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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 黃光裕 | |
dc.contributor.author | Bo-Jing juang | en |
dc.contributor.author | 莊博景 | zh_TW |
dc.date.accessioned | 2021-05-14T17:44:41Z | - |
dc.date.available | 2017-07-29 | |
dc.date.available | 2021-05-14T17:44:41Z | - |
dc.date.copyright | 2015-07-29 | |
dc.date.issued | 2015 | |
dc.date.submitted | 2015-07-27 | |
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dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/4652 | - |
dc.description.abstract | 原子力顯微鏡廣泛應用在工程及科學領域,尤其在奈米量測的重要性與日俱增。本論文發展具有位移與角度量測功能的全像式原子力顯微鏡,並開發可在空氣及水溶液中掃描的機制。相較以光槓桿原理為光學頭的原子力顯微鏡體積較大,且需要花費較多時間做光路的調整。全像式光學元件具有體積小而緊緻與高靈敏度的優點,以全像式讀取頭作為原子力顯微鏡光學頭,除了方便控制外更可縮短光路調整時間;經由透鏡的組合可達到所需的掃描範圍,以提升原子力顯微鏡的設計彈性與性能。
透過理論推導與軟體分析,本論文選用適合原子力顯微鏡架構的準直鏡與物鏡,並以理論及實驗方式說明全像式讀取頭具有量測位移及角度變化的能力;透過熱雜訊頻譜的分析,驗證全像式讀取頭的高靈敏度;也利用熱雜訊頻譜及聚焦誤差訊號的關係,推導出非接觸式量測微懸臂彈性係數的方法。 經實驗證明,本論文所架構之全像式原子力顯微鏡在空氣中及水溶液中掃描石墨樣品皆達到單層石墨台階解析度,利用循軌誤差訊號做角度的回饋亦可達到奈米等級解析度,掃瞄結果說明全像式原子力顯微鏡的高解析度及穩定性。此外,利用讀取頭的光學特性,全像式系統也適用於非接觸式光學輪廓儀的應用,藉由不同樣品的掃描也驗證該模式的可行性。 | zh_TW |
dc.description.abstract | Recent years have seen increased attention being given to atomic force microscopy (AFM) in nano-scale measurement. In this dissertation, a holographic optical element (HOE) based AFM is designed and developed for operation in air and water. Unlike the bulk size and cumbersome procedures of laser beam deflection method, holographic pickup head has the advantages of easy control and simpler optical adjustment. The features of compact configuration, small size, and high sensitivity let HOE enhance the performance of AFM.
Through theoretical analysis and software simulation, the translational S-curve between the light spot on photodiode and reflective plane displacement is deduced. According to the simulation results, the relevance of light spot shape, translational displacement, bending angle, and torsional angle are revealed. The detection functions of translational and angular displacements of the cantilever are demonstrated. The experiment of thermal noise spectrum verifies the stable performance and high sensitivity of holographic pickup head. The spring constant calibration of a micro cantilever is also derivative by thermal fluctuation method. AFM images of graphite display the single layer step (0.34 nm) in both air and water. The nanometer scale resolution by track error signal is also divided, thus verifying the resolution and stability of HOE-based AFM system. The images of non-contact optical profiler mode for microcircuit and tuberose epidermis tissue exemplify the feasibility and applicability of HOE-based profiler system in micron scale. | en |
dc.description.provenance | Made available in DSpace on 2021-05-14T17:44:41Z (GMT). No. of bitstreams: 1 ntu-104-D95522019-1.pdf: 11390913 bytes, checksum: f2299780b4e582a8853a2fe3fdf65f30 (MD5) Previous issue date: 2015 | en |
dc.description.tableofcontents | 誌謝 i
中文摘要 ii Abstract iii Contents iv List of Figures vii List of Tables xi List of Symbols xii Chapter 1 Introduction 1 1.1 Motivation 1 1.2 Literature Survey 2 1.2.1 Atomic force microscopy 2 1.2.2 AFM in liquid 6 1.2.3 Optical pickup head in AFM 9 1.3 Thesis Organization 12 Chapter 2 Theoretical Analysis and Simulation 13 2.1 Introduction of HOE 13 2.2 Theoretical Analysis of HOE 19 2.2.1 Ray-tracking of diffracted beam 19 2.2.2 Spot size and depth of focus 25 2.2.3 Optical analysis in liquid 27 2.3 Simulation of HOE 29 2.3.1 Focus error signal and translational deflection 29 2.3.2 Tracking error signal and torsional signal 31 2.3.3 Translational S-curve in air and water 34 2.4 Cantilever Dynamics 36 2.4.1 Cantilever dimensional effect 36 2.4.2 Cantilever dynamics in air and water 38 Chapter 3 Performance of Holographic Pickup Head 42 3.1 Properties of Holographic Pickup Head 42 3.1.1 Depth of focus and linear region 42 3.1.2 Tracking error signal and torsional signal 45 3.1.3 Effect of water layer 48 3.2 Thermal Fluctuation Spectrum 51 3.3 Spring Constant Calibration 53 3.3.1 Thermal fluctuation method 53 3.3.2 Experimental setup and calibration results 54 3.4 Cantilever Motion Measurement 60 3.4.1 Translational measurement 60 3.4.2 Angular measurement 62 Chapter 4 HOE-based AFM 65 4.1 Configuration of HOE-based AFM 65 4.1.1 Scanning platform 67 4.1.2 AFM probe holder 68 4.1.3 Holographic pickup head 70 4.1.4 Signal acquisition system 72 4.2 Performance Verification of HOE-based AFM 74 4.2.1 Dynamic and measurement performance 74 4.2.2 Measurement resolution in air and water 76 4.2.3 Measurement by tracking error signal 81 4.3 HOE-based Profiler and Implementation 83 Chapter 5 Conclusion 87 Reference 89 Appendix 95 | |
dc.language.iso | en | |
dc.title | 具有位移及角度量測功能之全像式原子力顯微鏡之設計與開發 | zh_TW |
dc.title | Design and Development of HOE-based Atomic Force Microscope with Translational and Angular measurements | en |
dc.type | Thesis | |
dc.date.schoolyear | 103-2 | |
dc.description.degree | 博士 | |
dc.contributor.oralexamcommittee | 張嘉升,黃英碩,邱雅萍,廖洺漢,楊志文 | |
dc.subject.keyword | 原子力顯微鏡,全像式光學元件,位移量測,角度量測, | zh_TW |
dc.subject.keyword | Atomic force microscopy,Holographic optical element,Translational measurement,Angular measurement, | en |
dc.relation.page | 101 | |
dc.rights.note | 同意授權(全球公開) | |
dc.date.accepted | 2015-07-27 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 機械工程學研究所 | zh_TW |
顯示於系所單位: | 機械工程學系 |
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