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http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/48714完整後設資料紀錄
| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 吳政忠(Tsung-Tsong Wu) | |
| dc.contributor.author | Chen-Yu Kuo | en |
| dc.contributor.author | 郭鎮宇 | zh_TW |
| dc.date.accessioned | 2021-06-15T07:09:56Z | - |
| dc.date.available | 2015-10-22 | |
| dc.date.copyright | 2010-10-22 | |
| dc.date.issued | 2010 | |
| dc.date.submitted | 2010-10-18 | |
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| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/48714 | - |
| dc.description.abstract | 聲子晶體是由數種彈性材料在空間中週期性排列而成，當聲波在此結構中傳遞時，由於波傳模態在某頻率範圍出現不連續的現象，使該頻段內聲波無法傳遞，此現象稱之為聲波頻溝(acoustic band gap)。本研究即利用此頻溝現象，配合數值分析及微機電製程，探討以聲子晶體為反射體之共振器的共振現象。
本文以布拉格(Bloch)理論為基礎，並結合有限元素法（finite element method, FEM）建立週期性邊界條件，分析聲子晶體之頻散關係。此外，藉由計算延遲距離（delay distance）探討等效反射面在共振腔內之位置，進而最佳化共振器之共振效果。本文也同時探討共振腔內相鄰反對稱共振模態之頻率間隙，並利用超晶格技術（supercell technique）分析其頻率間隙與共振腔長度之關係。 在實驗方面，本研究亦成功研製出具正方晶格聲子晶體反射體之矽─氧化鋅複合薄膜單埠板波共振器，其實驗結果與數值模擬相當吻合；如數值分析所預期，對於兩相異共振腔長度的共振器，亦量測到不同數目之頻率響應，驗證了共振腔長度與共振模態之頻率間隙的關係。此外，量測結果顯示，此共振器在共振頻率159.08 MHz處，具有相當高的品質因數（quality factor）。 | zh_TW |
| dc.description.abstract | This thesis reports numerical analysis and experimental results of a one-port plate wave resonator using two-dimensional phononic crystal (PC) gratings. Based on the band gap effect of the PC, i.e. acoustic waves in a specific frequency are blocked by the PC, PC was utilized as the reflectors of a resonator. The dispersion relations of phononic crystals were calculated by using the finite element method (FEM). To optimize the resonance inside the cavity, the effective reflective plane was obtained through a series of numerical simulations. Attention has been also focused on frequency differences between the lowest anti-symmetric (A0) modes within a resonant cavity. The relation between the cavity length and the frequency difference was analyzed by supercell technique.
On the experimental side, one-port ZnO/Si plate wave resonators with square-lattice PC reflective gratings were fabricated. The measured resonant frequencies of the cavity are in a good agreement with the numerical predictions. In addition, the measurement result showed that a high Q factor of 3885 can be achieved at 159.08 MHz resonant frequency. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-15T07:09:56Z (GMT). No. of bitstreams: 1 ntu-99-R97543045-1.pdf: 8263648 bytes, checksum: 5c41620af759046cfac77cd2a91b5a4e (MD5) Previous issue date: 2010 | en |
| dc.description.tableofcontents | CONTENTS IV
LIST OF NOTATIONS VI LIST OF FIGURES VIII LIST OF TABLES XIII Chapter 1 Introduction 1 1.1 Research Motivation 1 1.2 Literature Review 3 1.3 Contents of the Chapters 4 Chapter 2 Band structure of plate waves in Two-dimensional Air/Silicon Phononic crystals 6 2.1 Theory of Wave Propagation in the Phononic Crystal 6 2.2 Band Structure of a 2-D Air/Silicon Phononic Plate 10 2.3 Design of Inter-digital Transducer on ZnO Thin Film 12 Chapter 3 Design of Phononic Plate wave Resonators 20 3.1 Calculation of Effective Reflective Plane 20 3.2 Reflective Performance of the PC Gratings 23 3.3 Resonance of Plate Wave inside the Resonant Cavity 25 Chapter 4 Fabrications and Experimental Results 40 4.1 Fabrication Processes 40 4.1.1 Deposition of Silicon Nitride, Gold and ZnO Film 41 4.1.2 Fabrication of Inter-digital Transducers 45 4.1.3 Fabrication of PC Gratings 47 4.1.4 Fabrication of Thin Plate Structure 49 4.2 Measurement of Experimental Results 51 4.2.1 Experimental Setup 51 4.2.2 Calibration for Improving Measurement Accuracy 52 4.2.3 Quality Factor 53 4.2.4 Time Gating Approach 54 4.2.5 Experimental Result and Discussion 54 Chapter 5 Conclusions and Future Work 74 5.1 Conclusions 74 5.2 Future Work 75 REFERENCES 76 | |
| dc.language.iso | en | |
| dc.subject | 品質因數 | zh_TW |
| dc.subject | 板波共振器 | zh_TW |
| dc.subject | 聲子晶體 | zh_TW |
| dc.subject | 頻溝 | zh_TW |
| dc.subject | 有限元素法 | zh_TW |
| dc.subject | 共振模態 | zh_TW |
| dc.subject | Band gap | en |
| dc.subject | Q factor | en |
| dc.subject | Resonant mode | en |
| dc.subject | Finite element method | en |
| dc.subject | Plate wave resonator | en |
| dc.subject | Phononic crystal | en |
| dc.title | 結合聲子晶體反射體之單埠板波共振器研製 | zh_TW |
| dc.title | Design and Fabrication of a One-Port Phononic Plate Wave Resonator | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 99-1 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 馬劍清(Chien-Ching Ma),許進成(Jin-Chen Hsu),孫嘉宏(Jia-Hong Sun) | |
| dc.subject.keyword | 板波共振器,聲子晶體,頻溝,有限元素法,共振模態,品質因數, | zh_TW |
| dc.subject.keyword | Plate wave resonator,Phononic crystal,Band gap,Finite element method,Resonant mode,Q factor, | en |
| dc.relation.page | 82 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2010-10-20 | |
| dc.contributor.author-college | 工學院 | zh_TW |
| dc.contributor.author-dept | 應用力學研究所 | zh_TW |
| 顯示於系所單位： | 應用力學研究所 | |
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