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| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 范光照(Kuang-Chao Fan) | |
| dc.contributor.author | Li-Min Chen | en |
| dc.contributor.author | 陳立民 | zh_TW |
| dc.date.accessioned | 2021-06-16T02:33:17Z | - |
| dc.date.available | 2020-08-05 | |
| dc.date.copyright | 2015-08-05 | |
| dc.date.issued | 2015 | |
| dc.date.submitted | 2015-07-28 | |
| dc.identifier.citation | [1] Bosch JA, Coordinate Measuring Machines and Systems. 1995: CRC Press.
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| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/53914 | - |
| dc.description.abstract | 本論文以微型三次元量測儀為機床，研究平台定位感測器的穩定度及建立恆溫環境。
微型三次元量測儀之平台以二極體雷射麥克森干涉儀為定位感測器，其定位準確的決定性參數為雷射波長。本文開發一套完整的繞射式波長補償模組及其數學模型，即時回授波長至感測器。 精密量測儀器須置於恆溫環境，傳統無塵室建造成本過高、耗能、操作人員為不穩定發熱源，甚至是市售恆溫箱亦有笨重及振動過大缺點。本文利用半導體致冷片以自然沈降氣流提供微型三次元量測儀恆溫環境，優點為成本低廉、可攜性高，可應用於任何精密儀器，恆溫效果達20.010±0.014℃(k=2)，優於ISO一級實驗室標準。在恆溫環境下，雷射波長準確度和穩定度可達10-6數量級。 完成整合微型三次元量測儀，即實機以觸發、掃描量測工件，對量測方法及結果均有若干討論。 | zh_TW |
| dc.description.abstract | This thesis mainly researches on Micro-CMM, including the stability of laser diode interferometer and the development of a constant temperature chamber.
Micro-CMM adopts laser diode Michelson interferometers as displacement sensors. Laser wavelength is the decisive parameter of its accuracy. Therefore, an integrated wavelength compensator mathematics model and hardware were fully developed. Environment stabilization is essential for any precision instruments. Conventional clean room costs too high and consumes much energy; commercial constant temperature chamber is too bulky in size and involves much vibration. A portable constant temperature chamber was developed in this thesis. Cheap TEC coolers are installed on the top of the chamber and cool the environment by natural convection, which contains no vibration. Temperature stability can achieve 20.010±0.014℃(k=2), which is better than ISO standard for Class I metrology room. Under constant temperature environment, accuracy and stabilization of laser wavelength can achieve an order of 10-6. Furthermore, there are some Micro-CMM measurements, including probe trigger and scanning. Several practices are shown in this thesis. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-16T02:33:17Z (GMT). No. of bitstreams: 1 ntu-104-R02522722-1.pdf: 6506456 bytes, checksum: c86c7768d4b8d018083974574e7cc8cb (MD5) Previous issue date: 2015 | en |
| dc.description.tableofcontents | 誌謝 I
摘要 II Abstract III 目錄 IV 圖目錄 VII 表格目錄 XII 第一章 緒論 1 1.1 研究動機與目的 1 1.2 文獻回顧 4 1.3 研究內容概要 19 第二章 微型三次元量測儀整體架構 20 2.1 共平面平台 20 2.1.1 共平面平台設計 20 2.2 寶塔式橋架配重主軸 21 2.2.1 寶塔式橋架結構 21 2.2.2 配重式主軸 23 2.3 線性繞射光柵干涉儀 24 2.3.1 量測原理 25 2.3.2 光柵繞射與都卜勒頻移 25 2.3.3 線性光柵尺 28 2.4 多自由度量測系統 (MDFMS) 29 2.4.1 麥克森干涉儀量測原理 30 2.4.2 自動視準儀原理 32 2.4.3 波長補償原理 33 2.5 Nanomotion超音波馬達簡介 33 2.5.1 Nanomotion超音波馬達 33 2.5.2 超音波馬達驅動器─AB2 driver 36 2.6 接觸式掃描探頭 39 2.7 高精度電子恆溫箱 41 第三章 波長補償模組之理論模型與實驗驗證 42 3.1 波長補償相關文獻回顧 42 3.2 波長補償模組光路 46 3.3 波長補償模組原理 46 3.4 波長補償數學模型 47 3.5 波長補償模型驗證實驗 48 3.6 量測不確定度估計 53 第四章 無振動微型電子恆溫腔之研製 55 4.1 恆溫箱各部元件的選擇 56 4.1.1 制冷功率計算 56 4.2 致冷晶片的選擇 58 4.3 電源供應器的選擇 58 4.4 溫度感測器的選擇 59 4.4.1 電阻式溫度感測器 60 4.5 恆溫箱系統架設 61 4.6 系統識別實驗 63 4.7 PID控制理論 64 第五章 恆溫系統下各感測器校正 69 5.1 麥克森干涉儀校正 69 5.2 探頭矩陣校正 74 5.2.1 探頭矩陣定義 74 5.2.2 矩陣參數校正 76 第六章 量測物件的方法與實驗 82 6.1 觸發量測 82 6.1.1 觸發點判別 82 6.1.2 觸發量測物件實驗 85 6.2 掃描量測 87 第七章 結論與未來展望 99 7.1 結論 99 7.2 未來展望 99 | |
| dc.language.iso | zh-TW | |
| dc.subject | 麥克森雷射干涉儀 | zh_TW |
| dc.subject | 三次元量測儀 | zh_TW |
| dc.subject | 恆溫腔 | zh_TW |
| dc.subject | Michelson Laser Interferometer | en |
| dc.subject | CMM | en |
| dc.subject | Constant Temperature Chamber | en |
| dc.title | 微型三次元量測儀在高精度恆溫環境下之研究 | zh_TW |
| dc.title | Research on Micro Coordinate Measuring Machine
Under High Accuracy Constant Temperature Chamber | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 103-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 劉建宏(Chien-Hung Liu),朱志良(Chih-Liang Chu) | |
| dc.subject.keyword | 三次元量測儀,麥克森雷射干涉儀,恆溫腔, | zh_TW |
| dc.subject.keyword | CMM,Michelson Laser Interferometer,Constant Temperature Chamber, | en |
| dc.relation.page | 104 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2015-07-28 | |
| dc.contributor.author-college | 工學院 | zh_TW |
| dc.contributor.author-dept | 機械工程學研究所 | zh_TW |
| 顯示於系所單位： | 機械工程學系 | |
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