以無電鍍金層作為加熱器之微型層析管柱晶片應用於微型氣相層析系統

Abstract

氣相層析系統(Micro gas chromatography, μGC)之應用廣泛，將其微型化後更可直接應用於醫療檢測、環境監控、居家照護等領域。而μGC中，一關鍵元件為微型層析晶片(Micro separation column, μSC)，其功能為將蒐集到的混和氣體樣本分離。在本研究中，我們開發出具新穎性之微型層析晶片，透過化學鍍金製作層析晶片之內加熱器，並應用於氣相層析系統中。 本次研究所提出之層析晶片有著高加熱效能的特性，且在製程上僅需一道光罩便能透過簡單的微機電(MEMS)製程技術結合化學鍍金方式達成；相較於過去其他團隊之研究，本次研究提出之層析晶片在製程上能夠大幅節省成本與時間。 本次設計之層析晶片為1米長、流道寬度300微米、蝕刻深度為400微米之蛇狀流道，透過本次研究提出之製程步驟，我們成功地得到1.6Ω之金層自身加熱器；當提供外加電壓4V時，金層加熱器消耗10W便能夠以1℃/s之升溫速率穩定從室溫升到至少130℃，可以做為穩定的加熱器使用。 將本研究開發之層析晶片經過封裝流程以及DB-1静相塗佈的程序後，便可應用於氣相層析系統中；透過Labview程式控制與電路設計，本研究之層析晶片可順利產生穩定的溫度梯度，並成功將含有苯、甲苯、間二甲苯、以及辛烷的混合氣體分離層析。

Micro gas chromatography (μGC) could be widely used in many areas, including homecare, environment or air-pollution monitoring, and medical diagnosis. According to recent researches, a μGC can provide a non-invasive and real-time diagnosis for early stage lung cancer detection by analyzing human exhaled air. In this thesis, we proposed a novel microfabricated separation column (μSC) for μGC. With one photomask in microelectromechanical systems(MEMS)-based -fabrication processes and the developed chemical replacement reaction, we presented a μSC with a thin gold film within the microfluidic channel as a self-heated element. The novel μSC not only provided highly efficient on thermal performance, but it also decreased the development time and cost in the fabrication process comparing to previous research results. With the 1.6Ω inner gold film heater, the 1-m μSC can be heated to 130℃ rapidly by applying a constant electrical power of 10 W with a heating rate of 1℃/s. Four volatile organic compounds (VOCs), benzene, toluene, m-xylene, and octane are successfully separated and detected by a flame ionization detector (FID) with DB-1 stationary phase using the proposed μSC.