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http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/38299完整後設資料紀錄
| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 范光照 | |
| dc.contributor.author | Chi-Duen Lin | en |
| dc.contributor.author | 林器躉 | zh_TW |
| dc.date.accessioned | 2021-06-13T16:29:49Z | - |
| dc.date.available | 2005-07-19 | |
| dc.date.copyright | 2005-07-19 | |
| dc.date.issued | 2005 | |
| dc.date.submitted | 2005-07-12 | |
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| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/38299 | - |
| dc.description.abstract | 干涉顯微技術一般常應用於量測靜態與動態之特性。光干涉技術的優點為快速、非破壞及非接觸性質，且可提供高密度之橫向量測解析能力，且對表面垂直方向具優良之解析度。目前微機電系統(MEMS)已快速朝向商業化，影響其元件動態特性之主要因素在於元件設計及製造，尤其全域式光動態干涉量測技術，對於元件動態特性之檢測與分析工作，將變得相當重要。
本研究將深入探討各種光干涉顯微動態量測方法。同時研製出一套閃頻式光干涉顯微動態量測儀之實驗系統，作全域式動態量測。本研究之量測樣品為AFM探針(或稱微懸臂梁)，量測其共振頻率之模態，同時使用ANSYS有限元素法作理論動態模擬分析。閃頻動態量測之原理，在於促使白光之閃頻動作與微懸臂梁之振動頻率精準地同步，使干涉條紋獲得鎖住，所獲干涉影像之對比度接近靜態量測一樣之品質，同時再配合延遲電路，以進行不同時間之動態模態量測。三維重建技術則是採用垂直掃描法，本系統之動態量測橫向解析及垂直解析，可分別逹到1μm及1nm等級。實驗之動態量測測頻寬已達到1.067MHz，而預期可以逹到2MHz，量測振幅範圍可達數十微米以上。此動態量測系統之成功研製，使國內閃頻式光干涉動態量測技術已超越目前國際之水準。 | zh_TW |
| dc.description.abstract | A dynamic 3-D profilometer with nano-scale measurement resolution was successfully developed using stroboscopic illumination and white-light vertical scanning techniques. Microscopic interferometry is a powerful technique for static and dynamic characterization of micro electromechanical systems (MEMS). The optical interferometry technique is quick, non-destructive, non-contact, and can offer a high density lateral resolution with excellent depth measurement sensitivity. As MEMS devices move rapidly towards commercialization, the issue of accurate dynamic characterization has emerged as a major challenge in their design and fabrication process.
In view of this need, previous theory of various optical interferometry systems and technologies for dynamic 3-D surface profilometry were carefully investigated. Furthermore, a microscopic prototype based on white-light stroboscopic interferometry using vertical scanning principle was developed to achieve dynamic full-field profilometry and characterization of MEMS devices. A micro cantilever beam used in AFM was measured to verify the system capability and use ANSYS to make the dynamic simulation analysis of the theory. Using the developed measurement system, the measurement bandwidth can reach a vibration resonant frequency of 1.067 kHz or higher. The MEMS systems or component can be fully characterized with a lateral resolution up to 1 μm and a vertical measurement resolution up to 1 nm, as well as tens micrometers of vertical measurement range can be achieved. Evaluated on the performance of the stroboscopic light and control unit, it confirmed that the dynamic measurement frequency bandwidth of the developed system can reach up to 2MHz or higher. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-13T16:29:49Z (GMT). No. of bitstreams: 1 ntu-94-R92522705-1.pdf: 6321180 bytes, checksum: 3a31f99ef3b130b952a490b31290501e (MD5) Previous issue date: 2005 | en |
| dc.description.tableofcontents | 第一章 緒論 13
1-1 前言 13 1-2 動機與目的 14 1-3 研究之創新性 15 1-4 論文之架構 17 第二章 文獻回顧 18 2-1 動態量測之文獻 18 2-2 光干涉原理之概說 18 2-3 都卜勒振動量測 20 2-4 全像術動態量測 24 2-4-1 全像干涉術與動態量測之關係 24 2-4-2 全像干涉術之理論分析 25 2-4-3 即時全像干涉(Real-time method) 25 2-4-4 雙重曝光之全像干涉(Double exposure method) 27 2-4-5 時間平均之全像干涉(Time-averaged method) 29 2-5 電子斑點動態量測 31 2-5-1 電子斑點之文獻分析 31 2-5-2 電子斑點量測 38 2-6 白光時間平均法動態量測 40 2-7 閃頻(LED)動態量測 46 2-8 脈衝雷射動態量測 52 2-9 動態量測方法之文獻探討之結論 54 2-10動態量測之專利探討 59 2-11商業系統之規格比較 61 2-11-1 現今振動量測系統產品之規格調查 61 2-11-2 本章結論 64 第三章 系統架構與規格解析 65 3-1 實驗系統架構 65 3-1-1 系統之光路設計概念 65 3-1-2 實際實驗之系統圖 70 3-2 SNU干涉儀系統規格 71 3-2-1 光圈(Aperture) 72 3-2-2 壓電驅動器(PZT) 72 3-2-3 光電耦合器裝置Charged Couple Device(CCD) 73 3-2-4 物鏡(Objective magnification)模組 74 3-3 閃頻光源(Stroboscopic Light Source) 75 3-3-1 閃頻之詳細規格 76 3-3-1-1 定電流高速閃頻控制器 76 3-3-1-2 白光光源 76 3-3-1-3 超明亮LED之頻譜 76 3-3-1-4 超明亮LED之尺寸 79 3-4 量測樣品:微懸臂梁(Micro cantilever beam)之規格 80 第四章 閃頻動態三維量測技術 83 4-1 閃頻動態量測之技術 83 4-2 共振模態之干涉現象 83 4-3 閃頻之同步技術 84 4-4 動態三維輪廓演算法 87 4-4-1 步階式相移法(PSI) 87 4-4-2 白光垂直掃描技術(VSI) 93 4-4-2-1 干涉條紋掃描法 93 4-4-2-2 垂直掃描基本原理 94 4-4-3 動態三維演繹法之結論 97 4-5 動態理論模擬方法 98 4-5-1 電腦輔助分析軟體ANSYS 98 4-5-2 ANSYS之基本架構 99 第五章 實驗結果與分析 102 5-1 實驗結果與分析 102 5-2 動態量測實驗之架設 102 5-3 微懸臂梁(Contact Mode)理論分析之結果 103 5-4 微懸臂梁(Contact Mode)量測實例與結果 105 5-4-1 微臂梁靜態量測結果 105 5-4-2 微臂梁振動量測結果 106 5-5 微懸臂梁(Tapping Mode)理論分析與量測結果 127 5-5-1 微臂梁(Tapping Mode)之理論共振頻率 127 5-5-2 微臂梁(Tapping Mode)振動量測結果 127 5-6 實驗結果分析 132 第六章 結論與未來發展方向 132 6-1 結論 132 6-2 未來發展方向 136 6-2-1 實驗量測之最佳化分析與模擬 136 6-2-2 提升動態量測之頻寬 136 6-2-3 三維輪廓演算法 137 6-2-4 量測精度之驗正 138 參考文獻 139 圖表目錄 圖2-1 楊氏雙狹縫干涉實驗 19 圖2-2 Michelson 干涉儀 20 圖2-3 單光束組態 21 圖2-4 雙光束組態 21 圖2-5 Ono Sokki之振動儀光路示意圖 23 圖2-6 全像干涉術架構示意圖 24 圖2-7 雷射所產生之散斑點 32 圖2-8 客觀散斑 33 圖2-9 主觀散斑 33 圖2-10 電子斑點圖形干涉儀示意圖 35 圖2-11 散斑照像干涉術與電子斑點圖形干涉術比較 36 圖2-12 量測振動物體模態電子斑點圖形干涉示意圖 38 圖2-13 AF-ESPI面外振動量測之光學架設系統 39 圖2-14 時間平均法之系統架構 41 圖2-15 Bessel function J0和時間平均法之對比圖(1/4圖) 44 圖2-16 時間平均法對Cr懸臂梁之振動干涉圖 44 圖2-17 閃頻量測之原理 46 圖2-18 閃頻量測系統之架構 49 圖2-19 閃頻動態量測(Cr membrane f=496.8KHz)三維振動模態 51 圖2-20 閃頻動態量測(Al cantilever f=750KHz)振動模態 51 圖2-21 閃頻動態量測(Al cantilever f=1.912KHz)振動模態 51 圖2-22 實驗系統架構圖 52 圖2-23 量測樣品為微懸臂梁量測圖 52 圖2-24 閃頻(Laser)動態量測之系統圖 53 表2-1 動態研究作者群之整理表 54 表2-2 各程動態量測方法之優缺點 57 圖2-25 專利系統架構圖 60 圖2-26 Fogale產品圖 61 圖2-27 量測之樣品 61 圖2-28 Wyko NT1100系統圖 62 圖2-29 Polytec產品圖 63 圖2-30 量測之樣品 63 圖3-1 系統之光路設計概念圖 66 圖3-2 Mirau干涉儀簡圖 69 圖3-3 實際動態量測系統圖 70 圖3-4 韓製SNU SIS-100系統 71 圖3-5 系統光圈(Nikon) 72 圖3-6 PZT驅動器 72 表3-1 CCD規格及特徵 73 表3-2 物鏡規格 74 圖3-7 物鏡模組 74 圖3-8 LED閃頻之電路圖 75 圖3-9 白光之頻譜 77 圖3-10 單色光之頻譜 77 圖3-11 光源在350mA操作溫度之特性 78 圖3-12 LED尺寸圖 79 圖3-13 LED閃頻器 79 圖3-14 AFM探針(cantilever)之尺寸及材料特性 80 圖3-15 AFM探針(cantilever Contact Mode)之規格尺寸表 81 圖3-16 AFM探針(cantilever Tapping Mode)之規格尺寸表 81 圖3-17 AFM探針(cantilever)之三視圖尺寸 82 圖3-18 AFM探針座安裝圖 82 圖4-1 閃頻動態量測之信號示意圖 83 圖4-2 懸臂梁之共振模態干涉條紋圖 84 圖4-3 控制同步信號之方法 85 圖4-4 三台信號產生器之同步信號示意圖 86 圖4-5 常用之四種相移機構 89 圖4-6 干涉條紋掃描法示意圖 94 圖4-7 干涉顯微鏡架構圖 96 圖4-8 垂直掃描之示意圖 96 圖4-9 電腦輔助工程分析的軟體程式ANSYS介面 101 圖5-1 實驗系統之詳細架構與規格說明圖 103 表5-1 共振頻率的理論計算值 103 圖5-2 ANSYS軟體所計算出之懸臂梁之前五共振頻率值 104 圖5-3 ANSYS軟體模擬出之懸臂梁之前四個共振模態 104 圖5-4 懸臂梁之靜態量測結果圖 105 圖5-5 動態量測之同步訊號示意圖 106 圖5-6 懸臂梁第一共振干涉條紋之變化 107 圖5-7 懸臂梁第一共振之振動二維模態圖 108 圖5-8 懸臂梁第一共振之三維振動模態圖 109 圖5-9 懸臂梁第一共振理論與實際量測之比較圖 114 圖5-10懸臂梁第二共振干涉條紋之變化 115 圖5-11懸臂梁第二共振之三維振動模態圖 116 圖5-12懸臂梁第二共振理論與實際量測之比較圖 117 圖5-13懸臂梁第三共振干涉條紋之變化 118 圖5-14懸臂梁第三共振之三維振動模態圖 119 圖5-15懸臂梁第三共振理論與實際量測之比較圖 120 圖5-16懸臂梁第四共振干涉條紋之變化 121 圖5-17懸臂梁第四共振之三維振動模態圖 122 圖5-18懸臂梁第四共振理論與實際量測之比較圖 123 圖5-19懸臂梁第五共振干涉條紋之變化 124 圖5-20懸臂梁第五共振之三維振動模態圖 125 圖5-21懸臂梁第五共振理論與實際量測之比較圖 126 表5-2 AFM探針(Contact Mode)實驗結果與理論值之比較 126 表5-3 (Tapping Mode)共振頻率的理論計算值 127 圖5-22 (Tapping Mode)第一共振三維模態圖 128 圖5-23 (Tapping Mode)第一共振模態圖 129 圖5-24 (Tapping Mode)第二共振三維模態圖 130 圖5-25 (Tapping Mode)第二共振模態圖 131 表5-4 AFM探針(Tapping Mode)實驗結果與理論值之比較 131 表6-1 動態量測技術之比較分析 135 圖6-1 未來發展動態量測實驗架設示意圖 137 參考文獻 139 | |
| dc.language.iso | zh-TW | |
| dc.title | 閃頻式光干涉動態量測系統之研製 | zh_TW |
| dc.title | Research and development of dynamic 3D measurement using stroboscopic interferometric microscopy | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 93-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 陳亮嘉,許覺良 | |
| dc.subject.keyword | 輪廓動態量測,光學干涉儀,閃頻干涉術,微機電系統, | zh_TW |
| dc.subject.keyword | Dynamic 3-D profilometry,optical interferometry,stroboscopic interferometry,micro-electromechanical system (MEMS), | en |
| dc.relation.page | 147 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2005-07-13 | |
| dc.contributor.author-college | 工學院 | zh_TW |
| dc.contributor.author-dept | 機械工程學研究所 | zh_TW |
| 顯示於系所單位： | 機械工程學系 | |
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