多自由度角度誤差量測系統研製與應用

Abstract

線性運動平台在運動過程中因各種因素而有六個自由度誤差，其中角度誤差會因阿貝原理而放大，對精度影響尤其顯著。如欲改善機台精度，首要之務即是量取其角度誤差資訊。 一般市售之高精度角度感測器價格昂貴，無法裝設於機台做長期監控使用。本文主旨為利用市售之DVD讀寫頭及四象限感測器，配合自行製作之訊號處理電路，及適當的光學方法，製作小體積、低成本且高精度之感測器。 在DVD讀寫頭應用方面，開發出DVD自動視準儀以及一維、二維光電水平儀。另外，並利用兩個四象限感測器，配合光路系統及雷射光源，製作可量測二維直線度及滾動度誤差之感測器。最後，並將DVD自動視準儀及滾動度感測器整合為一套可同時量測二維直線度及三個偏角度之五自由度誤差量測系統。

Since variant reasons, linear moving stage has six degree-of-freedom errors during moving process. Especially the angular error influences the positioning precision significantly due to the Abbé principle. Therefore to improve the precision of the stage, the most important job is to measure its angular error information. In general, commercial high precision angular sensors are expensive so that cannot be installed on machine to do long-term monitoring. The purpose of this article is to develop small volume, low cost, and high-precision sensors based on commercialized DVD pick-up head, quadrant detector and self-made signal process circuits. In the application of DVD pick-up head, DVD autocollimator, 1-D and 2-D optoelectronic level are developed. Moreover, by employing two quadrant detector, optical system and laser source, a sensor which can measure 2-D straightness and roll angular error is fabricated. Finally, the DVD autocollimator and the roll sensor are integrated into one 5-DOFs measurement system, which can measure 2-D straightness , pitch, yaw and roll angular error simultaneously.