高精度主動式抗震及恆溫控制之小型環境箱研製

Abstract

有鑑於微奈米技術的發展，無論是量測或加工過程都需要一個穩定的環境，來提高精度與良率，環境之控制包含了溫度與振動控制這兩個重要的關鍵。因此，本研究研製一套小型之恆溫、抗震的環境箱，提供微奈米量測或加工之用。 本研究成功的研製出一分離式小型環境箱，搭配半導體製冷晶片作為製冷元件，能夠有效降低製冷元件所造成之振動，也能有效的控制溫度。主動式振動隔振系統，包含了自行研發之光學式加速度計與VCM致動器。利用市售之DVD光學讀取頭作為感測元件，搭配感震質量結構，完成光學式加速度計；利用市售喇叭單體改制成所需之VCM致動器，以並聯方式將彈簧元件與VCM致動器結合成隔振致動器，整合光學式加速度計與隔振致動器，研製出主動式振動隔振模組。本研究所提出恆溫、抗震之小型環境箱皆自行開發，不僅能有效降低成本，也能提供微奈米研究領域之使用。

With the progress of Hi-Tech industry, the products have already reached the level of micro/nano-meter. During the processing or measuring course of micro/nanotechnology, we must consider the environmental effect that have a fundamental influence on the temperature and vibration control. The aim of this thesis is to develop a mini-environment chamber with high precision active vibration isolation and constant temperature control. The environment chamber is designed as the separation type that can separate the operational vibration from the cooling chamber. The temperature of the chamber is controlled by the thermoelectric cooling units. The temperature control method employs the PI control. This design can not only reduce the vibration from the cooling elements but also obtain the good constant temperature control of chamber. The active vibration isolation system consists of the active vibration isolation unit, spring and platform. The main components of the active vibration isolation unit are the self-developed optical accelerometer, and VCM actuator. In this system, the commercial DVD pickup head is used as the sensor which combines the special designed seismic structure to form an optical accelerometer. The voice coil motor (VCM) is taken from the loudspeaker as the actuator that paralleled with the spring to form an anti-vibration actuator. The optical accelerometer and anti-vibration actuator are integrated into an active vibration isolation unit. Moreover, the vibration control algorithm employs the optimal independent modal space control (Optimal IMSC) to obtain optimal feedback force command. The mini environment chamber with the high precision active vibration isolation and constant temperature control is developed in this work. This innovation not only reduces the cost but also benefits further researches in the field of micr/nano-meter.