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http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/41120完整後設資料紀錄
| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 毛明華 | |
| dc.contributor.author | Chung-Min Kao | en |
| dc.contributor.author | 高崇閔 | zh_TW |
| dc.date.accessioned | 2021-06-14T17:18:18Z | - |
| dc.date.available | 2021-12-31 | |
| dc.date.copyright | 2011-08-17 | |
| dc.date.issued | 2011 | |
| dc.date.submitted | 2011-08-11 | |
| dc.identifier.citation | [1] L.A. Coldren and S. W. Corzine, Diode Lasers and Photonic Integrated Circuits, John wiley & Sons, New York, 1995.
[2] P. S. Zory, and Jr., Quantum Well Lasers, Academic Press, 1993. [3] N. Kirstaedter, N. N. Ledentsov, M. Grundmann, D. Bimberg, V. M. Ustinov, S. S. Ruvimov, M. V. Maximov, P. S. Kop'ev, Zh. I. Alferov, U. Richter, P. Werner, U. Gösele, and J. Heydenreich, Low threshold, large To injection laser emission from (InGa)As quantum dots, Electron. Lett., vol. 30, pp. 1416-1417, 1994 [4] N. N. Ledentsov, M. Grundmann, F. Heinrichsdorff, D. Bimberg, V. M. Ustinov, A. E. Zhukov, M. V. Maximov, Zh. I. Alferov, and J. A. Lott, Quantum-dot heterostructure lasers, IEEE J. Sel. Top. Quantum Electron., vol. 6, pp. 439-451, 2000. [5] E. Kapon, Semiconductor Lasers II: Materials and Structures, San Diego: Academic (1999) [6] S. L. McCall, A. F. J. Levi, R. E. Slusher, S. J. Pearton, and R. A. Logan, Whispering-gallery mode microdisk lasers, 1991. [7] T. A. Birks, P. J. Roberts, P. St. J. Russell, D. M. Atkin, and T. J. Shepherd, Electron. Lett. 31, 1941 (1995). [8] K. Vahala, Optical microcavities, Nature 424, 839-846 (2003) [9] G. Tosik, F. Gaffiot, Z. Lisik, I. O’Connor, and F. T. Drissi, Optical versus electrical interconnections for clock distribution in new VLSI technologies, PATMOS 2799, 461-470 (2003). [10] W. Bogaerts, R. Baets, P. Dμmon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. Van Campenhout, P.Bienstman, D. Van Thourhout, Nanophotonic waveguides in silicon-on-insulator fabricated with CMOSTechnology, IEEE J. of Lightwave Technol. 23, 401-412, (2005). [11] H. T. Hattori, C. Seassal, E. Touraille, P. Rojo Romeo, X. Letartre, G. Hollinger, P. Viktorovitch, L. Di Cioccio, M. Zussy, L. El Melhaoui, and J. M. Fedeli, Heterogeneous integration of microdisk lasers on silicon strip waveguides for optical interconnects, IEEE Photon. Technol. Lett. 18, 223-225 (2006). [12] J. Van Campenhout, P. Rojo-Romeo, P.Regreny, C. Seassal, D. Van Thourhout, S. Verstuyft, L. Di Cioccio, JM Fedeli, C.La- gahe, R. Baets , Electrically pumped InP-based microdisk lasers integrated with a nanophotonic silicon-on-insulator waveguide circuit, Opt. Express 15, 6744-6749 (2007) [13] Liu Liu, Rajesh Kumar, Koen Huybrechts, Thijs Spuesens, Günther Roelkens, Erik-Jan Geluk, Tjibbe de Vries, Philippe Regreny, Dries Van Thourhout, Roel Baets Geert Morthier, An ultra-small, low-power, all-optical flip-flop memory on a silicon chip, Nature Photonics 4, 182-187 (2010) [14] Light Peak Technology, http://techresearch.intel.com/articles/None/1813.htm [15] Cold Cavity Whispering Gallery Modes, http://www.ati.surrey.ac.uk/tac/research/microcavity [16]http://www.ecse.rpi.edu/~schubert/Light-Emitting-Diodes-dot-org/chap04/chap04.htm [17] M. Fujita, A. Sakai, and T. Baba, IEEE J. Select. Top. Quantum Electron., 5, pp. 673–681 (1999) [18] R. Ushigome, M. Fujita, A. Sakai, T. Baba and Y. Kokubun, GaInAsP Microdisk Injection Laser with Benzocyclobutene Polymer Cladding and Its Athermal Effect, Jpn. J. Appl. Phys. 41, pp. 6364-6369 (2002) [19] A. Modafe, N. Ghalichechian, B. Kleber, and R. Ghodssi, Electrical characterization of benzocyclobutene polymers for electric micromachines, IEEE Trans. on Device and Materials Reliability, vol. 4, pp. 495-508, 2004 [20] M. Sugawara, K. Mukai, Y. Nakata, and H. Ishikawa, Effect of homogeneous broadening of optical gain on lasing spectra in self-assembled InxGa1-xAs/GaAs quantum dot lasers, Phys. Rev. B, vol. 61, pp. 7595-7603, 2000. [21] Davide Tari, Milena De Giorgi, Roberto Cingolani, Ermanno Foti, and Claudio Coriasso, Determination of band-offset enhanced in InGaAsP–InGaAsP strained multiquantum wells by photocurrent measurements, J. Appl. Phys. 97, 043705 (2005) [22] 洪傑睿,電流注入式微碟雷射之研製與特性分析, 台灣大學光電所碩士論文, 2010. [23] FUJITA, M., SAKAI, A., and BABA, T.: Ultra-small and ultra-low threshold GaInAsP-InP microdisk injection lasers - design, fabrication, lasing characteristics and spontaneous emission factor, IEEE J. Sel. Topics Quantum Electron., 1999, QE-5, (3), pp. 673-68 [24] W. B. Joyce, Carrier transport in double-heterostructure active layers, J. Appl. Phys., vol. 53, pp. 7235–7239, 1982. [25] M. Fujita, R. Ushigome and T. Baba, Continuous wave lasing in GaInAsP microdisk injection laser withthreshold current of 40 μA, Electron. Lett. 36, 790-791 (2000). | |
| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/41120 | - |
| dc.description.abstract | 我們成功的使用磷砷化銦鎵量子井作為主動層材料，製作出直徑為12μm大小的電注入微碟雷射，並量測到模態間距約16μm至18μm，與微碟的尺寸符合來證實為迴音廊模態。此外，我們也進行變溫量測，以觀察並討論到量子井和模態紅移的現象。
在本篇論文中，我們主要對於兩種樣品製程作比較。一為過去所使用的乾式及濕式蝕刻製程，另一樣品則在兩者之間多加入一次濕式蝕刻，對於主動層側向暴露的表面做處理，嘗試去減少外圍的缺陷原子層。 對於未經濕蝕刻表面處理的量子井微碟雷射其78K 的臨界電流為53.7μA，Q 值約為4400，可操作到最高溫度為250K，該溫度臨界電流為765.9μA，其特徵溫度為49K。而經濕蝕刻表面處理的量子井微碟雷射78K 的臨界電流為83μA，Q 值為3650，能操作到最高溫度為225K，臨界電流為618.5μA，其特徵溫度為68K。 最後，探討了由於蝕刻支柱寬度對臨界溫度的影響。 | zh_TW |
| dc.description.provenance | Made available in DSpace on 2021-06-14T17:18:18Z (GMT). No. of bitstreams: 1 ntu-100-R98941100-1.pdf: 1933298 bytes, checksum: 296e96383d53431bf8ab51b3a5a68b57 (MD5) Previous issue date: 2011 | en |
| dc.description.tableofcontents | 致謝 I
中文摘要 III Abstract IV 目錄 VI 圖目錄 VIII 表目錄 XII 第一章 序論 1 1.1半導體雷射簡介 1 1.2研究動機 3 1.3內容簡介 6 第二章 元件理論簡介 7 2.1微碟雷射與迴廊原理簡介 7 2.2品質因子(Quality factor) 10 2.3量子井(Quantum Well) 11 第三章 元件製作與量測架構 14 3.1樣品磊晶結構 14 3.2電注入式微碟雷射製作流程 14 第四章 量測方法、結果與討論 25 4.1實驗量測架構 25 4.2電注入量子井量測頻譜 26 4.3電注入式量子井微碟雷射前置量測作業 27 4.4未經濕蝕刻表面處理量子井微碟雷射之電注入量測 28 4.5經濕蝕刻表面處理後量子井微碟雷射之電注入量測 37 4.6分析探討及結論 43 第五章 總結 47 5.1論文回顧及展望 47 參考文獻 48 | |
| dc.language.iso | zh-TW | |
| dc.subject | 電注入 | zh_TW |
| dc.subject | 量子井 | zh_TW |
| dc.subject | 微碟雷射 | zh_TW |
| dc.subject | current-injected | en |
| dc.subject | quantum well | en |
| dc.subject | microdisk laser | en |
| dc.title | 1.55微米電流注入式量子井微碟雷射 | zh_TW |
| dc.title | 1.55 μm Current-injected Quantum-well Microdisk Lasers | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 99-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 林浩雄,彭隆瀚,王智祥 | |
| dc.subject.keyword | 量子井,電注入,微碟雷射, | zh_TW |
| dc.subject.keyword | quantum well,current-injected,microdisk laser, | en |
| dc.relation.page | 52 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2011-08-11 | |
| dc.contributor.author-college | 電機資訊學院 | zh_TW |
| dc.contributor.author-dept | 光電工程學研究所 | zh_TW |
| 顯示於系所單位： | 光電工程學研究所 | |
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