在伽瑪射線照射鈮酸鋰基板上研製脊形方向耦合器

Hsin-Shun Huang; 黃新舜

請用此 Handle URI 來引用此文件： http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/38140

完整後設資料紀錄

DC 欄位	值	語言
dc.contributor.advisor	王維新
dc.contributor.author	Hsin-Shun Huang	en
dc.contributor.author	黃新舜	zh_TW
dc.date.accessioned	2021-06-13T16:26:56Z	-
dc.date.available	2020-12-31
dc.date.copyright	2011-07-27
dc.date.issued	2011
dc.date.submitted	2011-07-19
dc.identifier.citation	[1] J. T. Boyd, Integrated Optics – Devices and Applications, IEEE Press, 1991. [2] R. G. Hunsperger, Integrated Optics: Thoery and Technology 5th Ed., Springer-Verlag , 2002. [3] H. Nishihara, M. Haruna, and T. Suhara, Optical Integrated Circuits, McGraw – Hill, 1985. [4] I. Andonovic and D. Uttamchandnni, Principles of Modern Optical Systems, chap. 10, Artech House, 1989 [5] E. Voges and A. Neyer, “Integrated-optic devices on LiNbO3 for optical communication,” J. lightwave tech., vol. 5, pp. 1129-1238 [6] G. J. Griffiths and R. J. Esdaile,“Analysis of titanium-diffused planar optical waveguides in lithium niobate,” IEEE J. Quantum Electron., vol. 20, no. 2, pp. 149-159, 1984. [7] P. K. Wei and W. S. Wang, “Fabrication of lithium niobate optical channel waveguides by nickel indiffusion,“ Microwave and Opt. Tech. Lett., vol. 7, pp.219-221, 1994. [8] Y. P. Liao, D. J. Chen, R.C. Lu, and W. S. Wang, “Nickel-indiffused lithium niobate optical waveguide with process-dependent polarization,” IEEE Photon. Tech. Lett., vol. 8, pp. 548-550, 1996. [9] 黃文宏，「鎵擴散式鈮酸鋰光波導特性之研究」，國立台灣大學光電工程學研究所博士論文，2008年 [10] K. Nassau, H. J. Levinstein, and G. M. Loiacono, “The domain structure and etching of ferroelectric lithium niobate,” Appl. Phys. Lett., vol. 6, pp. 228-229, 1965 [11] C. L. Lee and C. L. Lu, “CF4 plasma etching on LiNbO3,” Appl. Phys. Lett., vol. 35, pp. 756-758, 1979. [12] Y. Ohmachi and J. Noda, “Electro-optic light modulator with branched ridge waveguide,” Appl. Phys. Lett., vol. 27, pp. 544-546, 1975. [13] I. P. Kaminow and V. Ramaswamy, “Lithium niobate ridge waveguide modulator,” Appl. Phys. Lett., vol. 24, pp. 622-624, 1974. [14] F. Laurell, J. Webjorn, G. Arvidsson, and J. Holmberg, “Wet etching of proton-exchanged lithium niobate-a novel processing technique,” J. Lightwave Tech., vol. 10, pp. 1606-1609, 1992. [15] 張家豪，「以伽瑪射線及質子交換濕式蝕刻法研製脊型鈮酸鋰光波導」，國立台灣大學電子工程學研究所碩士論文，2009年 [16] W. H. Hsu, K. C. Lin, J. Y. Li, Y. S. Wu, and W. S. Wang, “Polarization splitter with variable TE-TM mode converter using Zn and Ni codiffused LiNbO3 waveguides,” IEEE J. Sel. Topics Quantum Electron, vol. 11, no. 1, pp. 271-277 Jan./Feb. 2005. [17] R. S. Cheng, T. J. Wang, and W. S. Wang, “Wet-etched ridge waveguides in y-cut lithium niobate,” J. Lightwave Tech., vol. 15, pp.1880-1887, 1997. [18] S.J. Chang, C.L.Tsai, Y. B. Lin, J. F. Liu, and W. S. Wang, “Improved electrooptic modulator with ridge structure in X-cut LiNbO3,” J. Lightwave Tech., vol. 17, pp. 843-847,1999. [19] M. N. Armenise, Fabrication techniques of lithium niobate waveguides,”IEEE Proceedings, vol. 135, pp.85-91, 1988. [20] C. S. Lau, P. K. Wei, C. W. Su, and W. S. Wang, “Fabrication of strip load outdiffusion guides on lithium niobate substrate,”Microwave and Optical Technol. Lett., vol. 5, no.7, pp.309-313, 1992. [21] C.S. Lau, S.F. Liu, P. K. Wei, and W.S. Wang,”A Mach-Zehnder interferometer made of strip-loaded outdiffusion guide, Microwave and Optical Technol. Lett. Vol. 12, pp. 611-613, 1992. [22] V. M. N. Passaro, M. N. Armenise, D. Nedheva, and E. Y. B. Pun,”LiNbO3 optical waveguides formed in a new proton source”J. Lightwave Tech., vol.20, pp.71-77, No.1, 2002. [23] 魏培坤，「金屬擴散式鈮酸鋰光波導之製造及應用」，國立台灣大學電機工程研究所博士論文，1994年 [24] C. S. Lau, P. K. Wei, C. W. Su, and W. S. Wang,“Fabrication of magnesium-oxide-induced lithium outdiffusion waveguides,”IEEE Photon. Tech. Lett., vol. 4 , No.8, pp. 872-875,1992. [25] R. V. Schmidt and I. P. Kaminow, “Metal-diffused optical waveguides in LiNbO3,”Appl. Phys. Lett., vol. 25, no. 8, pp.458-460, Oct.1974. [26] B. Herrerros and G. Lifante, “LiNbO3 optical waveguides by Zn diffusion from vapor phase,” Appl. Phys. Lett., vol.66, no.20, pp. 1449-1451, 1995. [27] J. J. Aubert, M. Couchaud, and C. Calvat,“Characterization of lithium niboate by γ-ray diffraction,”J. of Crystal Growth,vol.79,pp.530-533, 1986. [28] 賴政治，「伽瑪射線對光波導特性之研究」，國立台灣大學光電工程學研究所博士論文，2006年 [29] K. Noguchi, O. Mitomi, K. Kawano, and M. Yanagibashi, “Highly efficient 40GHz bandwidth Ti- LiNbO3 optical modulator employing ridge structure, ” IEEE Photon. Technol. Lett., vol. 5, pp. 52-54, 1993. [30] S. J. Al-Bader, “Application of etched grooves in integrated-optics channel isolation,” IEEE Photon Technol. Lett., vol. 8, pp. 1044-1046, 1996. [31] H. Haga, M. Izutsu, and T. Sueta, “LiNbO3 traveling-wave length modulator/switch with an etched groove,” IEEE J. Quantum Electron., vol. 6, pp. 902-906, 1986. [32] A. Sugita, K. Jingui, N. Takato, K . Katoh, and M. Kawachi, “Bridge-suspended silica-waveguide thermo-optic phase shifter and its application to Mach-Zehnder type optical switch,” IEEE Trans. IEICE E. Vol. 73, pp. 105-108, 1990. [33] I. P. Kaminow and V. Ramaswamy, “Lithium niobate ridge waveguide modulator,” Appl. Phys. Lett., vol. 27, pp. 622-624, 1975. [34] Y. Ohmachi, and J. Noda, “Electro-optic light modulator with branched ridge waveguide,” Appl. Phys. Lett., vol. 27, pp.544- 546,1975. [35] C. L. Lee and C. L. Lu,“CF4 plasma etching on LiNbO3 ,” Appl. Phys. Lett., vol. 35, pp.756-758, 1979. [36] J. L. Jackel, R. E. Howard, E. L. Hu, and S. P. Lyman, “Reactive ion etching of LiNbO3 ,” Appl. Phys. Lett., vol. 38, pp. 907-909, 1981. [37] N. Niizeki, T. Yamada, and H. Toyota, “Growth ridges, etched hillocks, and crystal structure of lithium niobate,” J. J. Appl. Phys., vol. 6, No. 3, pp. 318-327,1967. [38] F. Laurell, J. Webjorn, G. Arvidsson, and J. Holmberg, “Wet etching of proton-exchanged lithium niobate-a novel processing technique, ” J. Lightwave Tech., vol. 10, pp. 1606-1609, 1992. [39] 丁天倫，「改良式鈮酸鋰脊形光波導之特性與應用」，國立台灣大學光電工程學研究所博士論文，2006年 [40] Y. N. Korkishko,V. A. Fedorov, M. P. De Micheli, P. Baldi, K. El Hadi, and A. Leycuras, “Relationships between structure and optical properties of proton-exchanged waveguides on z-cut lithium niobate, ”Appl. Opt., vol. 35, No. 36, pp. 7056-7060, 1996. [41] N. Goto and G. L. Yip, “Characterization of proton-exchange and annealed LiNbO3 waveguides with pyrophosphoric acid,” Appl. Opt., vol. 28, No. 1, pp.60-65, 1989. [42] K. Yamamoto and T. Taniuchi, “Characteristics of pyrophosphoric acid proton-exchanged waveguides in LiNbO3,” J. Appl. Phys., vol. 70, No. 11, pp. 6663-6668, 1991 [43] E. Y. B. Pun, S. A. Zhao, and P. S. Chung, “Proton-exchange LiNbO3 optical waveguides using stearic acid,” IEEE Photon. Tech. Lett., vol. 3, No.11, pp. 1006-1008, 1991. [44] Y. S. Son, H. J. Lee, Y. K. Jhee, S. Y. Shin, and B. G. Kim, “Fabrication of LiNbO3 channel waveguides using water,” IEEE Photon. Tech. Lett., vol. 4, No.5, pp. 457-459, 1992. [45] I. E. Barry, G. W. Ross, P. G. R. Smith, and R. W. Eason, “Ridge waveguides in lithium niobate fabricated by differential etching following spatially selective domain inversion,” A. Phys. Lett., vol 74, pp. 1487-1488, 1999. [46] K. Nassau, H. J. Levinstein, and G. M. Loiacono, “The domain structure and etching of ferroelectric lithium niobate,” Appl. Phys. Lett., vol. 6, pp. 228-229, 1965 [47] T.-J. Wang, C.-F. Huang, W.-S. Wang, and P.-K. Wei, “A novel wet-etching method using electric-field-assisted proton exchange in LiNbO3,“ J. Lightwave Tech., vol.22, pp.1764-1771, 2004. [48] T.-L. Ting, L.-Y. Chen, and W.-S. Wang, “A novel wet-etching method using joint proton source in LiNbO3,” IEEE Photon. Tech. Lett., vol.18, pp.568-570, 2006. [49] Y. N. Korkishko and V. A. Fedorov, “Structural phase diagram of HxLi1-xNbO3 waveguides: the correlation between optical and structural properties,” IEEE J. Sel. Topics Quantum Electron., vol. 2, no. 2, pp. 187-196, 1996. [50] 蔡英哲，「伽瑪射線照射鈮酸鋰脊形馬赫任德電光調變器之研製」，國立台灣大學電子工程學研究所碩士論文，2010年 [51] 許佩蘭，「脊形電光調變器之設計與製作」，國立台灣大學電子工程學研究所碩士論文,，2006年 [52] R. C. Alferness, “Waveguide eletrooptic modulator,” IEEE Trans. Microwave Theory Tech., vol. MTT-30, No. 12, pp. 20776-2079, Dec.1993. [53] 陳亮吟，「紫外光照射高分子光波導元件之研製」，國立台灣大學光電工程研究所碩士論文，2007年 [54] S. Fouchet, A. Carenco, C. Daguet, R. Guglielmi, and L. Rivere, “Wavelength dispersion of Ti-induced refractive index change in LiNbO3 as a function of diffusion parameters,” J. Lightwave Tech., vol.5(5), pp.700-708, May 1987.
dc.identifier.uri	http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/38140	-
dc.description.abstract	本論文探討伽瑪射線照射鈮酸鋰基板製作脊形光波導，藉以改善脊形外觀結構，並研究其對光場及電光調變特性的影響。在脊形結構製作方面，使用純苯甲酸及含有已二酸之混合酸兩種不同質子酸源，在相同條件下利用氫氟酸與硝酸之混合酸進行溼式蝕刻，以完成脊形結構。同時，亦在相同的伽瑪射線照射劑量下，比較不同質子酸對脊形結構所造成的影響，以及比較不同的伽瑪射線照射劑量對脊形外觀的變化。實驗數據顯示採用伽瑪射線照射162.5krad且以純苯甲酸作為質子酸源之組合，在蝕刻8小時後，可獲得脊形的深度為4.472μm，深寬比為1.3。在元件應用上，以製作脊形結構方向耦合器為例，實驗結果顯示經伽瑪射線照射過之元件可縮短耦合長度8.2%，表示耦合效應因伽瑪射線照射而增強。在電光調變部份顯示其半波電壓降低37.94%，訊熄比提高46.54%。證實伽瑪射線可有助於鈮酸鋰積體光學元件之改善。	zh_TW
dc.description.abstract	In this thesis, ridge waveguides are fabricated by using proton exchange and wet etching in gamma-ray irradiated lithium niobate(LiNbO3). Experimental results show the depths and aspect ratios of ridge structures are all improved, which gives rise to optical fields of higher aspect ratios and electro-optic modulators with better characteristics. The ridge structures are obtained by proton exchange for 8 hr with various acid sources and etched for 8 hr with a mixture of hydrofluoric acid and nitric acid. The deepest depth and the aspect ratio of ridge structure are 4.472μm and 1.3 when the dosage of gamma-ray irradiation is 162.5krad. Moreover, the coupling length is shortened by 8.2% when a ridge-type directional coupler is fabricated with gamma-ray irradiated lithium niobate, which indicates that coupling effect is enhanced due to gamma-ray irradiation. And the half-wave voltage is decreased by 37.94%, and the extinction ratio is increased by 46.54%. Thus, it shows that gamma-ray irradiation is advantageous for the improvement of lithium niobate integrated optical waveguides.	en
dc.description.provenance	Made available in DSpace on 2021-06-13T16:26:56Z (GMT). No. of bitstreams: 1 ntu-100-R98941015-1.pdf: 3282960 bytes, checksum: 0d7c8f1fcaf9321364ed563171909f7b (MD5) Previous issue date: 2011	en
dc.description.tableofcontents	中文摘要--------------------------------------------------I 英文摘要--------------------------------------------------II 目錄--------------------------------------------------------III 附圖目錄--------------------------------------------------V 附表目錄--------------------------------------------------VII 第一章緒論------------------------------------------1 1-1 研究背景------------------------------------1 1-2 研究動機------------------------------------4 1-3 內容簡介------------------------------------6 第二章材料簡介及波導特性--------------------7 2-1 研究目標與架構---------------------------7 2-2 鈮酸鋰簡介---------------------------------7 2-2-1 材料特性------------------------------------7 2-2-2 光學特性------------------------------------10 2-2-3 光波導特性---------------------------------11 2-3 伽瑪射線簡介------------------------------14 2-4 伽瑪射線對光波導之影響--------------21 第三章脊形光波導之製作與特性--------------24 3-1 脊形光波導---------------------------------24 3-2 蝕刻法與質子交換原理簡介-----------25 3-2-1 常見的蝕刻方法---------------------------25 3-2-2 質子交換------------------------------------26 3-2-3 質子交換溼式蝕刻法--------------------29 3-3 脊形結構製作及結果--------------------30 3-3-1 製作流程------------------------------------30 3-3-2 實驗結果討論-----------------------------35 3-4 影響重疊積分值之因素----------------45 3-4-1 重疊積分值--------------------------------45 3-4-2 脊形寬度-----------------------------------45 3-4-3 脊形傾斜角度-----------------------------46 3-4-4 脊形深度-----------------------------------46 3-4-5 脊形的電極設計--------------------------47 第四章方向耦合器之設計及製作-------------49 4-1 光波導耦合原理--------------------------49 4-2 電光調變器原理簡介--------------------53 4-3 元件設計------------------------------------58 4-4 元件製作過程-----------------------------60 4-4-1 晶片切割-----------------------------------62 4-4-2 伽瑪射線照射-----------------------------62 4-4-3 微影術--------------------------------------63 4-4-4 真空鍍膜-----------------------------------64 4-4-5 掀離法與蝕刻法--------------------------67 4-4-6 質子交換-----------------------------------69 4-4-7 濕式蝕刻-----------------------------------70 4-4-8 高溫擴散-----------------------------------70 4-4-9 研磨拋光-----------------------------------71 第五章量測結果與討論--------------------------72 5-1 量測系統架構-----------------------------72 5-2 光場模態之量測--------------------------74 5-3 耦合長度之量測--------------------------77 5-4 調變訊號量測-----------------------------82 第六章結論與未來展望--------------------------84 6-1 結論------------------------------------------84 6-2 未來展望------------------------------------87 附錄A-------------------------------------------------------88 A-1 脊形蝕刻深度與伽瑪照射源使用時間關係88 參考文獻---------------------------------------------------89 中英文對照表---------------------------------------------96
dc.language.iso	zh-TW
dc.subject	訊熄比	zh_TW
dc.subject	輻射吸收劑量	zh_TW
dc.subject	己二酸	zh_TW
dc.subject	外觀比	zh_TW
dc.subject	苯甲酸	zh_TW
dc.subject	雙軸晶體	zh_TW
dc.subject	光耦合器	zh_TW
dc.subject	耦合效應	zh_TW
dc.subject	耦合長度	zh_TW
dc.subject	方向耦合器	zh_TW
dc.subject	電光係數	zh_TW
dc.subject	電光調變器	zh_TW
dc.subject	電光效應	zh_TW
dc.subject	鈦擴散式光波導	zh_TW
dc.subject	鉭	zh_TW
dc.subject	鈦	zh_TW
dc.subject	脊形結構	zh_TW
dc.subject	脊形側壁	zh_TW
dc.subject	脊形深度	zh_TW
dc.subject	放射性活度	zh_TW
dc.subject	質子交換	zh_TW
dc.subject	重疊積分值	zh_TW
dc.subject	脊形光波導	zh_TW
dc.subject	光場	zh_TW
dc.subject	鈮酸鋰	zh_TW
dc.subject	苯甲酸鋰	zh_TW
dc.subject	半波電壓	zh_TW
dc.subject	伽瑪射線	zh_TW
dc.subject	Ti-indiffused optical waveguide	en
dc.subject	electro-optic effect	en
dc.subject	electro-optical modulator	en
dc.subject	extinction ratio	en
dc.subject	gamma ray	en
dc.subject	half-wave voltage	en
dc.subject	lithium benzoate	en
dc.subject	optical field	en
dc.subject	optical ridge waveguide	en
dc.subject	overlap integral	en
dc.subject	proton exchange	en
dc.subject	PE	en
dc.subject	radioactivity	en
dc.subject	ridge depth	en
dc.subject	ridge sidewall	en
dc.subject	ridge structure	en
dc.subject	titanium	en
dc.subject	tantalum	en
dc.subject	absorbed dose	en
dc.subject	absorbed dose	en
dc.subject	aspect ratio	en
dc.subject	benzoic acid	en
dc.subject	biaxial crystal	en
dc.subject	coupler	en
dc.subject	coupling effect	en
dc.subject	coupling length	en
dc.subject	directional coupler	en
dc.subject	electro-optical coefficient	en
dc.title	在伽瑪射線照射鈮酸鋰基板上研製脊形方向耦合器	zh_TW
dc.title	Design and Fabrication of Ridge-type Directional Coupler on Gamma-ray Irradiated Lithium Niobate Substrate	en
dc.type	Thesis
dc.date.schoolyear	99-2
dc.description.degree	碩士
dc.contributor.oralexamcommittee	胡振國,彭隆瀚,王子建
dc.subject.keyword	輻射吸收劑量,己二酸,外觀比,苯甲酸,雙軸晶體,光耦合器,耦合效應,耦合長度,方向耦合器,電光係數,電光效應,電光調變器,訊熄比,伽瑪射線,半波電壓,苯甲酸鋰,鈮酸鋰,光場,脊形光波導,重疊積分值,質子交換,放射性活度,脊形深度,脊形側壁,脊形結構,鈦,鉭,鈦擴散式光波導,	zh_TW
dc.subject.keyword	absorbed dose,absorbed dose,aspect ratio,benzoic acid,biaxial crystal,coupler,coupling effect,coupling length,directional coupler,electro-optical coefficient,electro-optic effect,electro-optical modulator,extinction ratio,gamma ray,half-wave voltage,lithium benzoate,optical field,optical ridge waveguide,overlap integral,proton exchange,PE,radioactivity,ridge depth,ridge sidewall,ridge structure,titanium,tantalum,Ti-indiffused optical waveguide,	en
dc.relation.page	99
dc.rights.note	有償授權
dc.date.accepted	2011-07-19
dc.contributor.author-college	電機資訊學院	zh_TW
dc.contributor.author-dept	光電工程學研究所	zh_TW
顯示於系所單位：	光電工程學研究所

文件中的檔案：

檔案	大小	格式
ntu-100-1.pdf 未授權公開取用	3.21 MB	Adobe PDF

顯示文件簡單紀錄

系統中的文件，除了特別指名其著作權條款之外，均受到著作權保護，並且保留所有的權利。