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| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 李世光(Chih-Kung Lee) | |
| dc.contributor.author | Yi-Chen Chen | en |
| dc.contributor.author | 陳怡臻 | zh_TW |
| dc.date.accessioned | 2021-06-16T06:44:00Z | - |
| dc.date.available | 2016-08-05 | |
| dc.date.copyright | 2014-08-05 | |
| dc.date.issued | 2014 | |
| dc.date.submitted | 2014-07-28 | |
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| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/57386 | - |
| dc.description.abstract | 本論文嘗試以光學場調制力學場能力的複合材料作為致動器，應用在壓電式無閥門微幫浦(Valveless micropump)上，目的為以使用光學場調控力學場的方式，達到改變空間中的動態流率(Dynamic flow rate)。該複合材料是透過感光導電材料TiOPc (Titanyl Phthalocyanine)/copolymer薄膜以及蜂鳴片壓電材料PZT (Lead Zirconate Titanate)來製作。本文針對感光導電材料TiOPc薄膜做了詳細的電學阻抗分析實驗，以精密阻抗分析儀(Agilent 4294A)進行量測探討其照光前後阻抗之變化及電學特性。文中探討改變操作電壓、頻率及擴散器開口角度(2θ)的參數，比較光調控無閥式微幫浦照光前後之淨流量差異。
我們所製作出的無閥式微幫浦在驅動電壓為100V、頻率為600Hz，開口角度θ為10°時能產生的最大體積流率為95.33μL/min，在此條件下進行光調控無閥式微幫浦空間中動態流率及淨流量的探討。而光調控無閥式微幫浦在驅動電壓為100V、頻率為600Hz，開口角度θ為10°時照光前後產生的最大體積流率從6.09μL/min增加到19.62μL/min。在本研究中，我們發現可以透過不同照光區域，改變光調控無閥式微幫浦在空間中的動態流率，輔以其他規劃中的研究，或可運用前述光壓電材料的特性與其在類同於無閥門微幫浦的初步應用架構來抑制微幫浦的回流。 | zh_TW |
| dc.description.abstract | In this work, we intended to change the dynamic flow rate of valveless micropump by developing a new smart composite material which is able to construct an actuator that can spatially modulated by optical means. The smart opto-piezo composite material is composed of photoconductive material TiOPc and piezoelectric material PZT. Spatial optical modulation in an opto-piezo composite mentioned above means modulating a force field of the actuator by changing the light field instead of changing the spatial distribution of the electrical field. To enhance the effect of modulating a force field by using the light field, the electrical impedance of TiOPc/copolymer thin film was measured by Agilent 4294A Precision Impedance Analyzer to investigate the impedance and electrical characteristics change before and after the external light illumination. We analyzed the relationship between the parameters of driving bias, frequency and diffuser angle so as to compare the flow rate difference of valveless micropump after illumination.
According to the experimental results of flow rate of valveless micropump, the maximum flow rate was 95.33μL/min under the condition of driving bias 100V, frequency 600Hz and diffuser angle 10°. Furthermore, the maximum flow rate of optical-modulated valveless micropump increased from 6.09μL/min to 19.62μL/min, and the ability of spatial dynamic flow rate modulation was confirmed by illuminated different area of valveless micropump. Coupling these preliminary results with some future works, return flow typically associated with the valveless micropump can potentially be further reduced in the future. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-16T06:44:00Z (GMT). No. of bitstreams: 1 ntu-103-R01525024-1.pdf: 3902397 bytes, checksum: 86158b69a77b5e206c6491b554746117 (MD5) Previous issue date: 2014 | en |
| dc.description.tableofcontents | 口試委員會審定書 #
致謝 i 中文摘要 ii ABSTRACT iii 目錄 iv 圖目錄 vii 表目錄 xii Chapter 1 緒論 1 1.1 研究背景及動機 1 1.2 文獻回顧 1 1.2.1 微幫浦之介紹 1 1.2.2 無動件閥之介紹 5 1.2.3 無閥式微幫浦工作原理 8 1.3 論文架構 9 Chapter 2 理論基礎 10 2.1 壓電簡介 10 2.1.1 壓電材料特性 10 2.1.2 壓電本構方程式 12 2.2 TiOPc有機感光材料 18 2.2.1 TiOPc感光導電特性 19 2.2.2 TiOPc薄膜電學阻抗量測原理及實驗架構 24 2.2.3 TiOPc等效電路分析 28 2.3 流量理論分析 30 2.3.1 流場統御方程式 34 2.3.2 無活動元件閥流場重要參數 34 2.3.3 流量有限元素模擬與分析 36 Chapter 3 光調控無閥門式微幫浦製作及實驗設備 40 3.1 無閥門式微幫浦之設計 40 3.1.1 噴嘴與擴散器之設計 40 3.1.2 壓電致動器之設計 42 3.2 微幫浦相關製程介紹 44 3.2.1 矽晶圓微流道模組製作 45 3.2.2 微流道之製作 51 3.2.3 微流道之封裝接合製程 52 3.3 實驗儀器與設備架設 55 3.3.1 壓電片振動位移量測實驗架設 58 3.3.2 無閥式微幫浦空間動態流率量測系統 61 3.3.3 無閥式微幫浦流率量測系統 62 Chapter 4 實驗結果與討論 65 4.1 壓電蜂鳴片塗佈TiOPc薄膜阻抗量測結果 65 4.1.1 TiOPc薄膜阻抗量測結果 71 4.2 壓電片振動量測結果 76 4.3 微幫浦空間動態流率量測結果 82 4.4 微幫浦淨流量量測結果 85 Chapter 5 結論與未來展望 93 5.1 結論 93 5.2 未來展望 94 REFERENCE 95 | |
| dc.language.iso | zh-TW | |
| dc.subject | 感光導電材料 | zh_TW |
| dc.subject | 擴張角 | zh_TW |
| dc.subject | 壓電材料 | zh_TW |
| dc.subject | 無閥式微幫浦 | zh_TW |
| dc.subject | 電阻抗 | zh_TW |
| dc.subject | piezoelectric material | en |
| dc.subject | diffuser angle | en |
| dc.subject | valveless micropump | en |
| dc.subject | electrical impedance | en |
| dc.subject | photoconductive material | en |
| dc.title | 光壓電材料在無閥門式微幫浦之應用 | zh_TW |
| dc.title | Application of opto-piezoelectric material in valveless micropump | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 102-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 吳文中(Wen-Jong Wu),饒達仁(Da-Jeng Yao),謝志文(Chih-Wen Hsieh),鄭志強(Chih-Chiang Cheng) | |
| dc.subject.keyword | 壓電材料,感光導電材料,電阻抗,無閥式微幫浦,擴張角, | zh_TW |
| dc.subject.keyword | piezoelectric material,photoconductive material,electrical impedance,valveless micropump,diffuser angle, | en |
| dc.relation.page | 96 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2014-07-28 | |
| dc.contributor.author-college | 工學院 | zh_TW |
| dc.contributor.author-dept | 工程科學及海洋工程學研究所 | zh_TW |
| 顯示於系所單位： | 工程科學及海洋工程學系 | |
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