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http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/58290
標題: | 高電阻溫度係數材料細胞色素C在CMOS相容紅外線感測器上的應用 CMOS compatible Infrared sensor by cytochrome c protein |
作者: | Chien-Jen Liao 廖建任 |
指導教授: | 蘇國棟 |
關鍵字: | 微熱輻射感測器,細胞色素C,蛋白質,電阻溫度係數,壓電式噴墨機, complementary metal oxide semiconductor,cytochrome c protein,inkjet printing,infrared sensing,microbolometer, |
出版年 : | 2014 |
學位: | 碩士 |
摘要: | The uncooled infrared microbolometers have drawn significant attention for a variety of applications recently. Various fabrication processes and materials for microbolometer have been developed for past decades. In this paper, we designed an inkjet printing process to deposit cytochrome c protein on top of aluminum which is compatible with the standard CMOS process. The aluminum split structure is thermal insulated from the substrate by a SU-8 photoresist layer. The high temperature coefficient of resistance of cytochrome c thin film was suitable for infrared sensing. The 1/f noise value of the cytochrome c thin film was 3.04 × 〖10〗^(-11) V^2/Hz at 10 Hz. The measured voltage difference on the protein-based microbolometer with fabricated read-out integrated circuits was 0.32-0.46 Volts per 0.25°C increments. The calculated NETD value of optimized pixel is 0.246K. We believe that this approach provide an inexpensive and standard CMOS fabrication process to lower the high cost of microbolometers in future. |
URI: | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/58290 |
全文授權: | 有償授權 |
顯示於系所單位: | 光電工程學研究所 |
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