用低成本奈米球微影術製作半導體光電元件之研究

Abstract

在本論文中，我們將會討論運用低成本的奈米球相關微影術製造出多種奈米尺寸的光電元件應用。首先，我們將會探討運用奈米球微影術製作出奈米等級的矽奈米網場效應電晶體，也將會探討此元件的電特性，以及做成生物感測元件方面的應用。最後我將會討論如何用黃光微影術搭配乾溼蝕刻技術製作出氮化鎵的發光二極體並在側壁加上共振腔，使其能接近雷射二極體的特性，也會探討到其電性的部分。

In this dissertation, we will demonstrate the fabrication of various nanoscale optoelectronic devices using a low-cost nanofabrication method developed from Nanosphere Lithography (NSL). First, we will discuss how to use a top-down nanofabrication approach to fabricate silicon nanonet field-effect transistors (FETs). We will also discuss the electric properties of these FETs and apply them for biosensing application. In the final part of this these, I will discuss how to use the two-step etch technique and regular photolithography to fabrication InGaN/GaN cavity LED. The basic electric and optical properties will also be discussed.