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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 沈弘俊(Horn-Jiunn Sheen) | |
dc.contributor.author | Lian-Peng Hsiao | en |
dc.contributor.author | 蕭連鵬 | zh_TW |
dc.date.accessioned | 2021-06-15T04:50:41Z | - |
dc.date.available | 2015-08-03 | |
dc.date.copyright | 2010-08-03 | |
dc.date.issued | 2010 | |
dc.date.submitted | 2010-08-02 | |
dc.identifier.citation | 參考文獻
Ahn, S.H., and Kim, Y.K., “Fabrication and experiment of a planar micro ion drag pump”, Sensors and Actuators A., Vol. 70, pp. 1-5, 1998. Andersson, H., van der Wijngaart, W., Nilsson, P., Enoksson, P., and Stemme , G., “A valve-less diffuser micropump for microfluidic analytical systems”, Sensors and Actuators B, Vol. 72, pp. 259-265, 2001. Bistch, L., Kutter, J.P., Storgaard-Larsen, T., and Bruus, H., “Alow-energy, turning microvalve with high-pressure seals: scaling of friction”, Journal of Micromechanics and Microengineering, Vol. 16, pp. 2121-2127, 2006. Gerlach, T., Schuenemann, M., and Wurmus, H., “A New Micropump Principle of The Reciprocating Type Using Pyramidic Micro Flow Channels as Passive Valves”, Journal of Micromechanics and Microengineering, Vol. 5, pp. 199-201, 1995. Izzo, I., Accoto, D., Menciassi, A., “Schmitt, L., and Dario, P., Modeling and Experimental Validation of a Piezoelectric Micropump with Novel No-moving-part Valves”, Sensors and Actuators A, Vol. 133, pp. 128-140, 2007. Jang, J., and Lee, S.S., Theoretical and experimental study of (MHD)magnetohydrodynamic micropump, Sensors and Actuators, Vol. 80, pp. 84-89, 2000. Koch, M., Evans, A.G.R., and Brunnschweiler, A., Characterization of micromachined cantilever valves, Journal of Micromechanics andMicroengineering, Vol. 7, pp. 221-223, 1997. Laser, D.J., and Santiago, J.G., “A review of micropumps”, Journal of Micromechanics and Microengineering, Vol. 14, pp. 35-64, 2004. Olsson, A., Stemme, G., and Stemme, E., “A valve-less planar fluid pump with two pump chambers”, Sensors and Actuators A., Vol. 46, pp. 549-556, 1995. Olsson, A., Stemme, G., and Stemme, E., “Diffuser-element design investigation for valve-less pumps”, Sensors and Actuators A., Vol. 57, pp. 137-143, 1996. Olsson, A., Enoksson, P., Stemme, G., and Stemme, E., “A valve-lessplanar pump isotropically etched in silicon ”, Journal of Micromechanics and Microengineering, Vol. 6, pp. 87-91, 1996. Olsson, A., Enoksson, P., Stemme, G., and Stemme, E., “Micromachined flat-walled valv-eless diffuser pumps”, Journal of icroelectromechanical systems, Vol. 6, No. 2, pp. 161-166, 1997. Olsson, A., Larsson, O., Holm, J., Lundbladh, L., Ohman, O., and Stemme, G., “valve-less diffuser micropumps fabricated using thermoplastic replication”, Sensors and Actuators A., Vol. 64, pp. 63-68, 1998. Olsson, A., “Valve-less Diffuser Micropumps” Thesis, Royal Institute of Technology, Stockholm, Sweden, 1998. Sheen, H.J., Hsu, C.J., Wu, T.H., Chang, C.C., Chu, H.C., Yang, C.Y., and Lei, U., Unsteady flow behaviors in an obstacle-type valveless micropumpby micro-PIV”, Microfluidics and Nanofluidics, Vol. 4, pp. 331-342, 2008. Smits, J.G., “Piezoelectric micropump with 3 valves working peristaltically”, Sensors Actuators A, Vol. 21, pp. 203–206, 1990. Stemme, E., and Stemme, G., “A valve-less diffuser/nozzle-based fluid pump”, Sensors and Actuators A., Vol. 39, pp. 159-167, 1993. White, F.M., Viscous fluid flow, 2nd ed. McGraw-Hill, New York, 1986. Woias, P., Micropumps – past, progress and future design, Sensors and Actuators B, Vol. 105, pp. 28-38, 2005. Yang, C.Y., Tien, M.W., and Lei, U., “The Role of Fluid Drag on the Net Flow Rate in a Valve-less Micro-pump”, The 29th National Conference on Theoretical and Applied Mechanics, December 16-17, NTHU, Hsinchu, Taiwan, R.O.C., 2005. 田明偉,微流道中以不對稱擋體做流場導向的研究,國立台灣大學應用力學研究所碩士論文,2005. 洪御誌,微轉子式微流體幫浦暨混合裝置,國立台灣大學應用力學研究所碩士論文,2008 許家睿,新式被動閥式微幫浦之開發及其流場量測,國立台灣大學應用力學研究所博士論文,2008 葉建邦,平面被動閥式微幫浦之最佳化設計新,國立台灣大學應用力學研究所博士論文,2009 | |
dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/45991 | - |
dc.description.abstract | 隨著半導體製程技術逐漸進步,而生醫檢測的目標是將檢測系統微小化,讓整個生醫檢測系統整合至單一晶片上,而微幫浦扮演重要的角色,做為一個檢測用的微幫浦,其適合的流量為20-30 uL/min。根據實驗的結果,改變擋體式無閥門微幫浦中的擋體尺寸,可以改變其操作頻率,也可以改變流量大小。與前人研究做比較,擋體角度10度的type A和擋體角度15度的type B皆在驅動電壓40V之下,最佳操作頻率從前人研究的3.1KHz,降至1.1KHz,其流量也從155.85 uL/min降至56.78 uL/min和26.18 uL/min,不論在操作頻率和流量上,皆比前人研究更適合應用於生醫檢測晶片。本研究更針對單一擋體對微幫浦性能做探討,若將微幫浦整體的性能定為100%,由下游的擋體可約提供70%,上游的擋體可約提供剩餘的30%。單一擋體之微幫浦在高頻下會有逆流現象產生,其裝置可藉由改變壓電片驅動電壓和操作頻率,就可以操控此擋體式無閥門微幫浦的淨流量大小及方向。 | zh_TW |
dc.description.abstract | With continuous progress of semiconductor technology, the objective of biomedical detection was miniaturized. The biomedical detecting system was integraled to a chip, and Micropump play a important element in detecting system which provided 20-30 uL/min suitably. Based on the experimental result, the operation frequency and flow rate of micropump were effected by geometric design of obstacle. Compare with Tu(2005), the optimum volume flow rates of typeA and typeB decreased to 56.78 uL/min and 26.18 uL/min with driving voltage of 40V and working frequency of 1.1KHz. The operation frequency and flow rate of micropump were suitable for biomedical detecting chip. In this study, we discussed pumping performance of single obstacle micropump more. The downstream obstacle provided 70% rectified performance in comparison with micropump with two obstacles, and the upstream obstacle provided surplus 30%approximately. The reverse flow micropump with single obstacle happened at high operating frequency. The flow direction could be control by varying operating frequency and driving voltage. | en |
dc.description.provenance | Made available in DSpace on 2021-06-15T04:50:41Z (GMT). No. of bitstreams: 1 ntu-99-R97543074-1.pdf: 4691593 bytes, checksum: 5b4500be8a40d90903f4fab3ad19da43 (MD5) Previous issue date: 2010 | en |
dc.description.tableofcontents | 目錄
論文口試委員審定書 II 致謝......................................................III 摘要.....................................................IV Abstract ...............................................V 目錄 ................................................ VI 表目錄 ...............................................IX 圖目錄 ..............................................X 符號說明 ................................................XIII 第一章 緒論 ........................................1 1-1前言 .................................................1 1-2文獻回顧 ........................................2 1-2-1微幫浦的分類 ...............................2 1-2-2無閥門微幫浦 ...............................6 1-3研究動機 ........................................8 1-4研究目的 ........................................9 第二章 迴路式微幫浦設計 ..............................11 2-1無閥門微幫浦工作原理 ..............................11 2-2非對稱擋體無閥門微幫浦工作原理 .....................12 2-3驅動方式選擇...........................................13 2-4壓電材料選擇...........................................13 2-5非對稱擋體無閥門微幫浦設計.............................14 2-6製程選擇...............................................16 2-6-1微流道製程...........................................16 2-6-2封裝接合製程.........................................19 第三章 元件製作與實驗設備架..............................20 3-1光罩製作...............................................20 3-2基材清潔...............................................21 3-3矽晶圓微流道製程.......................................22 3-3-1黃光微影製程.........................................23 3-3-2乾蝕刻製程...........................................25 3-4矽晶圓微流道之封裝.....................................26 3-4-1擋體式無閥門微幫浦注水孔開孔.........................26 3-4-2矽晶圓與7740玻璃接合.................................27 3-4-3壓電片的固定.........................................28 3-5實驗設備與儀器架設.....................................28 第四章 實驗結果與討論....................................30 4-1擋體式無閥門微幫浦製作結果.............................30 4-1-1微流道製作結果.......................................30 4-1-2封裝製作結果 .......................................30 4-2流量和背壓量測方法.....................................31 4-3微幫浦效能測試 .......................................32 4-3-1不同擋體尺寸之流量量測與分析 .....................32 4-3-2擋體導角對微幫浦流量之影響 .....................34 4-3-3單一檔體微幫浦流量量測與分析 .....................35 4-4單一擋體微幫浦之逆流效果 ..............................36 4-4-1單一擋體逆流流量量測方法..........................36 4-4-2逆流流量量測與分析 ..............................37 4-4-3逆流實驗與理論比較 ..............................38 第五章 結論與未來展望 ..............................40 5-1結論 ................................................40 5-2未來展望 .......................................41 參考文獻 ................................................43 | |
dc.language.iso | zh-TW | |
dc.title | 無閥門微幫浦之擋體幾何設計與性能分析 | zh_TW |
dc.title | Geometric Design of Obstacles and Analysis of Pumping
Performance of Valveless Micropump | en |
dc.type | Thesis | |
dc.date.schoolyear | 98-2 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 吳光鐘(Kuang-Chong Wu),張正憲(Jeng-Shian Chang),李雨(U Lei) | |
dc.subject.keyword | 無閥門微幫浦,微機電製程,單一擋體,逆流, | zh_TW |
dc.subject.keyword | valveless micropump,MEMS,single obstacle,reverse flow, | en |
dc.relation.page | 69 | |
dc.rights.note | 有償授權 | |
dc.date.accepted | 2010-08-02 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 應用力學研究所 | zh_TW |
顯示於系所單位: | 應用力學研究所 |
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