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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
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dc.contributor.advisor | 陳炳煇(Ping-Hei Chen) | |
dc.contributor.author | Ya-Wei Deng | en |
dc.contributor.author | 鄧雅薇 | zh_TW |
dc.date.accessioned | 2021-06-13T16:47:14Z | - |
dc.date.available | 2006-07-04 | |
dc.date.copyright | 2005-07-04 | |
dc.date.issued | 2005 | |
dc.date.submitted | 2005-06-28 | |
dc.identifier.citation | Fürjes, P., Légrádi, G., Dücső, Cs., Aszódi, A., and Bársony, I., 2004, “Thermal characterisation of a direction dependent flow sensor,” Sensors and Actuators A, 115, pp. 417-423.
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dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/38809 | - |
dc.description.abstract | 本論文主要的研究內容是以CMOS製程為基礎之流速感測器開發,主要應用在監測散熱模組中流場的速度,以觀察散熱模組是否無法達到足夠的散熱效果。此流速感測器結構與信號處理電路之大小為2 mm2,其結構包含一個位於感測器中央之微加熱器、以及四邊圍繞以熱電耦組成之溫度感測器,當給予電壓時,加熱器中心產生一個漂浮的熱氣團,一旦有外界的氣流擾動,此氣團會隨著氣流漂移,造成加熱器四周之溫度感測器感受到不同的溫度,藉由熱電耦的原理,X方向與Y方向之溫度感測器產生溫度差而輸出電壓差值,依據電壓值大小可達到量測氣流流速的目的。本研究針對自然對流問題、傾斜角度問題做出探討,也克服了此結構本身外封裝邊緣產生的效應,找出其最佳的角度應用範圍,以及電壓與氣流流速間之關係。此流速感測器之敏感度可達到0.7 mV/ (m/s),速度量測解析度為0.001 m/s,輸出電壓與流速之間亦具有相當線性之量測結果,此流速感測器之流速量測範圍約為0.1 m/s到3.6 m/s之間。 | zh_TW |
dc.description.abstract | The study develops an integrated CMOS flow sensor applied in monitoring the flow condition in thermal module. The flow sensor has a high resolution in low speed air flow field. This sensor includes micro structures and mixed signal processor in 2 mm square chip die size fabricated by the standard CMOS process. The microstructures of sensor consist of a polysilicon micro heater and the thermopiles array. The center micro heater encircled by the temperature sensors generates the thermal plume. As the sensor is positioned against the flow, the thermal plume will be pushed towards to the temperature sensors array and the temperature difference can be converted into the voltage to determine the air flow speed. The flow sensors arrayed in four sides gives both output voltages in x-direction and y-direction, and the sensor makes splendid accomplishments as it is operated under impinging flow. Combining signal output from two perpendicular sensors, the module can make three components of velocity measurement. The sensitivity of the flow sensor can be indicated as 0.7 mV/ (m/s) under impinging flow and 0.001 m/s velocity measurement resolution is achieved. The air flow speed ranges from 0.1 to 3.6 m/s. | en |
dc.description.provenance | Made available in DSpace on 2021-06-13T16:47:14Z (GMT). No. of bitstreams: 1 ntu-94-R92522107-1.pdf: 1379486 bytes, checksum: 79b778b4c9b20d7290ac438eeada6c6f (MD5) Previous issue date: 2005 | en |
dc.description.tableofcontents | Acknowledgement I
中文摘要 III Abstract IV Table of Contents VI List of Tables VIII List of Figures IX Chapter 1 Introduction 1 1.1 Flow Sensor Applications 1 1.2 Literature Survey 4 1.2.1 Flow sensors based on MEMS and CMOS process 4 1.2.2 Hot-wire and hot-film flow sensors 6 1.2.3 Calorimetric flow sensors 7 1.2.4 Time-of-flight flow sensors 9 1.3 Motivation and Objectives 10 1.4 Thesis Organization 11 Chapter 2 Structures and Operating Principle 13 2.1 Structures of the CMOS flow sensor 13 2.2 Operating Principle of the CMOS flow sensor 13 Chapter 3 Experimental Apparatus and Procedures 15 3.1 Experimental apparatus 15 3.2 Experimental procedures 17 3.2.1 Leveling of CMOS flow sensor 19 3.2.2 Measurement in low flow speed based on the thermal module 19 3.2.3 Measurement of high flow speed 21 3.2.4 Monitor the flow condition of thermal module 21 Chapter 4 Experimental Results and Discussions 23 4.1 Leveling of CMOS flow sensor 23 4.2 Measurement of low flow speed based on the thermal module 25 4.2.1 Effect of parallel flow 25 4.2.2 Effect of impinging flow 26 4.3 Measurement of high flow speed 31 4.4 Monitor the flow condition of thermal module 33 4.5 Analysis of measurement error 34 4.5.1 Measurement instrument error 34 4.5.2 Working error 34 4.5.3 Transfer error 35 Chapter 5 Conclusions and Future Prospects 38 References 74 | |
dc.language.iso | en | |
dc.title | 高解析度之新型CMOS流速感測器之開發與研究 | zh_TW |
dc.title | Development of a Novel High Resolution CMOS Flow Sensor | en |
dc.type | Thesis | |
dc.date.schoolyear | 93-2 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 陳瑤明(Yau-Ming Chen),李達生(Da-Sheng Lee) | |
dc.subject.keyword | CMOS流速感測器,微加熱器,熱電耦,熱氣團,速度量測解析度, | zh_TW |
dc.subject.keyword | CMOS flow sensor,Polysilicon micro heater,Thermopiles array,Thermal plume,Velocity measurement resolution, | en |
dc.relation.page | 76 | |
dc.rights.note | 有償授權 | |
dc.date.accepted | 2005-06-28 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 機械工程學研究所 | zh_TW |
顯示於系所單位: | 機械工程學系 |
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