以離子導電高分子金屬複合物製備低致動電壓可形變面鏡

Abstract

在這篇論文中，我們在離子性高分子金屬複合材料上製作六角形電極，並應用於可形變面鏡。我們可藉由在六角形電極上通電與否來控制薄膜的曲率。 在我們的製程中包括了離子交換、曝光顯影和無電電鍍。利用正光阻作為遮罩，我們可以使用無電電鍍在薄膜的其中一面鍍上六角形電極的陣列，薄膜的另一面則完全被金屬所覆蓋。經過量測，六角形陣列的表面電阻大約為5 Ω，確保了低致動電壓的可行性。此外，經過表面的處理後，我們可以利用薄膜的另一面作為光的反射面。我們使用ANSYS Workbench模擬薄膜表面的形變狀況。我們成功地在低於5伏特的致動電壓下成功驅動薄膜，並且達到26 um的最大中心點形變量。另外，此裝置的反應時間大約為5.899秒。此外其共振頻率大約是145Hz。在實驗的最後，我們在實驗中控制可形變面鏡，使其產生三種形變，因此以離子性高分子金屬複合材料製作可形變面鏡是可行的。

In this paper, the fabrication of IPMC (Ionic Polymer Metal Composites) films with hexagonal electrodes for deformable mirrors in adaptive optics has been described. With the array of hexagonal electrodes on one side of IPMC membrane, we can control the contour of IPMC by selectively applying voltage. Our fabrication process involves ion-exchange, lithography and electroless plating steps. A positive photoresist in photolithography is used as the mask in the electroless plating process to selectively grow platinum electrodes in IPMC. The surface resistance of the hexagonal electrodes is about 5 ohms, which is small enough to enable the IPMC to be actuated by voltage lower than 4 volts. The other side of the IPMC membrane is smoothened and can be used as reflection surface. We also used modeling software, ANSYS Workbench, to simulate the deformation behavior of the membrane. We have achieved deformation on our IPMCs (2.5 cm in diameter) under a low actuation voltage less than 4 volts successfully. The maximum stroke of the IPMC deformable mirror is about 26 microns. Our IPMC spent showed the resonant frequency of approximately 145 Hz, which is suitable for retinal imaging application. Due to the low driving voltage of IPMCs, the deformable mirrors made of IPMCs is promising.