TSM振盪器應用於生化感測之研究

Abstract

本論文主要主題為研究TSM之特性，目的在建立一組TSM共振器分析模式，以供日後相關設計研發上的參考及應用。 目前模擬TSM共振器，尤其是QCM之模式主要為TLM、BVD或EBVD等效電路。在本文中我們利用一種新的分析模式-TWSF，此模式不但能夠找出各參數之間的關係，並且利用此模式所建立的TSM分析方法，非常便利。利用此方法可找出駐波相位差角度，利用相位差與負載物之阻抗，就能夠簡單計算出共振頻率的飄移與導納響應大小值。在本文中並利用此方法推導並簡化出QCM受馬克斯威廉流體、黏彈性液體負載之頻率飄移、導納響應大小之公式。

The main subject of this thesis is to study the characteristic of TSM and to set up an analyzing model of TSM resonator for design and applications. At present, TLM, BVD or EBVD equivalent circuit have been applied on TSM resonator, especially for QCM. We utilize a kind of new analytic way-TWSF in this article. This method is need to find out the correlation between each parameter, for more accurate and convenient. Utilizing this analytic way standing shear wave phase angle shift can be calculated. The shift of resonant frequency and admittance response can also be calculated by the phase shift and loading impedance. In addition, this model is used to derive the formulas of frequency shift and admittance while the loading are the Maxwellian fluid or the viscoelastic fluid.