量子點光子晶體微共振腔雷射及其耦合結構之研究

Abstract

在本論文中，我們採用了兩組光子晶體之孔洞半徑及週期，並且利用電子束微影、乾式蝕刻及濕式蝕刻，在砷化銦量子點為主動層之材料上成功製作出可以在室溫下激發出雷射光的光子晶體微共振腔雷射。我們在室溫下利用連續波雷射激發出雷射光，並且觀察調變L3共振腔兩側孔洞對臨界激發功率之影響。 我們將基本的H1、L3、及L5三種光子晶體共振腔做結合，製作成光子晶體耦合式共振腔，在室溫下觀測到耦合對雷射模態之影響。此外，我們也製作了兩個L3共振腔形成的耦合式結構，在室溫下觀察到模態分裂之現象。 我們將光子晶體微共振腔雷射元件和帶狀波導結構整合，在室溫下透過不同的收光方式，嘗試驗證光是否能自波導引出。

In this thesis, two sets of radius/period were adopted to achieve room-temperature lasing for photonic crystal micro-cavity lasers. E-beam lithography, dry etching, and wet etching were used to successfully fabricate photonic crystal micro-cavity lasers on samples with InAs quantum-dots as active region. Room-temperature lasing was achieved by continuous-wave pumping. Influence on threshold power by adjusting the two holes adjacent to L3 cavities was also investigated. Fundamental H1, L3, and L5 photonic crystal micro-cavities were combined into photonic crystal coupled-cavities, whose lasing modes were observed and investigated at room temperature. Coupled cavities consisting of two L3 cavities were also fabricated, with mode splitting observed at room temperature. Integration of photonic crystal lasers with ridge waveguides was realized. Efforts were made to investigate if the light came out from waveguides by collecting it from different ways.