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http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/55697完整後設資料紀錄
| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 毛明華(Ming-Hua Mao) | |
| dc.contributor.author | Heng-Jhe Jhuang | en |
| dc.contributor.author | 莊恆哲 | zh_TW |
| dc.date.accessioned | 2021-06-16T04:18:00Z | - |
| dc.date.available | 2019-08-25 | |
| dc.date.copyright | 2014-08-25 | |
| dc.date.issued | 2014 | |
| dc.date.submitted | 2014-08-19 | |
| dc.identifier.citation | [1]. A. Morand, Y. Zhang, B. Martin, K. P. Huy, D. Amans, P. Benech, J. Verbert, E.
Hadji, and J.M. Fedeli, “Ultra-compact microdisk resonator filters on SOI substrate”, Optics Express, Vol. 14, Issue 26, pp. 12814-12821,(2006) [2]. L. Liu, R. Kumar, K. Huybrechts, T. Spuesens, G. Roelkens, E.J. Geluk Tjibbe de Vries, P. Regreny, D. V. Thourhout, R. Baets and G. Morthier “An ultra-small, low-power, all-optical flip-flop memory on a silicon chip”. Nature Photonics. 4(3):182-187, (2010) [3]. C.Y. Chao, W. Fung, and L. Guo “Polymer microring resonators for biochemical sensing applications” IEEE Journal of selected topics in quantum electronics,Vol. 12, NO. 1(2006) [4]. G. E. Keiser, “A review of WDM technology and applications,” Opt. Fiber Technol., Vol.5, pp. 3-39, (1999) [5]. S.H. Huang, W.Z. Chen ; Y.W. Chang “A 10-Gb/s OEIC with Meshed Spatially- Modulated Photo Detector in 0.18- CMOS Technology”, IEEE Journal of Solid-State Circuits, Vol.46, pp. 1158 – 1169, (2011) [6]. M. Ghulinyan, D. Navarro-Urrios, A. Pitanti, A. Lui, G. Pucker, L. Pavesi, “Whispering-gallery modes and light emission from a Si-nanocrystal-based single microdisk resonator,”Opt.Express,17,pp. 13218-13242 (2008). [7]. J. M. Gerard, B. Sermage, B. Gayral, B. Legrand, E. Costard, and V. Thierry-Mieg, “Enhanced Spontaneous Emission by Quantum Boxes in a Monolithic Optical Microcavity,” Phys. Rev. Lett. 81, pp. 1110–1113 (1998). [8]. M. Kuwata-Gonokami,“Polymer microdisk and microring lasers”Optics LettersVol. 20, No. 20 (1995) [9]. B.D. Jones, V.N. Astratov, “Whispering gallery mode in quantum dot micropillar cavities”, Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science”, Optical Society of America(2008). [10].D.G. Hall, G.H. Ames, R.W. Modavis, J. Opt. Soc. Am. 72, 1821 (1982) [11].林家鴻, “埋覆硒化鎘/硫化鋅膠狀量子點介電質微碟共振腔之雷射應用”,台 灣大學光電所碩士論文, (2012). [12].K. Srinivasan, O. Painter, “Optical fiber taper coupling and high-resolution wavelength tuning of microdisk resonators at cryogenic temperatures”, Appl. Phys. Lett. 90, 031114 (2007) [13].A. Yariv “Universal relations for coupling of optical power beteen microresonators and dielectric waveguides,” Electonics Letters 36, 321 (2000) [14].H. Haus, “Waves and fields in optoelectronics” Prentice-Hall, (1984) 74 [15].I. Moerman, P.P. Van Daele, P.M. Demeester, “ A review on fabrication technologies for the monolithic integration of tapers with III-V semiconductor devices ”,IEEE Journal of selected topics in quantum electronics,Vol. 3, pp. 1308 - 1320 ,(2006) [16].K. Vahala, “OpticalMicrocavities.World Scientific”, 2004 [17].R. G. Hunsperger, “Integrated optics theory and technology” Springer (2009) [18].Z. Guo, H. Quan, S. Pau, “Gap effects on whispering-gallery mode microresonances” Proc. of SPIE Vol. 6002, 600204, (2005) | |
| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/55697 | - |
| dc.description.abstract | 在本篇論文中，我們設計三種被動介電質波導微碟耦合結構以及
主動奈米矽晶微碟結構。首先，在二氧化矽/矽結構中，波導場型透 過基板強烈損耗而無法傳輸。 其次，在苯環丁烯/二氧化矽/矽結構中，我們可驗證光在波導傳 導的可行性。然而於穿透頻譜中卻未見模態訊號，此外蝕刻出柱子 又遇到波導倒塌與苯環丁烯/二氧化矽附著力不足的瓶頸。 其三，在氮化矽/二氧化矽/矽結構中。10 微米微碟品質因子值 約為2500，12 微米微碟品質因子值約3100，14 微米微碟品質因子 值約3600。另外在調變波導寬度對耦合之影響量測中，發現波導寬 度小於1 微米的耦合結構方可達成與共振腔模態耦合。另外在調變 波導微碟間距對耦合之影響量測中，發現品質因子隨間距增加而增 加，並發現穿透頻譜的凹陷在間距150 奈米有最深值，對應到耦合 理論中的臨界耦合值。 其四，我們亦探討奈米矽晶微碟其共振腔之特性，利用漸細光纖 量測系統來進行耦合，發現15 微米微碟品質因子值約為6000。 | zh_TW |
| dc.description.abstract | In this thesis we designed three passive dielectric microdisk waveguide coupling structures and active silicon nanocrystal microdisks.
Firstly, in silicon dioxide / silicon structure, waveguides cannot properly guide because of the substrate radiation loss. Secondly, in benzocyclobutene (BCB) / silicon dioxide / silicon structure, we verified light is guided in the waveguide. However, the WGMs (whispery gallery modes) hadn’t be observed in the spectrum. In addition, etching process encountered two bottlenecks waveguide instability and insufficient adhesion between BCB and silicon dioxide. Thirdly, in the silicon nitride / silicon dioxide / silicon structure, quality factor of a 10 micron microdisk in diameter is about 2500, while those of 12 and 14 micron microdisks are 3100 and 3600, respectively. In the waveguide width tuning measurement, we observed the mode signal in transmission spectra with waveguide width less than 1 micron. In the gap tuning measurement, we found the quality factor increases with gap widened, and the deepest transmission dip at 150nm that it corresponds critical coupling. Finally, we used tapered-fiber measurement system to investigate the characteristics of silicon nanocrystal microdisks. The quality factor of a silicon nanocrystal microdisk with 15 micron in diameter is about 6000. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-16T04:18:00Z (GMT). No. of bitstreams: 1 ntu-103-R00941071-1.pdf: 5923028 bytes, checksum: fde7e34a64bdf5e9008d82cb52ed7629 (MD5) Previous issue date: 2014 | en |
| dc.description.tableofcontents | 摘要................................................................................................................................ I
Abstract .......................................................................................................................... II 圖目錄............................................................................................................................V 表目錄........................................................................................................................... IX 第1 章 緒論............................................................................................................ 1 1.1 積體光學之介紹........................................................................................ 1 1.2 波導............................................................................................................ 2 1.3 微型共振腔................................................................................................ 3 1.4 苯環丁烯之介紹........................................................................................ 4 1.5 研究動機.................................................................................................... 4 第2 章 理論分析.................................................................................................... 6 2.1 波導理論.................................................................................................... 6 2.2 迴音廊模態................................................................................................ 9 2.3 品質因子值.............................................................................................. 11 2.4 耦合理論.................................................................................................. 12 第3 章 研究方法.................................................................................................. 14 3.1 元件設計.................................................................................................. 14 3.1.1 二氧化矽/矽 波導微碟耦合元件結構設計.............................. 14 3.1.2 苯環丁烯/二氧化矽/矽 波導微碟耦合元件結構設計............ 16 3.1.3 氮化矽/二氧化矽/矽 波導微碟耦合元件結構設計................ 17 3.1.4 漸細波導幾何設計...................................................................... 18 3.2 製程步驟.................................................................................................. 20 3.2.1 二氧化矽/矽波導微碟耦合結構製程步驟:.............................. 20 3.2.2 苯環丁烯/二氧化矽/矽波導微碟耦合結構製程步驟:............ 21 3.2.3 氮化矽/二氧化矽/矽波導微碟耦合結構製程步驟:................ 23 3.2.4 奈米矽晶微碟製程步驟:............................................................ 24 3.3 量測架構.................................................................................................. 25 第4 章 結果討論.................................................................................................. 28 4.1 二氧化矽/矽 波導微碟耦合結構量測.................................................. 28 4.2 苯環丁烯/二氧化矽/矽 波導微碟耦合結構量測................................ 30 4.2.1 驗證苯環丁烯波導可傳導性...................................................... 30 4.2.2 波導微碟耦合結構量測.............................................................. 32 4.3 氮化矽/二氧化矽/矽 波導微碟耦合結構量測.................................... 36 4.3.1 調變微碟直徑對耦合之影響量測.............................................. 36 4.3.2 調變波導寬度對耦合之影響量測.............................................. 42 4.3.3 調變波導微碟間距對耦合之影響量測...................................... 51 IV 4.4 奈米矽晶微碟.......................................................................................... 62 4.4.1 光激發量測.................................................................................. 62 4.4.2 漸細光纖量測.............................................................................. 64 4.4.3 奈米矽晶/二氧化矽/矽 波導微碟耦合結構量測.................... 68 第5 章 結論.......................................................................................................... 71 參考文獻...................................................................................................................... 73 | |
| dc.language.iso | zh-TW | |
| dc.subject | 雷射 | zh_TW |
| dc.subject | 波導 | zh_TW |
| dc.subject | 微碟型 | zh_TW |
| dc.subject | microdisk | en |
| dc.subject | laser | en |
| dc.subject | waveguide | en |
| dc.title | 介電質微碟共振腔及其波導耦合之研究 | zh_TW |
| dc.title | Study of Dielectric Microdisks and their
Waveguide Coupling | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 102-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 林浩雄(Hao-Hsiung Lin),彭隆瀚(Lung-Han Peng),Katrin Paschke(Katrin Paschke) | |
| dc.subject.keyword | 微碟型,雷射,波導, | zh_TW |
| dc.subject.keyword | microdisk,laser,waveguide, | en |
| dc.relation.page | 74 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2014-08-20 | |
| dc.contributor.author-college | 電機資訊學院 | zh_TW |
| dc.contributor.author-dept | 光電工程學研究所 | zh_TW |
| 顯示於系所單位： | 光電工程學研究所 | |
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