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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 楊申語 | |
dc.contributor.author | Jing-Tang Wu | en |
dc.contributor.author | 吳景棠 | zh_TW |
dc.date.accessioned | 2021-06-15T05:48:26Z | - |
dc.date.available | 2015-08-20 | |
dc.date.copyright | 2010-08-20 | |
dc.date.issued | 2010 | |
dc.date.submitted | 2010-08-18 | |
dc.identifier.citation | [1]張哲豪,流體微熱壓製程開發研究,國立台灣大學博士論文,民國93年6月。
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dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/47130 | - |
dc.description.abstract | 為提升滾壓成型過程,模具與基材的接觸面積與均勻接觸壓力,本研究提出一創新型氣囊輪紫外光樹脂滾壓製程。結合紫外光固化成型技術、氣囊輪施壓以及環帶式撓性模具,本製程能將微奈米結構確實快速的複製到塗有紫外光樹脂的塑膠基材上。使用具有強度且適當延展性之矽膠材料,與鋁合金滾筒形成一個腔體,充入適當之氣體壓力後,成為滾動式氣囊輪,施壓於PDMS環帶式撓性模具上。實驗證實,當適當之氣體壓力充入氣囊內部,並以適當之壓力施加於氣囊輪軸上,氣囊輪可使滾壓模具與基材之接觸面積大幅增加;以感壓軟片實驗和數值分析模擬,皆證實氣囊輪確實可有效提升壓力均勻性。即使基材是曲面,其壓力仍均勻。
本研究使用具有微透鏡陣列之PDMS軟模具,成功將微透鏡陣列壓印於PMMA基材上,證實氣囊滾輪紫外光固化滾壓製程之可行性。與剛性滾筒施壓之結果比較,證實增加模具與基材之接觸面積,延長曝光固化時間,可確保結構完全固化成型後再與模具分離。微結構壓印之精度得以提升,甚至壓印速度可以加快。 本研究進一步使用氣囊輪紫外光固化滾壓製程將奈米結構轉印於非平面基材上。奈米結構PDMS模具是以陽極氧化鋁(AAO)結構為母模,經熱壓翻製和PDMS澆鑄後而得。以氣囊輪輔助製程,成功的將AAO奈米結構轉印至PMMA曲面上,經由光譜儀量測反射率證實,在300 nm至800 nm之波長範圍下,具有奈米結構之曲面PMMA基材之光反射率,可降低至2%以下。 | zh_TW |
dc.description.abstract | This study devoted to developing gasbag-roller-assisted UV imprinting technique and its application. The technique combines UV-based imprinting technique, gasbag-roller press and a belt-type flexible mold, to replicate patterns on the polymer substrate. Polydimethylsiloxane (PDMS) is employed as the material for the belt-type mold. A gasbag-roller is manufactured by wrapping and sealing a silicon tube around an aluminum dumbbell-shaped roller. The gasbag-roller is employed to increase the contact area and to ensure the conformity of contact between the mold and the substrate. The uniform pressure distribution on the substrate has been proven using pressure sensitive films. ANSYS software is also used to simulate the effects of inner gas pressure and pressure applied on the shaft of the gasbag roller. The result proves that contact area is increased and pressure distribution is uniform with aid of gasbag-roller, even when the substrate is non-uniform.
In this study, a gasbag-roller-assisted UV imprinting facility is designed and implemented. Microlens array has been successfully fabricated on the 2 mm-thick PMMA substrate. It proves that gasbag-roller-assisted UV imprinting process is feasible for microstructures replication. Compared with the system with rigid roller press, gasbag-roller can increase the contact area and ensure the conformity of contact between the mold and the substrate. The exposure time can also be prolonged to ensure the complete curing of patterns before detaching from the mold. The gasbag-roller-assisted UV-based imprinting process can increase the rolling speed and the productivity. The gasbag-roller-assisted UV imprinting system is further employed to replicate nanostructures on the non-planar substrate. Anodic aluminum oxide (AAO) template is embossed on the PC film. PDMS mold with nanostructures is then cast from the AAO template and used as the mold. The results show that AAO nanostructures can be successfully fabricated on the curved surface. The anti-reflection characteristic of nanostructures on the curved surface is measured. The reflectivity of AAO nanostructures on the PMMA curved surface is reduced to below 2 % at wavelength of 300 nm – 800 nm. | en |
dc.description.provenance | Made available in DSpace on 2021-06-15T05:48:26Z (GMT). No. of bitstreams: 1 ntu-99-F95522704-1.pdf: 9095536 bytes, checksum: fa2fd0a654073c2edf756ed4d6993676 (MD5) Previous issue date: 2010 | en |
dc.description.tableofcontents | 致謝 I
摘要 II Abstract III 目錄 V 圖目錄 IX 表目錄 XIII 第一章 導論 1 1.1微結構複製成型技術 1 1.2滾輪壓印成型技術 2 1.3紫外光固化壓印技術 2 1.4 滾輪與基材之接觸問題 3 1.5 研究動機與目標 4 1.6 論文內容與架構 5 第二章 文獻回顧 10 2.1紫外光固化壓印成型技術 10 2.2 滾輪應用於紫外光固化壓印成型技術 11 2.3 環帶式滾輪壓印成型技術 11 2.4氣體輔助壓印成型技術 12 2.5 曲面微奈米壓印技術 14 2.6 抗反射層原理 15 2.7 陽極氧化鋁奈米孔洞結構製作 15 2.8文獻回顧總結與研究創新 17 第三章 氣囊輪紫外光樹脂滾壓製程開發與設計 31 3.1紫外光樹脂固化機制 31 3.2 氣囊輪紫外光樹脂滾壓成型製程 32 3.2.1 製程特色及原理 32 3.2.2 實驗機台設計及組裝 33 3.2.3 氣囊輪材質選用評估 34 3.3 氣囊輪施壓下模具與基材之接觸長度及壓力均勻度 35 3.3.1 感壓軟片作用原理 35 3.3.2 滾動時均勻度測試結果 36 3.3.3 靜止狀態接觸長度測試 36 3.3.4 異物於壓力源和基材間之結果 37 3.4 結構量測設備 38 3.5 本章結論 39 第四章 氣囊輪施壓模具與基材之接觸長度模擬分析 56 4.1 模型模擬參數建立 56 4.1.1 矽膠氣囊與PDMS軟模2D模型建立 56 4.1.2 矽膠氣囊材料與PDMS軟模材料性質建立 56 4.1.3 邊界條件設定及網格分割 58 4.2 初步模擬結果 58 4.3 模擬結果與實際結果之比較 59 4.3.1 外部施加壓力(Pouter)對於接觸長度之影響 59 4.3.2 氣囊內部壓力(Pinner)對於接觸長度之影響 59 4.4 本章總結 60 第五章 氣囊輪紫外光樹脂滾壓製程探討 66 5.1環帶式PDMS軟模及其他相關材料備製 66 5.1.1 氣體輔助熱壓翻模 66 5.1.2 環帶式PDMS軟模製作 (Belt-type PDMS Mold) 67 5.1.3 基板 (Substrate) 67 5.1.4 紫外光固化光阻 (UV-curable resin) 67 5.2 氣囊輪施壓紫外光滾壓製程步驟 68 5.3 實驗參數規劃 68 5.4 壓印結果與討論 69 5.4.1 平台移動速度對於壓印之影響 69 5.4.2 與剛性滾筒施壓比較 70 5.4.3 氣囊內部壓力(PInner)和外部施加壓力(Pouter)對於滾壓之影響 70 5.4.4 不同氣囊厚度對滾壓製程之影響 71 5.4.5 製程參數對於微透鏡幾何參數之影響 72 5.4.6 微透鏡複製之轉寫均勻性探討 72 5.4.7 微透鏡陣列光學檢測 73 5.5 結論 74 第六章 曲面奈米結構轉印之應用 86 6.1 製程特色 86 6.2 壓印製程 87 6.3奈米結構轉印之探討 87 6.3.1 抽真空對於奈米結構轉印之影響 87 6.3.2氣囊內部壓力(Pinner)對於奈米結構轉印之影響 88 6.4曲面轉印之探討 88 6.4.1 曲面轉印可行性之驗證 88 6.4.2 奈米結構轉印於曲面之結果 89 6.5 抗反射AAO奈米結構轉印於PMMA曲面 89 6.5.1 奈米結構抗反射之原理 89 6.5.2 陽極氧化鋁(AAO)模具製作 89 6.5.3 PDMS模具製作 90 6.5.4 轉印結果與量測 91 6.6 本章結論 91 第七章 結論與未來研究方向 103 7.1 研究成果總結 103 7.2 創始貢獻 104 7.3 未來研究方向與展望 105 7.4 陽極氧化鋁奈米結構之延伸應用-具AAO奈米結構微透鏡製作 106 7.4.1 製程步驟 106 7.4.2 奈米結構成形之探討 106 7.4.3 微透鏡成形之探討 107 7.4.4 具AAO奈米結構微透鏡製作之探討 107 參考文獻 112 附錄A 皮帶輪壓印製程 117 個人著作(博士班期間) 128 | |
dc.language.iso | zh-TW | |
dc.title | 氣囊輪紫外光樹脂滾壓製程技術之研發及應用 | zh_TW |
dc.title | Development of a Gasbag-Roller-Assisted UV Imprinting Process and Its Application | en |
dc.type | Thesis | |
dc.date.schoolyear | 98-2 | |
dc.description.degree | 博士 | |
dc.contributor.oralexamcommittee | 王?玟,宋震國,吳政憲,陳仁浩,陳炤彰,張復瑜,劉士榮 | |
dc.subject.keyword | 氣囊輪,紫外光樹脂,滾壓, | zh_TW |
dc.subject.keyword | Gasbag roller,UV-curable resin,roller imprinting, | en |
dc.relation.page | 130 | |
dc.rights.note | 有償授權 | |
dc.date.accepted | 2010-08-19 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 機械工程學研究所 | zh_TW |
顯示於系所單位: | 機械工程學系 |
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