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http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/37769完整後設資料紀錄
| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 吳光鐘(Kuang-Chong Wu) | |
| dc.contributor.author | Shao-An Liao | en |
| dc.contributor.author | 廖紹安 | zh_TW |
| dc.date.accessioned | 2021-06-13T15:42:52Z | - |
| dc.date.available | 2013-07-10 | |
| dc.date.copyright | 2008-07-10 | |
| dc.date.issued | 2008 | |
| dc.date.submitted | 2008-07-05 | |
| dc.identifier.citation | [1] Sauerbrey G 1959 Verwendung von schwingquarzen zur wagung dunner schechten und zur mikrowagung Z. Phys. 155 206-22
[2] W Shockley, D. R. Curran, and D.J. Koneval, 'Trapped-energy modes in quartz filter crystals,' J. Acoust. Soc. Amer., vol. 41, no. 4, pp. 981-993, 1967. [3] R. D. Mindlin and P. C. Y. Lee, 'Thickness-shear and flexural vibrations of partially plated crystal plates,' Int. J. Solids Struct., vol 2, pp. 125-139, 1966. [4] Reed c E, Kanazawa and Kaufman J H 1990, Physical description of a viscoelastically loaded AT-cut quartz resonator. J Appl. Phys 68 1993-2001 [5] Feng Shen, Sean J. O'Shea, Kwok H. Lee, Frequency interference between two mesa-shaped quartz crystal microbalance. IEEE transac. on ultrasonics, ferroelectrics, and freq cont, vol. 50, No.6 668-675. [6] S. Timoshenko, Phil. Mag. Ser. 6, 41, 744 (1921) [7] Feng Shen, Kwok H. Lee, Sean J. O'Shea, 'Frequency interference between two quartz crystal microbalances,' IEEE sensors jour., vol. 3 No. 3, 274-280 [8] Fabien Josse, Youbok Lee, 'Analysis of the radial dependence of mass sensitivity for modified-electrode quartz crystal resonators,' Anal. Chem, vol. 70, No. 2, 237-247 [9] C.E. Reed, K. Keiji Kanazawa, J. H. Kaufman, 1989 'Physical description of a viscoelastically loaded AT-cut quartz resonator,' J. Appl. Phys. 68 (5) 1993-2001 [10] Daniel A. Buttry, Michael D. Ward, 'Measurement of interfacial process at electrode surfaces with the electrochemical quartz crystal microbalance,' Chem. Rev. 1992, 1355-1379 [11] F. Lu, H. P. Lee, P, Lu, S. P. Lim, ' Finite element analysis of interference for the laterally coupled quartz crystal microbalances,' Sensors and Actuators A,119 2005, 90-99 [12] W. D Beaver, Analysis of elastically coupled piezoelectric resonators, J. Acoust. Soc. Am 43 (5) (1968) 972-981 [13] F. Lu, H. P. Lee, S. P. Lim, 'Quartz crystal microbalance with rigid mass partially attached on electrode surfaces,' Sens. Actuators 112 (2004) 203-210 [14] S. Goka, H. Sekimoto, and Y. Watanabe, 'Experimental study of vinrations of mesa shaped AT-cut quartz plates,' in Proc IEEE int. Freq. Cont. Symp., 1999, pp. 441-444 [15] F. Shen, P. Lu, S. J. O'Shea, and K. H. Lee, 'Frequency Coupling and Energy Trapping in Mesa-shaped Multichannel Quartz Crystal Microbalances,' Sensors and Actuators, A: Physical, vol. 111, pp. 180-187, 2004. [16] K. H. Lee, F. Shen, P. Lu, S. J. O'Shea, and T. Y. Ng, 'Frequency Interference between Two Quartz Crystal Microbalances,' Orlando, FL, United States, 2002, pp. 1148-1153. [17] 吳光鐘, '壓電材料力學,' 國立臺灣大學應用力學所. [18] 周卓明,'壓電力學,' 全華科技圖書股份有限公司印行 | |
| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/37769 | - |
| dc.description.abstract | 單電極微石英震盪器(QCM)的發展由來已久，現今也已經被運用在生物醫療檢測上。隨著檢測要求的提升及製程技術的純熟，進一步發展出多電極微石英震盪器(MQCM)。
多電極微石英震盪器必須擁有至少兩個以上的電極，方能提供多工檢測，本論文便是以此為方向。然而為了達到更好的效果，一開始先集中在單電極的改良，採用n-m model設置單電極，此設計能夠增加能量的集中度，同時不會因為電極尺寸的減小而喪失靈敏度。然而n-m model的建立並無法有效的抵抗撓曲波的影響，能量分佈曲線依然呈現鋸齒狀。為此，利用平台設計(Mesa design)增加電極厚度，增加電極區的有效質量密度。完成後，以得出的單電極型態導入雙電極模擬。雙電極石英震盪器有電極間相互干擾問題，因此，在多電極微石英震盪器的設計上，刻意設計尺寸不相近的兩個電極。過於接近的電極尺寸會使得兩電極的共振頻近乎重疊，進而影響訊號的靈敏度以及檢測的準確性。此外，由於多電極微石英震盪器上有多個電極，加上石英片的大小固定，為避免兩者過於接近而發生相互偶合的情形，個別電極的尺寸必須盡可能減小。 確定所有參數後，利用微影製程將設計的雙電極石英震盪器做出成品，接著使用Agilent 4294a阻抗分析儀量測訊號。首先將兩電極個別的共振頻率測出，接著利用水滴作為附加質量施加於電極一並量測兩電極個別的共振頻率；再將水滴施加於電極二並量測兩電極個別的共振頻率。依照設計，兩電極之間相互不能有所影響，因此理想的實驗結果應為：當質量附加於電極一時，無質量附加的電極二其共振頻率不變，反之亦然。 | zh_TW |
| dc.description.abstract | Single-electrode quartz crystal microbalance (QCM) has been a commercialized bio-senser in recent years. However, with the advantage of being able to perform multi-sensing, the idea of multi-channel quartz crystal microbalance (MQCM) has been proposed.
Multi-channel quartz crystal microbalance has at least two electrodes, which offer multi-sensing. In this thesis, single electrode design was first modified based on the n-m model. This design enables better energy trapping efficiency and avoids decreased sensitivity while reducing the electrode dimension. Nevertheless, the influence from flexural wave is still strong. The mesa design was then applied to increase the effective mass density of the electrode region by increasing the thickness of the region. Two designs were then implemented to the dual-channel quartz crystal microbalance. Interference between the electrodes is the main concern of dual-channel quartz crystal microbalance. The dimensions of each electrode were therefore chosen not to be close. Similar dimension of two electrodes will result in the overlap of resonance frequencies so that the sensitivity of the device is decreased. Besides, the size of quartz plate is fixed and two electrodes must be fit in, the dimension of each electrode was thus set to be as small as possible to avoid close proximity and thus the coupling between electrodes. With the optimized parameters, a MQCM was manufactured using lithography. The signal output was measured by Agilent 4294a Impedance Analyzer. First, the resonance frequency of each electrode was measured. Later, water drop was loaded onto electrode 1 and the resonance frequencies of both electrodes were measured. The same process was repeated for water drop loaded onto electrode 2. It was found no significant frequency shift on electrode 1 occurred when water drop (mass) was loaded on electrode 2 and vice versa. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-13T15:42:52Z (GMT). No. of bitstreams: 1 ntu-97-R95543025-1.pdf: 2196755 bytes, checksum: b09627daac804ed98258ac11e7208e1a (MD5) Previous issue date: 2008 | en |
| dc.description.tableofcontents | Acknowledgement...........................................i
摘要........................................ii Abstract................................................iii Table of Contents.................................................v List of Figures......................................ix List of Tables..........................................xii Chapter 1 Introduction.....................1 1.1 Motivation..................................1 1.2 Literature Review................................2 Chapter 2 QCM Principle and Characteristics..........................................3 2.1 Introduction...........................................3 2.1.1 Direct piezoelectric Effect......3 2.1.2 Inverse piezoelectric Effect.......4 2.2 Quartz......................................4 2.2.1 Introduction of Quartz....................4 2.2.2 Material Constants..........................6 2.3 Principle..............................................11 2.3.1 Working Principle..........................11 2.3.2 Energy Trapping............................11 2.3.3 Influence of Flexural Waves................................................12 Chapter 3 Finite Element Analysis...............................................14 3.1 Preface.............................................14 3.2 Optimization.......................................14 3.2.1 Introduction.................................14 3.3.2 n-m Model...................................15 3.2.2.1 Convergence Test...............15 3.2.2.2 Simulation Results............16 3.2.3 Thickness of Electrode.................17 3.2.3.1 Simulation Results............18 3.2.4 Dimension of Electrode...............21 3.2.5 Maximum Deviation....................22 3.2.5.1 Simulation Results............23 3.2.6 Dual-channel QCM......................23 3.2.6.1 Mesa Design......................23 3.2.6.2 Simulation Results............24 3.2.6.3 Dimension for the 2nd Electrode and The Distance Between Two Electrodes.........................31 3.2.6.4 Simulation Results.............32 3.2.6.5 The Optimized Dimension.......................................37 Chapter 4 Experiment ......................................38 4.1 MQCM Design......................................38 4.1.1 Electrode Layout..........................38 4.2 Lithography...........................................39 4.2.1 Preface..........................................39 4.2.1.1 Wafer Cleaning..................40 4.2.1.2 Holder................................40 4.2.1.3 Dehydration Bake..............42 4.2.1.4 Photoresist Tone................42 4.2.1.5 Spin Coating......................43 4.2.1.6 Soft Bake...........................45 4.2.1.7 Photomask.........................46 4.2.1.8 Alignment..........................46 4.2.1.9 Exposure............................49 4.2.1.10 Development...................51 4.2.1.11 Hard Bake.......................53 4.2.1.12 Deposition.......................53 4.2.1.13 Lift-off.............................54 4.2.1.14 Removal of Side Wall.............55 4.3 Etching........................................56 4.3.1 Dry Etching.............................56 4.3.1.1 ICP.................................56 4.3.2 Wet Etching..............................57 4.4 Results – Measurement......................58 4.4.1 Experimental Setup.....................58 4.4.2 Reliability Test............................59 4.4.3 Steps..................................60 4.4.4 Results and Discussion...............61 Chapter 5 Conclusion and Future Work.........63 5.1 Conclusion.................................63 5.2 Future work......................................64 Reference......................................65 | |
| dc.language.iso | en | |
| dc.title | 多平台電極石英板最佳化設計之研究 | zh_TW |
| dc.title | A Study of Optimal Design of Multi-channel Quartz Crystal Microbalance | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 96-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 馬劍清(Chien-Ching Ma),張正憲(Jeng-Shian Chang) | |
| dc.subject.keyword | 能量井效應,石英,微石英震盪器,壓電材料,平台設計, | zh_TW |
| dc.subject.keyword | energy trapping effect,quartz,quartz crystal microbalance,piezoelectric material,mesa design, | en |
| dc.relation.page | 66 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2008-07-07 | |
| dc.contributor.author-college | 工學院 | zh_TW |
| dc.contributor.author-dept | 應用力學研究所 | zh_TW |
| 顯示於系所單位： | 應用力學研究所 | |
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