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  1. NTU Theses and Dissertations Repository
  2. 理學院
  3. 應用物理研究所
Please use this identifier to cite or link to this item: http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/51060
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???org.dspace.app.webui.jsptag.ItemTag.dcfield???ValueLanguage
dc.contributor.advisor蔡定平(Din Ping Tsai)
dc.contributor.authorHao-Tsun Linen
dc.contributor.author林浩存zh_TW
dc.date.accessioned2021-06-15T13:24:33Z-
dc.date.available2021-07-06
dc.date.copyright2016-07-06
dc.date.issued2016
dc.date.submitted2016-06-15
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dc.identifier.urihttp://tdr.lib.ntu.edu.tw/jspui/handle/123456789/51060-
dc.description.abstract超穎材料是一種幾乎不存在於自然界的特殊人造材料,此種材料的特性主要取決於其組成單元的結構,而不是完全由其組成的物質所決定。本文利用電子束微影技術於矽基板上製作三維直立式裂環共振器,並利用此三維直立式裂環共振器製作完美吸收體,結構採用金屬介電質金屬的三層結構,最下層鍍金膜反射鏡,中間以ZnS-SiO2作為介電層,最上層以直立式裂環共振器作為與入射光波交互作用之結構,運用此結構的優勢在於直立式裂環共振器可同時吸收入射光電場與磁場所帶有之能量,以增強吸收效果,並將其以十字型對稱排列,使其在垂直入射光下有近乎完美的各向同性,模擬上可達到超過99%的入射光吸收率,並且在TE與TM波斜向入射情況下,正負60度內亦有良好的吸收表現。zh_TW
dc.description.abstractMetamaterials are artificial materials which cannot be found in nature. The properties of these materials are not from the component but from the artificial structures in subwavelength scale. In this thesis, we use ebeam lithography to make the three dimensional erected split-ring resonators, and fabricate metamaterial perfect absorber by the three dimensional erected split-ring resonators. We adopt the metal-insulator-metal(MIM) structure. The button layer is a gold layer as a mirror, and the middle layer is ZnS-SiO2. The top layer adopts erected split-ring resonators to serve as the structure interacting with the incident light. The benefit of using the erected split-ring resonators is that the erected split-ring resonators can coupling the energy of electric and magnetic field at the same time which can enhance the absorption. Then we arranged the erected split-ring resonators in cross-shaped which makes this structure isotropic when direct illumination. Also, the electromagnetic response still keeps in a great absorption under both TM- and TE-polarized illumination even through the angle of incidence is greater than 60 degrees.en
dc.description.provenanceMade available in DSpace on 2021-06-15T13:24:33Z (GMT). No. of bitstreams: 1
ntu-105-R02245003-1.pdf: 3975695 bytes, checksum: f8fe0ac498b305061bbb0555e156ee5c (MD5)
Previous issue date: 2016
en
dc.description.tableofcontents口試委員審定書
致謝 I
中文摘要 II
英文摘要 III
目錄 IV
圖目錄 VI
第一章 緒論
1.1 前言 1
1.2 超穎材料發展簡介 1
1.3 研究動機 2
1.4 參考資料 3
第二章 理論背景
2.1 表面電漿基本介紹 5
2.2 金屬的電漿共振 5
2.3 介電物質與金屬材料的表面電漿共振 8
2.4 侷域性表面電漿共振 14
2.5 表面電漿共振應用 15
2.6 超穎材料與裂環共振器 16
2.7 參考資料 19
第三章 超穎材料於完美吸收體的研究與發展
3.1 前言 23
3.2 文獻回顧 23
3.3 參考資料 29
第四章 超穎材料製作與數值模擬方法
4.1 前言 31
4.2 電子束微影技術 32
4.3 直立式三微裂環共振器之製作 37
4.4 樣品製作流程 39
4.5 數值模擬方法 42
4.6 參考資料 46
第五章 各向同性完美吸收體
5.1 前言 48
5.2 結構設計與模擬計算結果 48
5.3 實驗與量測 57
5.4 總結 58
 
dc.language.isozh-TW
dc.subject裂環共振器zh_TW
dc.subject各向同性超穎材料zh_TW
dc.subject電子束微影技術zh_TW
dc.subject各向同性超穎材料zh_TW
dc.subject電漿子超穎物質zh_TW
dc.subject電漿子超穎物質zh_TW
dc.subject裂環共振器zh_TW
dc.subject完美吸收體zh_TW
dc.subject電子束微影技術zh_TW
dc.subject完美吸收體zh_TW
dc.subjectIsotropic metamaterialen
dc.subjectMetamaterialen
dc.subjectSplit-ring resonatorsen
dc.subjectPerfect absorberen
dc.subjectEbeam lithographyen
dc.subjectIsotropic metamaterialen
dc.subjectMetamaterialen
dc.subjectSplit-ring resonatorsen
dc.subjectPerfect absorberen
dc.subjectEbeam lithographyen
dc.title三維奈米裂環共振器於各向同性完美吸收體之研究zh_TW
dc.titleIsotropic Perfect Absorber Using Vertical Nano Split-Ring Resonatorsen
dc.typeThesis
dc.date.schoolyear104-2
dc.description.degree碩士
dc.contributor.oralexamcommittee藍永強(Yung-Chiang Lan),張允崇(Yun-Chorng Chan)
dc.subject.keyword電漿子超穎物質,裂環共振器,完美吸收體,電子束微影技術,各向同性超穎材料,zh_TW
dc.subject.keywordMetamaterial,Split-ring resonators,Perfect absorber,Ebeam lithography,Isotropic metamaterial,en
dc.relation.page58
dc.identifier.doi10.6342/NTU201600358
dc.rights.note有償授權
dc.date.accepted2016-06-16
dc.contributor.author-college理學院zh_TW
dc.contributor.author-dept應用物理研究所zh_TW
Appears in Collections:應用物理研究所

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