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| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 李佳翰 | |
| dc.contributor.author | Kuan-Yu Chu | en |
| dc.contributor.author | 朱冠宇 | zh_TW |
| dc.date.accessioned | 2021-06-15T05:44:12Z | - |
| dc.date.available | 2016-08-20 | |
| dc.date.copyright | 2011-08-20 | |
| dc.date.issued | 2011 | |
| dc.date.submitted | 2011-08-19 | |
| dc.identifier.citation | [1] D. Sweeney, 'Extreme ultraviolet lithography imaging the future,' Lawrence Livermore National Laboratory, (1999).
[2] International Technology Roadmap for Semiconductors, 2007 edition. Available at: http://www.itrs.net/ [3] R. Rakowski, A. Bartinik, H. Fiedorowicz, F. de Gaufridy de Fortan, R. Jarocki, J. Kostecki, J. Mikolajczyk, L. Ry'c, M. Szczurek, and P. Wachulak, ' Characterization and optimization of the laser-produced plasma EUV source at 13.6 nm based on a double-stream Xe/He gas puff target,' Appl. Phys. B 101,773-789, (2010). [4] S. S. Harilal, T. Sizyuk, V. Sizyuk, and A. Hassanein, ' Efficient laser-produced plasma extreme ultraviolet sources using grooved Sn targets,' Appl. Phys. Lett. 96, 111503 (2010). [5] V. Bakshi, 'EUV Lithography,' SPIE Press, Bellingham, ed. Wiley-Interscience (2009). [6] Q. Zhu, J. Yamada, N. Kishi, M. Watanabe, A. Okino, K. Horioka, and E. Hotta, 'Investigation of the dynamics of the Z-pinch imploding plasma for a laser-assisted discharge-produced Sn plasma EUV source,' J. Phys D: Appl Phys. 44, 145203 (2011). [7] A. Hassanein, V. Sizyuk, S. S. Harilal, and T. Sizyuk, 'Analysis, simulation, and experimental studies of YAG and CO2 laser-produced plasma for EUV lithography sources,' Proc. of SPIE. 7636, 76360 (2010). [8] N. S. Faradzhev, B. V. Yakshinskiy, E. Starodub, T. E. Madey, S. B. Hill, S. Grantham, T. B. Lucatorto, S. Yulin, E. Vescovo, and J. W. Keister, 'Resonance effects in photoemission from TiO2-capped Mo/Si multilayer mirrors for extreme ultraviolet applications,' J. Appl. Phys. 109, 083112 (2011) [9] W. Li, X. Zhou, R. Lock, S. Patchkovskii, A. Stolow, H. C. Kapteyn, and M. M. Murnane, “Time-resolved dynamics in N2O4 probed using high harmonic generation,” Science 322, 1207-1211(2008). [10] E. A. Gibson, A. Paul, N. Wagner, R. Tobey, D. Gaudiosi, S. Backus, I. P. Christov, A. Aquila, E. M. Gullikson, D. T. Attwood, M. M. Murnane, and H. C. Kapteyn, “Coherent soft X-ray generation in the water window with quasi-phase matching,” Science 302, 95- 98 (2003). [11] A. Paul, R. A. Bartels, R. Tobey, H. Green, S. Weiman, I. P. Christov, M. M. Murnane, H. C. Kapteyn, and S. Backus, “Quasi-phase-matched generation of coherent extreme-ultraviolet light,” Nature 421, 51-54 (2003). [12] M. -C. Chen, P. Arpin, T. Popmintchev, M. Gerrity, B. Zhang, M. Seaberg, D. Popmintchev, M. M. Murnane, and H. C. Kapteyn, 'Bright coherent ultrafast soft X-Ray harmonics spanning the water window from a tabletop light source,' Phys. Rev. Lett. 105, 173901 (2010). [13] S. Kim, J. Jin, Y. J. Kim, I. Y. Park, Y. Kim, and S. W. Kim, 'High-harmonic generation by resonant plasmon field enhancement,' Nature 453 (5), 757-760 (2008) [14] J. A. Schuller, E. S. Barnard, W. Cai, Y. C. Jun, J. S. White and M. L. Brongersma, 'Plasmonics for extreme light concentration and manipulation,' Nat. Mat. 9, 193-205 (2010). [15] W. L. Barners, A. Dereux, T. W. Ebbesen, 'Surface plasmon subwavelength optics,' Nature 424, 824-830 (2003). [16] R. H. Ritchie, 'Plasma losses by fast electrons in thin films,' Phys. Rev. 106 (5), 874-881 (1957). [17] S. A. Maier, 'Plasmonics: Fundamentals and Applications,' Springer. (2007). [18] P. Albella, F. Moreno, J. M. Saiz, and F. González, 'Surface inspection by monitoring spectral shifts of localized plasmon resonances,' Opt. Express 16, 12872-12879 (2008). [19] U. Kreibig and M. Vollmer, 'Optical Properties of Metal Clusters,' Springer Series in Material Science, Vol. 25 Springer. (1995). [20] P. Genevet, J. P. Tetienne, E. Gatzogiannis, R. Blanchard, M. A. Kats, M. O. Scully, and F. Capasso, 'Large enhancement of nonlinear optical phenomena by plasmonic nanocavity gratings,' Nano Lett. 10, 4880-4883 (2010). [21] J. Beermann, S. I. Bozhevolnyi, and V. Coello, 'Modeling of nonlinear microscopy of localized field enhancements in random metal nanostructures,' Phys. Rev. B 73, 115408 (2006). [22] N. A. Hatab, C. H. Hsueh, A. L. Gaddis, S. T. Retterer, J. H. Li, G. Eres, Z. Zhang, and B. Gu, “Free-standing optical gold bowtie nanoantenna with variable gap size for enhanced raman spectroscopy,” Nano Lett. 10 (12), 4952-4955 (2010). [23] X. Lang, L. Qian, P. Guan, J. Zi, and M. Chen, 'Localized surface plasmon resonance of nanoporous gold,' Appl. Phys. Lett. 98, 093701 (2011). [24] L. Cao, and N. C. Panoiu, 'Surface second-harmonic generation from scattering of surface plasmon polaritons from radially symmetric nanostructures,' Phys. Rev. B 79, 235416 (2009). [25] J. Renger, S. Grafström, and L. M. Eng, 'Direct excitation of surface plasmon polaritons in nanopatterned metal surfaces and thin films,' Phys. Rev. B 76, 045431 (2007). [26] J. C. Yang, H. Gao, J. Y. Suh, W. Zhou, M. H. Lee, and T. W. Odom, 'Enhanced optical transmission mediated by localized plasmons in anisotropic, three-dimensional nanohole arrays' Nano Lett. 10, 3173-3178 (2010). [27] J. Wu and X. Gan, 'Three dimensional nanoparticle trapping enhanced by surface plasmon resonance,' Opt. Express 18, 27619-27626 (2010). [28] J. Li, H. Iu, W. C. Luk, J. T. K. Wan, and H. C. Ong, 'Studies of the plasmonic properties of two-dimensional metallic nanobottle,' Appl. Phys. Lett. 92, 213106 (2008). [29] H. Iu, J. Li, H. C. Ong, and J. T. K.Wan, 'Surface plasmon resonance in two dimensional nanobottle arrays,' Opt. Express 16, 16904-16915 (2008). [30] H. Wang, D. W. Brandl, F. Le, P. Nordlander, and N. J. Halas, 'Nanorice: a hybrid plasmonic nanostructure,' Nano Lett. 6, 827-832 (2006). [31] W. Y. Ma, H. Yang, J. P. Hilton, Q. Lin, J. Y. Liu, L. X. Huang, and J. Yao, 'A numerical investigation of the effect of vertex geometry on localized surface plasmon resonance of nanostructures,' Opt. Express 18, 843-853 (2010). [32] X. F. Li, A. L'Huillier, M. Ferray, L. A. Lompre', and G. Mainfray, 'Multiple harmonic generation in rare gases at high laser intensity,' Phys. Rev. A 39, 5751-5761 (1989). [33] E. Mevel, P. Breger, R. Trainham, G. Petite, and P. Agostini, 'Atoms in strong optical fields evolution from multiphoton to tunnel ionization,' Phys. Rev. Lett. 70, 406-409 (1993). [34] C. Winterfeldt, C. Spielmann, and G. Gerber, 'Colloquium: optimal control of high-harmonic generation,' Rev. Mod. Phys. 80, 117-140 (2008). [35] J. L. Krause, K. J. Schafer, K. C. Kulander, “High-order harmonic generation from atoms and ions in the high intensity regime,” Phys. Rev. Lett. 68, 3535-3538 (1992). [36] M. Lewenstein, P. Balcou, M. Yu. Ivanov, A. L'Huillier, and P. B. Corkum, “Theory of high-harmonic generation by low-frequency laser fields,” Phys. Rev. A 49, 2117-2132 (1994). [37] A. V. Zayats and I. I. Smolyaninov, 'Near-field photonics: surface plasmon polaritons and localized surface plasmons,' J. Opt. A: Pure Appl. Opt. 5, S16-S50 (2003). [38] H. L. Liu, N. Wang, Y. H. Liu, and X. J. Wu, 'Influence of vertex angles on the extraordinary optical transmission characteristics of triangular and bow-tie-shaped apertures,' Solid State Comm. 150, 1822-1826 (2010). [39] E. Hecht, 'Optics,' Addison Wesley, Fourth Edition. [40] A. M. Weiner, 'Ultrafast Optics,' John Wiley and Sons, Inc. (2009). [41] M. Born, E. Wolf, A. B. Bhatia, P. C. Clemmow, D. Gabor, A. R. Stokes, A. M. Taylor, P. A. Wayman, and W. L. Wilcock, 'Principles of Optics Electromagnetic Theory of Propagation Interference and Diffraction of Light,' The press syndicate of the university of Cambridge, Seventh eidtion. (1999). [42] H. M. Shapiro, 'Current Protocols in Cytometry,' John Wiley and Sons, Inc. (2001). [43] F. L. Pedrotti, L. M. Pedrotti, and L. S. Pedrotti, 'Introduction to optics,' Benjamin Cummings, third edition. (2006). [44] 'Channeltron Electron Multiplier Handbook for Mass Spectrometry Applications,' at http://www.photonis.com/upload/industryscience/pdf/electron_multipliers/ChannelBook.pdf [45] T. Otsuka, D. Kilbane, J. White, T Higashiguchi, N. Yugami, T. Yatagai, W. Jiang, A. Endo, P. Dunne, and G. O’Sullivan, 'Rare-earth plasma extreme ultraviolet sources at 6.5–6.7 nm,' Appl. Phys. Lett. 97, 111503 (2010). [46] T. Otsuka, D. Kilbane, T. Higashiguchi, N. Yugami, T. Yatagai, W. Jiang, A. Endo, P. Dunne, and G. O’Sullivan, ' Systematic investigation of self-absorption and conversion efficiency of 6.7 nm extreme ultraviolet sources,' Appl. Phys. Lett. 97, 231503 (2010). | |
| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/46964 | - |
| dc.description.abstract | 我們藉由二維時域有限差分法模擬倒Ω結構與閃電結構的表面電漿性質，並透過改變其共振腔體長度，尋找其局域電漿電場強度最強的參數後，經由微機電製程及電子束微影技術進行製造，將其應用至產生極紫外光光源系統之研究。此外，我們也針對極紫外光光源產生的高階諧波產生法進行討論，並且在超快光學與物理光學的基礎上建立規畫整個實驗架構，以及判斷整個實驗系統可能產生之結果，並預測極紫外光光源產生之強度。 | zh_TW |
| dc.description.abstract | In this decade, extreme ultraviolet (EUV) light source is wildly discussed for the next generation lithographic light source. In order to develop the tabletop EUV light source system, we study the 2D surface plasmonic polaritons by applying the commercial software finite-difference time domain (FDTD). Though the process of varying the nanostructure cavity length, the best resonance parameter is found. So that the strongest localized surface plasmonic (LSP) field enhancement nanostructure will be applied to the extreme ultraviolet (EUV) experimental system. The plasmonic metallic nanostructure will be fabricated by nano-electro-mechanical system (NEMS) and E-beam lithography. We also discuss the high order harmonic generation (HHG) to radiate EUV light source, and build the experimental structure based on the physical optics. Therefore, we can estimate the results of EUV experimental setup and predict the EUV intensity in advance. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-15T05:44:12Z (GMT). No. of bitstreams: 1 ntu-100-R98525018-1.pdf: 7739302 bytes, checksum: bb0b60cf05c1c0dafe854db373eac072 (MD5) Previous issue date: 2011 | en |
| dc.description.tableofcontents | 致謝 .....................................................................................................................i
中文摘要 ....................................................................................................................ii Abstract ...................................................................................................................iii Statement of Contribution iv Contents ....................................................................................................................v List of Figures vii Chapter 1 Introduction 1 1.1 Literature Review of Extreme Ultraviolet 1 1.2 Literature Review of Plasmonic Quality of Nanostructures 3 1.3 Objectives 4 1.4 Framework of the Thesis 4 Chapter 2 Research Method 6 2.1 High Harmonic Generation 6 2.1.1 Ponderomotive potential 6 2.1.2 Optical field ionization 8 2.1.3 Three step model 9 2.2 Plasmonics Application 10 2.2.1 Surface Plasmon Polaritons at Single Interface 10 2.2.2 Localized Surface Plasmons 12 Chapter 3 Surface Plasmonic Polaritons Simulation Results 17 3.1 Nanobottle Nanostructure of Different Gaps, Cavity Width and Length 18 3.3 Lightening Shape Different Gaps and Line width 20 Chapter 4 Experimental Setup 59 4.1 Clean Room 59 4.2 Femtolaser 60 4.3 Vacuum Chamber 60 4.4 Optical Path Design 61 4.4.1 Gaussian Laser Beam 61 4.4.2 Dispersion Compensation 62 4.4.3 Focusing Spot 63 4.4.4 Grating 63 4.4.5 Photon Multiplier Tube 64 4.4.6 Optical Path Design 65 4.4.7 Experiment 66 Chapter 5 Conclusion and Future Work 79 5.1 Conclusion 79 5.2 Future work 80 Reference: ..................................................................................................................84 VITA ..................................................................................................................88 | |
| dc.language.iso | en | |
| dc.subject | 極紫外光 | zh_TW |
| dc.subject | 高階諧波產生法 | zh_TW |
| dc.subject | 時域有限差分法 | zh_TW |
| dc.subject | 局域電漿電場 | zh_TW |
| dc.subject | high order harmonic generation (HHG) | en |
| dc.subject | localized surface plasmons (LSP) | en |
| dc.subject | extreme ultraviolet (EUV) | en |
| dc.title | 應用具有電漿子效應之金屬奈米結構於極紫外光光源系統開發 | zh_TW |
| dc.title | Applying Metallic Nanostructures with Plasmonic Effects to Develop Extreme Ultraviolet Light Source System | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 99-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 顏家鈺,鍾添東,蔡坤諭,李坤彥 | |
| dc.subject.keyword | 時域有限差分法,局域電漿電場,極紫外光,高階諧波產生法, | zh_TW |
| dc.subject.keyword | localized surface plasmons (LSP),extreme ultraviolet (EUV),high order harmonic generation (HHG), | en |
| dc.relation.page | 88 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2011-08-19 | |
| dc.contributor.author-college | 工學院 | zh_TW |
| dc.contributor.author-dept | 工程科學及海洋工程學研究所 | zh_TW |
| 顯示於系所單位： | 工程科學及海洋工程學系 | |
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