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標題: | 石墨烯複材加熱器應用於氣體輔助微熱壓製程 Application of Graphene-polymer Composite Heaters in Gas-assisted Micro Hot Embossing Process |
作者: | Cih Cheng 鄭慈 |
指導教授: | 楊申語 |
關鍵字: | 快速加熱,微熱壓技術,石墨烯,複合材料,微結構, rapid heating,micro hot embossing,graphene,composite,microstructure, |
出版年 : | 2016 |
學位: | 碩士 |
摘要: | 微熱壓成型技術因其具有低成本、製程簡單等優點,已廣泛應用於製作微結構於高分子基材上,但傳統微熱壓成型需將高分子基材升溫至玻璃轉換溫度(Tg)以上,因此整體製程時間長而影響其量產性。本研究目的為改善傳統微熱壓製程升溫時間過長之問題,使用添加石墨烯之高分子複合材料,利用其優良之導電、導熱性,開發具有快速加熱性質之加熱器,並將加熱器作為熱壓製程中之加熱系統,搭配氣體輔助施壓,提出一氣體輔助快速微熱壓成型技術,以達縮短熱壓製程時間之目的。
本研究首先使用浸塗法將石墨烯複材塗佈於PI基板上以製作加熱器,成功使加熱面積為30x30平方毫米之加熱器在40V之電壓下,達到10秒內升溫至180°C之快速升溫效果。接著使用該快速加熱器於微熱壓製程,配合氣體輔助施壓,成功於3分鐘內將各種微、奈米結構複製於高分子基材上,並製作各結構之成型視窗。最後進一步將製程延伸應用來將各種不同微奈米結構包括微透鏡陣列、V型溝槽、圓柱陣列,分別複製於不同高分子基材包括PC、COP、PLA,且結構面積達50x50平方毫米,平均轉寫率大於97%。本研究證實石墨烯複材加熱氣體輔助壓印能大幅縮短微熱壓成型之製程時間,亦具有廣泛應用性,且該技術符合低成本、操作簡單且節省能源等需求。 Hot embossing technique is a low-cost and flexible microfabrication method, which has gained popularity in fabricating micro/nano structures on polymers. But the cycle time is long because the polymers have to be heated above the glass transition temperature by the hot plates. The process needs a breakthrough in reducing the cycle time. In this study, making use of the exceptional thermal and electrical properties of graphene, high-performance heaters utilizing the graphene-polymer composite is proposed and demonstrated. By combining the rapid heating of graphene-polymer composite heaters and the uniform pressing of gas, we present a novel rapid hot embossing technique for replication of micro/nano structures on polymeric substrates. The graphene-polymer composite heater was first developed. Heating rate of 14°C/s can be achieved with an applied voltage of 44V when the heating area is 30x30 mm^2. Next, rapid heating gas-assisted embossing facility and experiments by utilizing this graphene-polymer composite heater were constructed and carried out. Different micro/nano structures including microlens array, V-cut patterns and cylinder array were successfully replicated respectively on PC, COP and PLA substrates using the innovative process. And the cycle time is reduced to 3 minutes. The forming area is 50x50 mm^2 and the replication rates are above 97%. These results prove the great potential of using the graphene-polymer composite heaters in gas-assisted rapid micro hot embossing technique for replication of micro/nano structures for various applications. |
URI: | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/49850 |
DOI: | 10.6342/NTU201602239 |
全文授權: | 有償授權 |
顯示於系所單位: | 機械工程學系 |
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