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Title: | 利用矽核光纖製作蕭特基光偵測器 Fabrication of Schottky Photodetector by using Si-cored fibers |
Authors: | Yan-Bo Huang 黃彥博 |
Advisor: | 王倫 |
Keyword: | 半導體光纖,矽核光纖,蕭特基光偵測器, semiconductor fibers,silicon cored fibers,Schottky photodetector, |
Publication Year : | 2015 |
Degree: | 碩士 |
Abstract: | 近年來結合半導體材料和傳統光纖的研究主題正在迅速發展,透過這樣的結合能夠產生各式各樣的應用在矽光子領域、生醫感測領域、或是達成全光調變的可能性。
在這個論文中,我們示範了矽核光纖的製作方法,透過結合了垂直抽絲法及粉末法的特點,不需要使用昂貴的單晶矽晶棒,而改以低成本的多晶矽粉末作為代替,在經由優化製程的參數製作做出數公尺長的矽核光纖。由於矽的光學特性及電性都深深地被結晶性影響所以先針對了結晶性的部份做量測,經由穿透式電子顯微鏡及柆曼光譜儀的檢測結果證實為單晶矽之後並量測矽核光纖的光學及電的特性。 由於矽核光纖在光學特性及電性上有良好的表現,我們利用矽核光纖製作了蕭特基光偵測器,透過內部光激發的效應(internal photoemission process)使得此光偵測器能夠偵測到矽原本是在此通訊波段不吸收此波段的光。此外更由於矽核光纖天生的波導特性,能夠透過與接收端的光纖熔接,免去原本難處理的光耦合步驟。 Recently the combination of semiconductor materials with fiber optics has become one of the emerging research topics. Such combination of semiconductor and fiber optics may lead to various applications in Si photonics, bio-chemical sensing, and all-optical modulation. In this thesis, we demonstrated a method of fabricating silicon cored fiber. In this study, a technique featuring powder-in-tube and vertical-drawing was adopted for making single-crystal Si-cored fibers. Much cheaper polycrystalline Si powders substituting expensive single-crystal Si powders or seed rods were packed into a fused silica tube. By optimizing the drawing parameters, meter-long Si-cored fibers were obtained. Because the electrical and optical characteristics of Si are much affected by the crystallinity of Si, we need first analyze the crystallinity of Si-cored fibers, and then measure their electrical and optical characteristics. The measured result showed that our Si-cored fibers displayed excellent single crystallinity confirmed by micro-Raman spectra and high-resolution transmission electron microscope images. The Si-cored fibers also exhibited outstanding optical and electrical properties. With the above merits, a Si Schottky photodetector (SSPD) made by using a Si-cored fiber is demonstrated. Based on the internal photoemission process, SSPD can work in telecom regimes where Si is well known as transparent. Furthermore, another major advantage is that the inherent waveguide property of Si-cored fiber enabled an SSPD to be spliced with a receiving silica fiber, which can eliminate the need of cumbersome optical coupling. |
URI: | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/4813 |
Fulltext Rights: | 同意授權(全球公開) |
Appears in Collections: | 光電工程學研究所 |
Files in This Item:
File | Size | Format | |
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ntu-104-1.pdf | 8.3 MB | Adobe PDF | View/Open |
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