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  1. NTU Theses and Dissertations Repository
  2. 電機資訊學院
  3. 光電工程學研究所
請用此 Handle URI 來引用此文件: http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/41576
完整後設資料紀錄
DC 欄位值語言
dc.contributor.advisor蘇國棟(Guo-Dung Su)
dc.contributor.authorChun-Chao Tsuien
dc.contributor.author崔竣超zh_TW
dc.date.accessioned2021-06-15T00:23:37Z-
dc.date.available2014-08-16
dc.date.copyright2011-08-16
dc.date.issued2011
dc.date.submitted2011-08-15
dc.identifier.citation1. Yon, J.J., et al., Infrared microbolometer sensors and their application in automotive safety. Advanced Microsystems for Automotive Applications 2003, 2003: p. 137-157.
2. Fischer, R.E. and B. Tadic-Galeb, Optical system design. 2000, New York: McGraw Hill.
3. PMMA data. Available from: http://en.wikipedia.org/wiki/PMMA.
4. Zailer, I., et al., Crosslinked PMMA as a high-resolution negative resist for electron beam lithography and applications for physics of low-dimensional structures. Semiconductor science and technology, 1996. 11: p. 1235.
5. Schneider, A., et al., Comparison of PMMA and SU-8 resist moulds for embossing of PZT to produce high-aspect-ratio microstructures using LIGA process. Microsystem technologies, 2002. 8(2): p. 88-92.
6. Tighilt, F.Z., et al., Morphology and specific interaction of PMMA coating with the surface of porous silicon. Surface Science, 2007. 601(18): p. 4217-4221.
7. Vicker, D. and R. LeBlanc. Midwave infrared imager with plastic laminated diffractive/aspheric surfaces. 2001.
8. Nachmias, T., et al. Shallow Fresnel lens fabrication using grayscale lithography made by high energy beam sensitive mask (HEBS) technology and reactive ion etching. 2009.
9. O'Shea, D.C., et al., Diffractive Optics, in Design, Fabrication, and Test. 2003, SPIE.
10. Fonollosa, J., et al., Fresnel Lenses: study and fabrication in silicon technology for medium-IR applications. Proceedings SPIE 61860R-1: 61860R–11, 2006.
11. Stern, M., et al., Fabricating binary optics: process variables critical to optical efficiency. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1991. 9(6): p. 3117-3121.
12. Saito, M., et al., Optical constants of polymer coatings in the infrared. Infrared physics & technology, 1995. 36(7): p. 1125-1129.
13. Mann, A., Infrared optics and zoom lenses. Tutorial texts in optical engineering ;. 2000, Bellingham, Wash.: SPIE Optical Engineering Press.
14. PMMA data sheet. Available from: http://www.microchem.com/products/pmma.htm.
15. Corporation, Z.D., Zemax Optical Design Program User's Manual. 2010.
16. Fujita, T., H. Nishihara, and J. Koyama, Blazed gratings and Fresnel lenses fabricated by electron-beam lithography. Optics letters, 1982. 7(12): p. 578-580.
17. Unno, Y., Fabrication of N-Level Binary Optical Elements by Use of M Mask Patterns with N in the Range of 2 M 1 1 N 2 M. Applied Optics, 1998. 37: p. 8012-8020.
18. Riedl, M.J. and J.T. McCann, Analysis and performance limits of diamond turned diffractive lenses for the 3-5 and 8-12 micrometer regions. Infrared Optical Design and Fabrication: p. 153-163.
19. Daschner, W., et al., Fabrication of diffractive optical elements using a single optical exposure with a gray level mask. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1995. 13(6): p. 2729-2731.
20. Cox, J.A., et al. Diffraction efficiency of binary optical elements. 1990.
21. Farn, M.W. and J.W. Goodman. Effect of VLSI fabrication errors on kinoform efficiency. 1990.
dc.identifier.urihttp://tdr.lib.ntu.edu.tw/jspui/handle/123456789/41576-
dc.description.abstract紅外線攝影像技術是藉由探測物體散發的紅外線來重建影像的技術,藉由此技術,我們可以在缺乏可見光的情況下偵測四周環境。然而,大部分用於製作普通鏡片的材料,例如玻璃,對紅外線都有很高的吸收率。以前常用於紅外線鏡片的材料,如矽、鍺也有著其缺點。其中一個重要的缺點是這兩種材料皆為堅硬且易脆,要用這兩種材料形成有弧度的彎曲鏡片通常必須透過鑽石研磨,因此紅外線鏡片的成本往往高於普通鏡片的成本。多年來,雖然不少廠商都有投入新材料的研發而且也有一些成果被發表,但是這些新材料的配方卻往往被視為商業機密而被開發廠商保護著,因此這些材料還是不能被大眾所知悉。
我們發現Poly(methyl methacrylate)(縮寫PMMA,俗稱壓克力)在中紅外線波段有著不錯的穿透率,同時又是一種極容易取得的材料。更重要的是,液態的PMMA可以輕易的被塑型成任何我們想要的形狀。因此,在這篇論文中,我們討論了一下PMMA在紅外線波段的光學特性,接著我們設計並模擬了利用PMMA製作的菲涅爾透鏡,我們設計出來的鏡片直徑10毫米,焦距14毫米,模擬的結果證實了我們的設計可以有效的聚焦紅外線。
最後,我們採用了一種新的製成方式製作我們的菲涅爾透鏡。跟傳統的製作方式相比,我們的製成不僅成本較低同時也更為簡單,十分適合工業上大規模生產。而製作完成的鏡片也利用了各種檢測去測量其結構和光學特性。測量結果顯示,利用我們的製成,我們可以成功的製作出符合我們設計的PMMA紅外線菲涅爾透鏡。
zh_TW
dc.description.abstractInfrared thermography is a promising solution that can help improve our lives. However, most of the common materials used to fabricate lenses are opaque in the infrared range. Silicon and germanium are better solutions. But shaping these two materials are truly complicated and time-consuming. Many companies have devoted themselves to develope new materials. Though some results have been published recently, the recipe of the new materails are still usually protected as the commercial secret. Due to material restriction, traditional lenses to focus infrared rays are ususally expensive. Poly(methyl methacrylate) is an ubiquitous polymor material. It is cheap and transparent in mid-IR range. More importantly, liquid PMMA can be shaped and solidified easily. Therefore, we chose PMMA as the material to design and make our IR lenses. In this research, we introduce a common material - Poly(methyl methacrylate) and discuss its optical properties in mid-IR range. We design a Fresnel lens with diameter 10 mm and f/1.4. We also run the simulation by using ZemaxR. The simulation results are the same as our design. We make the lens by our much low-cost and easier fabrication process. After that, we examine the structure and optical characteristic of our PMMA fresnel lens. The examine results also show that the lens is quite identical to our design.en
dc.description.provenanceMade available in DSpace on 2021-06-15T00:23:37Z (GMT). No. of bitstreams: 1
ntu-100-R98941040-1.pdf: 2318560 bytes, checksum: 0cd7317b01540115c2b137fb9d0e272e (MD5)
Previous issue date: 2011
en
dc.description.tableofcontents致謝 II
中文摘要 III
Abstract IV
Contents V
List of Figures VII
List of Tables X
Chapter 1: Introduction 1
1.1 Motivation 1
1.2 Introduction of Poly(methyl methacrylate) 3
1.3 Introduction of Fresnel lens 6
Chapter 2: Design and Simulation 9
2.1 Design Formulas 9
2.2 Simulation using ZemaxR 15
2.2.1 Refractive index of PMMA 15
2.2.2 Simulation Process and results 19
Chapter 3: Fabrication process 24
3.1 Review of fabrication method 24
3.2 New Fabrication Process 25
3.3 Comparison with former fabrication method 35
Chapter 4: Experimental Results 37
4.1 Structure measurement 37
4.2 Optical measurement 45
Chapter 5: Discussion and Conclusion 52
5.1 Error Discussion 52
5.2 Conclusion 54
Appendix A 56
Appendix B 58
Reference 60
dc.language.isoen
dc.title壓克力(PMMA)菲涅爾鏡片於紅外線波段的設計與製作zh_TW
dc.titleDesign and Fabrication of PMMA Fresnel lens for Infrared Light Applicationsen
dc.typeThesis
dc.date.schoolyear99-2
dc.description.degree碩士
dc.contributor.oralexamcommittee蔡睿哲(Jui-Che Tsai),何志浩(Jr-Hau He)
dc.subject.keyword紅外線熱影像,鏡片,紅外線,壓克力,菲涅爾鏡片,zh_TW
dc.subject.keywordInfrared thermography,lens,IR,PMMA,Fresnel lens,en
dc.relation.page61
dc.rights.note有償授權
dc.date.accepted2011-08-15
dc.contributor.author-college電機資訊學院zh_TW
dc.contributor.author-dept光電工程學研究所zh_TW
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