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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 林致廷(Chih-Ting Lin) | |
dc.contributor.author | Wei Wang | en |
dc.contributor.author | 王煒 | zh_TW |
dc.date.accessioned | 2021-06-15T14:03:10Z | - |
dc.date.available | 2016-08-25 | |
dc.date.copyright | 2015-08-25 | |
dc.date.issued | 2015 | |
dc.date.submitted | 2015-08-20 | |
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dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/52015 | - |
dc.description.abstract | 二氧化氮為一嚴重的空污氣體,偵測其濃度自然成為現今環保與綠能的一大課題。上世紀九零年代人類即開始使用具有簡單製程、低成本、低溫操作特性的高分子材料進行二氧化氮的感測。本論文利用半導體製程與自行架設之噴墨系統,在金電極上合成聚比各並以此作為感測材料,由於聚比各溶劑具有高毒性,故採取分別噴印氯化鐵以及比各並讓其在晶片上聚合。透過參雜氧化鋅鋁以及氧化鐵的奈米粒子,感測元件的穩定度與反應量有顯著的提升。此外,與濕度有關的討論亦在文中提及,以期在噴墨式感測陣列中,能藉由各感測元件的聯立解,達到互相校正的效果。此方法可解決有機高分子材料選擇性較低的問題,提升其經濟價值。 | zh_TW |
dc.description.abstract | Nitrogen dioxide(NO2) is a severe air pollutant. It is a significant problem to detect the concentration of nitrogen dioxide for an eco-friendly environment. In 1990's, researchers had developed a NO2 sensor that made by organic material. It had the advantage of simple process, low cost and low operation temperature. In this paper, our group has set up an inkjet printing system that operate at room temperature. We use this system to develop a NO2 sensor by polypyrrole on gold electrode. However, the common polypyrrole solvent is toxic, we have to print ferric chloride and pyrrole monomer separately and synthesis on the chip. By adding Al-doped zinc oxide(AZO) and ferric oxide, the sensor's stability and sensitivity is improving. Also, the effect of humidity is also discussed. If different sensing materials is printed on one chip, each sensor can calibrate with each other to solve the selectivity problem. The gas sensors have big potential in various application. | en |
dc.description.provenance | Made available in DSpace on 2021-06-15T14:03:10Z (GMT). No. of bitstreams: 1 ntu-104-R02943105-1.pdf: 3640209 bytes, checksum: ae236a1d3175d17234c95f7896a04ad3 (MD5) Previous issue date: 2015 | en |
dc.description.tableofcontents | 致謝 I
中文摘要 II Abstract III 目錄 IV 圖目錄 VI 表目錄 VIII 第一章 緒論 1 1-1 前言 1 1-2 研究背景 2 1-3 研究動機 7 1-4 論文架構 8 第二章 元件特性與材料介紹 9 2-1 感測器特性 9 2-2 有機半導體感測材料 10 2-3 聚比各(Polypyrrole) 13 2-4 金屬氧化物/有機半導體混合物 16 第三章 噴墨系統 18 3-1 噴墨簡介 18 3-2 氣壓控制系統 21 3-3 墨滴觀測系統 22 3-4 位移平台系統 22 3-5 程式控制系統 24 第四章 感測元件之製作與量測 25 4-1 簡介 25 4-2 電極製作流程 26 4-2-1清洗晶圓 26 4-2-2 曝光顯影 26 4-2-3 鍍電極 26 4-2-4 Lift-off 26 4-2-5 切割晶圓 27 4-3 感測器噴印流程 28 4-4 氣體量測 29 4-4-1 量測系統介紹 29 4-4-2 量測流程 31 4-5 量測設備與量測儀器 32 第五章 實驗結果與討論 36 5-1 奈米粒子對於二氧化碳感測器之影響 36 5-2 濕度對於二氧化碳感測器之影響 41 5-3 選擇性 42 5-4 生命期 43 5-5 感測元件參數整理 44 5-6 材料分析 45 5-6-1 X光粉末繞射分析儀(XRD) 45 5-6-2 傅立葉紅外線光譜儀(FTIR) 46 5-6-3 拉曼光譜儀(Raman) 47 5-7 感測機制 49 第六章 結論 51 參考資料 52 | |
dc.language.iso | zh-TW | |
dc.title | 噴墨式二氧化氮感測材料之研發 | zh_TW |
dc.title | The development of an Inkjet Printable Sensing Material for NO2 | en |
dc.type | Thesis | |
dc.date.schoolyear | 103-2 | |
dc.description.degree | 碩士 | |
dc.contributor.coadvisor | 吳文中(Wen-Jong Wu) | |
dc.contributor.oralexamcommittee | 李世光(Chih-Kung Lee) | |
dc.subject.keyword | 二氧化氮感測元件,噴墨製程,聚比各, | zh_TW |
dc.subject.keyword | NO2 sensor,inkjet printing,polypyrrole, | en |
dc.relation.page | 56 | |
dc.rights.note | 有償授權 | |
dc.date.accepted | 2015-08-20 | |
dc.contributor.author-college | 電機資訊學院 | zh_TW |
dc.contributor.author-dept | 電子工程學研究所 | zh_TW |
顯示於系所單位: | 電子工程學研究所 |
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