60GHz矩形環狀帶通濾波器

Abstract

本論文分別在不同製程實現了四個60GHz的帶通濾波器，希望比較在不同製程下類似結構濾波器之效能，可提供系統設計者依實際需求做選擇。 我們使用的製程分別是璟德 (Advanced Ceramic X Corp., ACXC) 與達泰 (DT Microcircuits) 公司的低溫共燒陶瓷 (low temperature co-fired ceramics, LTCC) 製程，以及國家晶片中心 (CIC) 所提供的積體被動元件 (integrated passive device, IPD) 製程與台積電互補金氧半導體 (TSMC CMOS) 90奈米製程。 我們採用矩形環狀結構來設計帶通濾波器，將濾波器分別實現在兩種低溫共燒陶瓷製程和積體被動元件製程，再進一步於晶片上將矩形環狀結構的四個轉角加上接地電容，可以有效縮小面積，以利於在互補金氧半導體90奈米製程中實現濾波器。 璟德的低溫共燒陶瓷製程量測到的最小插入損耗 (insertion loss)為1.26dB，3dB頻寬為12.5GHz，面積為818μmX 991μm，達泰的低溫共燒陶瓷製程的最小插入損耗為1.29dB，3dB頻寬為12GHz，面積為1041μm X 1072μm，積體被動元件製程的最小插入損耗為2.3dB，3dB頻寬為12GHz，面積為654μm X 750μm，90奈米製程的最小插入損耗為4.24dB，3dB頻寬為14.5GHz，面積為355μmX 335μm，低溫共燒陶瓷製程的插入損耗較小，但是面積比較大，積體被動元件製程與90奈米製程的面積較小，缺點是插入損耗較大。

This thesis presents the implementation of four 60GHz bandpass filters using different processes. We hope to compare the filters of similar structure in different processes. System designer can choose one depends on what he/she needs. These processes we used are low temperature co-fired ceramics (LTCC) provided by Advanced Ceramic X Corp. (ACXC) and DT Microcircuits, IPD (integrated passive device) and TSMC CMOS 90nm provided by Chip Implementation Center (CIC). We have implemented the filters in two kinds of LTCC and IPD processes based on the rectangular ring structure. To realize the filter in CMOS 90nm process, we placed four capacitors on the corners of the rectangular ring so as to minimize the chip area. The measured minimum insertion loss of filter using ACXC LTCC is 1.26dB. 3dB bandwidth is 12.5GHz. The active filter size is 818μmX 991μm. The measured minimum insertion loss of filter using DT LTCC is 1.29dB. 3dB bandwidth is 12GHz. The active filter size is 1041μmX 1072μm. The measured minimum insertion loss of IPD filter is 2.3dB. 3dB bandwidth is 12GHz. The active filter size is 654μmX 750μm. The measured minimum insertion loss of filter using TSMC CMOS 90nm is 4.24dB. 3dB bandwidth is 14.5GHz. The active filter size is 355μmX 335μm. Compare with IPD and 90nm filters, LTCC filters have smaller insertion losses but larger sizes.