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| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 馬小康 | |
| dc.contributor.author | Ning-Hsiang Yu | en |
| dc.contributor.author | 于寧祥 | zh_TW |
| dc.date.accessioned | 2021-06-15T16:44:24Z | - |
| dc.date.available | 2022-07-29 | |
| dc.date.copyright | 2015-08-11 | |
| dc.date.issued | 2015 | |
| dc.date.submitted | 2015-08-10 | |
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Boda, 'Design and test of a high-performance piezoelectric micropump for drug delivery,' Sensors and Actuators A: Physical, vol. 121, pp. 156-161, 2005. 47 [13] T. Dinh and Y. Ogami, 'A dynamic model of valveless micropumps with a fluid damping effect,' Journal of Micromechanics and Microengineering, vol. 21, p. 115016, 2011. [14] J.H. Kim, C. Kang, and Y.S. Kim, 'A disposable polydimethylsiloxane-based diffuser micropump actuated by piezoelectric-disc,' Microelectronic Engineering, vol. 71, pp. 119-124, 2004. [15] C. Yamahata, F. Lacharme, Y. Burri, and M. A. Gijs, 'A ball valve micropump in glass fabricated by powder blasting,' Sensors and Actuators B: Chemical, vol. 110, pp. 1-7, 2005. [16] C. Yamahata, F. Lacharme, J. Matter, S. Schnydrig, Y. Burri, and M. A. Gijs, 'Electromagnetically actuated ball valve micropumps,' in Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS'05. The 13th International Conference on, 2005, pp. 192-196. [17] S.M. Ha, W. Cho, and Y. Ahn, 'Disposable thermo-pneumatic micropump for bio lab-on-a-chip application,' Microelectronic Engineering, vol. 86, pp. 1337-1339, 2009. [18] M. L. Cantwell, F. Amirouche, and J. Citerin, 'Low-cost high performance disposable micropump for fluidic delivery applications,' Sensors and Actuators A: Physical, vol. 168, pp. 187-194, 2011. [19] P. S. Chee, R. Arsat, T. Adam, U. Hashim, R. A. Rahim, and P. L. Leow, 'Modular Architecture of a Non-Contact Pinch Actuation Micropump,' Sensors, vol. 12, pp. 12572-12587, 2012. [20] P. S. Chee, R. A. Rahim, U. Hashim, R. Arsat, and P. L. Leow, 'Low cost diffuser based micropump using pinch actuation,' Advanced Materials Research, vol. 422, pp. 397-400, 2012. [21] 徐聖惟, '腔體可分離式壓電薄膜微型泵之設計與效能分析,' 碩士論文, 機 械工程研究所, 國立臺灣大學, 2014. [22] F. M. White, 'Diffuser performance,' in Fluid Mechanics, Sixth ed, 2008, pp. 397-401. [23] A. Olsson, 'Valve-less Diffuser Micropumps,' Electrical Engineering, Royal Institute of Technology, 1998. [24] A. Olsson, G. Stemme, and E. Stemme, 'Numerical and experimental studies of flat-walled diffuser elements for valve-less micropumps,' Sensors and Actuators 48 A: Physical, vol. 84, pp. 165-175, 2000. [25] C. Sun and K. Huang, 'Numerical characterization of the flow rectification of dynamic microdiffusers,' Journal of Micromechanics and Microengineering, vol. 16, p. 1331, 2006. [26] S. Tanaka, H. Tsukamoto, and K. Miyazaki, 'Development of diffuser/nozzle based valveless micropump,' Journal of Fluid Science and Technology, vol. 3, pp. 999-1007, 2008. [27] M. Nabavi, 'Steady and unsteady flow analysis in microdiffusers and micropumps: a critical review,' Microfluidics and nanofluidics, vol. 7, pp. 599-619, 2009. [28] 周卓明, 壓電力學. 臺北市: 全華科技圖書股份有限公司, 2003. [29] S. Singh, N. Kumar, D. George, and A. Sen, 'Analytical modeling, simulations and experimental studies of a PZT actuated planar valveless PDMS micropump,' Sensors and Actuators A: Physical, vol. 225, pp. 81-94, 2015. [30] E. Ventsel and T. Krauthammer, 'Circular plates,' in Thin Plates and Shells Theory, Analysis, and Applications, ed The Pennsylvania State University: Marcel Dekker, Inc, 2001. | |
| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/53100 | - |
| dc.description.abstract | 本研究提出可應用於微型輸液之分離式壓電泵浦，整體微型泵採用組合式設計，選用漸擴管作為流向控制元件，並採用輸出力量較大之雙簧圓形壓電片為致動器，藉由傳力柱與薄膜傳遞動能給流體。組裝時，塗佈一層黏膠以確保氣密性與薄膜平整度，提升幫浦之流量穩定性，以進行各參數影響評估。實驗設計參數包含:壓電片基板厚度、薄膜材質與厚度、傳力柱與腔體直徑大小，同時以理論分析各元件對於流量的影響，最後選擇最佳化之泵浦進行效能測試，觀察此分離式微型泵的流量穩定性、揚程及效率表現。
研究結果顯示，在薄膜選擇上，楊氏模數較大之非彈性體，其流量表現較彈性體材料為佳；而較薄之壓電片基板其變形曲率較大，故流量較大，並以0.2mm厚的黃銅基板為最佳；此外，在固定柱腔比(傳力柱與腔體直徑比值)下，腔體直徑由26mm 縮小至15mm 能使流量從1675μl/min提升至2686μl/min;另一方面，因壓電片在不同條件下之變形量具顯著差異，故在定義腔體大小與最佳柱腔比之關係時，需同時評估每次壓縮體積與等效彈性係數之影響。最後，本研究之最佳化分離式無閥微型泵可提供最大流量為7549μl/min，揚程為1.5kPa，誤差控制於±5%。 | zh_TW |
| dc.description.abstract | In this study, a separable piezoelectric micro-pump which can be applied in medical and chemical infusion was presented. The structure includes nozzle/diffuser for
valveless design, the plunger and a diaphragm for delivering the kinetic energy to fluid, and a circular bimorph piezo disk for offering sufficient force. Also, in purpose to easily test the influence of parameters, the separable pump was formed through assembly. Further, glue spreading can assure airtight character and diaphragm smoothness. Five parameters such as working frequency, diaphragm properties, the thickness of the passive plate in the actuator, ratio of plunger diameter to chamber diameter(Piston ratio, P), and chamber diameter are analyzed to evaluate the performance of the micro-pump. Eventually, the optimal micro-pump has been tested about its flow rate stability and pumping head. The experimental results indicate that plastic material is more appropriate than elastomer for separable pump, the thinner passive plate can perform bigger deflection, and different chamber diameter should combine with different Piston ratio to create more flow-rate. As a result, the optimal combination for the separable pump was achieved with 0.2mm thickness of the passive plate, 0.1 mm thickness PET diaphragm, 0.67 Piston ratio, 15mm chamber diameter, and working frequency in 45Hz. Maximum flow-rate can reach 7.5 ml/min while the maximum pumping head is 1.5kPa, also, the relative errors can be controlled in 5%. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-15T16:44:24Z (GMT). No. of bitstreams: 1 ntu-104-R02522107-1.pdf: 4132166 bytes, checksum: e18c2e9df873f1f60ba8abb092250c2a (MD5) Previous issue date: 2015 | en |
| dc.description.tableofcontents | 誌謝 .................................................................................................................................. i
摘要 ................................................................................................................................. ii ABSTRACT .................................................................................................................... iii 目錄 ..................................................................................................................... iv 圖目錄 ................................................................................................................................................................................ vii 表目錄 .................................................................................................................................................................................. x 符號說明 ..................................................................................................................... xi 第一章 緒論 .......................................................................................................... 1 前言...................................................................................................... 1 泵與微型泵簡介.................................................................................. 2 文獻回顧.............................................................................................. 4 1.3.1 微型泵發展................................................................................. 4 1.3.2 微型泵之數學模型分析............................................................. 5 1.3.3 分離式微型泵............................................................................. 7 研究動機與目的.................................................................................. 8 研究流程.............................................................................................. 9 第二章 設計與原理............................................................................................ 10 可分離式微型無閥泵之設計............................................................ 10 2.1.1 微型無閥泵之結構................................................................... 10 2.1.2 腔體........................................................................................... 10 2.1.3 薄膜............................................................................................11 2.1.4 壓電致動器與傳力柱................................................................11 v 2.1.5 進出口之漸擴管....................................................................... 12 分離式微型壓電無閥泵之工作原理................................................ 14 分離式微型壓電無閥泵之理論分析................................................ 14 2.3.1 壓電耦合效應........................................................................... 15 2.3.2 圓形壓電致動器變形量分析................................................... 16 2.3.3 無閥泵運作理論分析............................................................... 19 2.3.4 薄膜泵動態振動分析............................................................... 20 2.3.5 薄膜泵每次壓縮體積分析....................................................... 25 2.3.6 效率分析................................................................................... 26 第三章 實驗架構與方法.................................................................................... 28 實驗參數............................................................................................ 28 3.1.1 雙簧壓電片基板厚度............................................................... 28 3.1.2 薄膜材料與厚度選擇............................................................... 28 3.1.3 傳力柱與腔體半徑比............................................................... 29 3.1.4 腔體半徑大小........................................................................... 29 實驗儀器............................................................................................ 29 實驗架設............................................................................................ 31 實驗測試方法.................................................................................... 31 3.4.1 壓電片最大位移測試............................................................... 31 3.4.2 薄膜與腔體振動阻尼量測實驗............................................... 32 3.4.3 不同操作頻率下之流量測試................................................... 33 3.4.4 不同背壓下之流量測試........................................................... 34 vi 3.4.5 量測壓電片之消耗功率........................................................... 34 第四章 結果與討論............................................................................................ 36 操作頻率對分離式薄膜泵流量之影響............................................ 36 軟膜與硬膜對薄膜泵流量之影響.................................................... 38 薄膜厚度對薄膜泵流量之影響........................................................ 38 雙簧壓電片基板厚度對薄膜泵流量之影響.................................... 39 柱腔比對薄膜泵流量之影響............................................................ 40 腔體直徑大小對薄膜泵流量之影響................................................ 41 較佳性能薄膜泵之穩定性、背壓與效率表現................................ 42 4.7.1 抵抗背壓能力、消耗功率與效率........................................... 42 4.7.2 流量穩定性............................................................................... 43 第五章 結論與建議............................................................................................ 44 結論.................................................................................................... 44 建議與未來展望................................................................................ 45 參考文獻……………………………………………………………………………….…………………...46 | |
| dc.language.iso | zh-TW | |
| dc.subject | 可拋棄 | zh_TW |
| dc.subject | 微型泵 | zh_TW |
| dc.subject | 雙簧 | zh_TW |
| dc.subject | 壓電片 | zh_TW |
| dc.subject | 傳力柱 | zh_TW |
| dc.subject | plunger | en |
| dc.subject | piezoelectric | en |
| dc.subject | circular bimorph piezo disk | en |
| dc.subject | micro-pump | en |
| dc.subject | valveless | en |
| dc.subject | disposable | en |
| dc.title | 分離式圓形雙簧壓電薄膜泵之設計與性能研究 | zh_TW |
| dc.title | Study of Separable Diaphragm Micro-pump
Actuated by Circular Bimorph Piezo Disk | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 103-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 賴君亮,陳希立,吳文方 | |
| dc.subject.keyword | 壓電片,雙簧,微型泵,可拋棄,傳力柱, | zh_TW |
| dc.subject.keyword | disposable,piezoelectric,circular bimorph piezo disk,micro-pump,valveless,plunger, | en |
| dc.relation.page | 87 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2015-08-10 | |
| dc.contributor.author-college | 工學院 | zh_TW |
| dc.contributor.author-dept | 機械工程學研究所 | zh_TW |
| 顯示於系所單位： | 機械工程學系 | |
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