運用阻抗分析之新型共平面電極設計的微流體粒子分析元件

Abstract

單一細胞分析技術在分子生物學、免疫學、生理學上扮演著相當關鍵的技術。近年來流式細胞術的發展有效地提供了方便、快速且精準的單一細胞分析。目前廣泛被使用的流式細胞術是以雷射光照射欲分析之細胞，再對其前散射(FCS)、旁散射(SSC)與螢光去做分析。然而，此種利用光學方式所進行的流式細胞術雖然可提供準確的分析，但其受限於龐大的儀器體積，且儀器操作人員需要受過專業訓練，此兩缺點限制的光學式的流氏細胞術發展為可攜式裝置的可能性。因此電阻抗式的流式細胞術因此被提出。其具有體積小、操作簡易、成本也較低的優點，因此具有發展為可攜式裝置的潛力。本研究利用黃光微影製程製作出數十微米寬的電極以及PDMS微流道來探討平面式電極的電阻抗氏流式細胞術的特性，包括其電極尺寸效應，待測粒子高度效應。同時，也進行了一系列的實驗去驗證本研究的電極設計，具有判斷直徑3微米、6微米以及10微米的粒子大小、位置的能力。本研究所提出的電極設計，可能力偵測粒子大小與位子的資訊，並提供做為後端進一步量測（例如：細胞膜電容，細胞質電阻)的重要參考值。

Single cell detection is an important technology in cellular and molecular biology, immunology and physiology. Recently, the develop of flow cytometry provide a convenient, fast and accurate way to do single cell detection. The most common detection way used in flow cytometry is optical method, projecting a laser beam on the target cell and then analyzing the forward scattering light , side scattering light and fluorescent. However, although this kind of optical method is accurate, the equipment is bulky, and the operators should be well trained. These disadvantages are the constrains when we want to develop a portable device. Therefore, flow cytometry with impedance sensing is proposed. It is small in size, convenient, and low cost, so it has the potential to develop as a portable device. This research use photo-lithography to fabricate electrodes in several tens of micro meter and PDMS microfluidic channel to discuss the properties and capabilities of flow cytometry with impedance sensing used co-planar electrodes, including electrode dimension effect and the height of sensing target effect. In addition, a series of experiment is done to demonstrate the capabilities of size and location discrimination of particle with 3 μm, 6 μm and 10 μm in diameter. The electrodes design in this thesis can also provide useful information for other detail single cell detection such as membrane capacitance and cytoplasma resistance.