrate sampling gases with lower concentration (100ppb). The novel μPCT has better and more efficient performance in concentrating. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-16T10:18:29Z (GMT). No. of bitstreams: 1 ntu-102-R00943056-1.pdf: 28151424 bytes, checksum: 1c2619dea5b63905a8fce0b851120b2c (MD5) Previous issue date: 2013 | en |
| dc.description.tableofcontents | CONTENTS
口試委員會審定書 i 致謝 ii 中文摘要 iii ABSTRACT iv CONTENTS v LIST OF TABLES viii LIST OF FIGURES ix Chapter 1 Introduction 1 1.1研究動機 1 1.2微型氣相層析系統介紹 5 1.3微型前濃縮晶片發展與文獻回顧 1 1.3.1微型前濃縮晶片發展 1 1.3.2文獻回顧 3 1.4論文架構 11 Chapter 2前濃縮晶片吸附原理、設計及製程介紹 12 2.1 吸附原理 12 2.1.1吸附劑介紹 12 2.1.2 氣體吸附方式 14 2.1.3採樣吸附動態模式- Wheeler Model 15 2.2 前濃縮晶片設計 20 2.2.1過去設計問題 21 2.2.2 新設計概念與模擬 26 2.3 前濃縮晶片製程流程與介紹 34 2.3.1 黃光顯影 35 2.3.2 感應耦合電漿離子矽蝕刻系統(ICP) 36 2.3.3 陽極接合(Anodic bonding) 45 2.3.4 銀鏡反應/多倫反應(Tollens’ reaction) (自身加熱器製程) 47 2.3.5 氣體吸附劑生成 50 2.3.6前濃縮晶片封裝 53 Chapter 3 實驗藥品耗材、儀器設備及實驗流程 54 3.1實驗藥品耗材 54 3.1.1 實驗藥品 54 3.1.2 實驗耗材 54 3.2 實驗儀器設備 56 3.2.1前濃縮量測系統 56 3.2.2火焰離子感測器(FID) 58 3.2.3 熱電偶原理與量測(Thermocouple) 60 3.2.4紅外線熱影像儀(IR camera) 63 3.3 量測實驗流程介紹 65 Chapter 4 實驗結果及數據分析 68 4.1實驗數據擷取 68 4.2前濃縮晶片氣體濃縮結果 70 4.2.1低濃度採樣氣體量測 70 4.2.2 濃縮倍率與採樣線性關係量測 73 4.2.3 新設計與過去設計濃縮效能比較 74 4.3前濃縮晶片加熱效能 76 4.4 濃縮效能問題討論 78 Chapter 5 結論、改進工作與未來展望 84 5.1結論 84 5.2改進工作與未來展望 85 Appendix 91 | |
| dc.language.iso | zh-TW | |
| dc.subject | 多倫反應 | zh_TW |
| dc.subject | 碳膜吸附劑 | zh_TW |
| dc.subject | 微型前濃縮晶片 | zh_TW |
| dc.subject | 微氣相層析系統 | zh_TW |
| dc.subject | 微銀膜加熱器 | zh_TW |
| dc.subject | micro preconcentrator | en |
| dc.subject | micro gas chromatography | en |
| dc.subject | micro silver heater | en |
| dc.subject | Tollen’s reaction | en |
| dc.title | 具銀膜加熱器之微型前濃縮晶片應用於微型氣相層析系統 | zh_TW |
| dc.title | Development of MEMS-Based Micro Preconcentrator with Silver Self-Heater for Micro Gas Chromatography | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 101-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 劉舜維,魏培坤,沈弘俊,呂家榮 | |
| dc.subject.keyword | 微型前濃縮晶片,微氣相層析系統,多倫反應,微銀膜加熱器,碳膜吸附劑, | zh_TW |
| dc.subject.keyword | micro preconcentrator,micro gas chromatography,Tollen’s reaction,micro silver heater, | en |
| dc.relation.page | 95 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2013-08-17 | |
| dc.contributor.author-college | 電機資訊學院 | zh_TW |
| dc.contributor.author-dept | 電子工程學研究所 | zh_TW |
| 顯示於系所單位： | 電子工程學研究所 | |
文件中的檔案：
| 檔案 | 大小 | 格式 | |
|---|---|---|---|
| ntu-102-1.pdf 未授權公開取用 | 27.49 MB | Adobe PDF |
系統中的文件，除了特別指名其著作權條款之外，均受到著作權保護，並且保留所有的權利。