請用此 Handle URI 來引用此文件：
http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/37243完整後設資料紀錄
| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 王維新 | |
| dc.contributor.author | Wan-Shao Tsai | en |
| dc.contributor.author | 蔡宛卲 | zh_TW |
| dc.date.accessioned | 2021-06-13T15:22:19Z | - |
| dc.date.available | 2011-07-26 | |
| dc.date.copyright | 2008-07-26 | |
| dc.date.issued | 2008 | |
| dc.date.submitted | 2008-07-22 | |
| dc.identifier.citation | [1] R. G. Hunsperger, Integrated Optics: Theory and Technology 5th Ed.,
Springer-Verlag, 2002. [2] R. V. Schmidt and I. P. Kaminow, “Metal-diffused optical waveguides in LiNbO3,” Appl. Phys. Lett., vol. 25, no. 8, pp. 458-4602, Oct. 1974. [3] G. J. Griffiths and R. J. Esdaile, “Analysis of titanium diffused planar optical waveguides in lithium niobate,” IEEE J. Quantum Electron., vol. 20, no. 2, pp. 149-159, 1984. [4] L. Robitaille, C. L. Callender, and J. P. Noad, “Design and fabrication of low-loss polymer waveguide components for onchip optical interconnection,” IEEE Photon. Technol. Lett., vol. 8, no. 12, pp. 1647–1649, Dec. 1996. [5] K. K. Tung, W. H.Wong, and E. Y. B. Pun, “Polymeric optical waveguides using direct ultraviolet photolithography process,” Appl. Phys. A: Mater. Sci. Process., vol. 80, no. 3, pp. 621–626, Feb. 2005. [6] I. Mansour and F. Caccavale, “An improved procedure to calculate the refractive index profile from the measured near-field intensity,” J. Lightwave Technol., vol. 14, no. 3, pp. 423-428, 1996. [7] S. Fouchet, A. Carenco, C. Daguet, R. Guglielmi, and L. Riviere, “Wavelength dispersion of Ti induced refractive index change in LiNbO3 as a function of diffusion parameters,” J. Lightwave Technol., vol. 5, no. 5, pp. 700-708, 1987. [8] P. Ganguly, D. C. Sen, S. Datt, J. C. Biswas, and S. K. Lahiri, “Simulation of refractive index profiles for titanium indiffused lithium niobate channel waveguides,” Fiber and Integrated Optics, vol. 15, pp135-147, 1996. [9] G. J. Griffiths and R. J. Esdaile, “Analysis of titanium diffused planar optical waveguides in lithium niobate,” IEEE J. Quantum Electron., vol. 20, no. 2, pp. 149-159, Feb. 1984. [10] F. Caccavale, P. Chakraborty, A. Quaranta, I. Mansour, G. Gianello, S. Bosso, R. Corsini, and G. Mussi, “Secondary-ion-mass spectrometry and near-field studies of Ti:LiNbO3 optical waveguides,” J. Appl. Phys., vol. 78, no. 9, 5345-5350, 1995. [11] K. S. Chiang, “Construction of refractive-index profiles of planar dielectric waveguides from the distribution of effective indexes,” J. Lightwave Technol., vo. LT-3, pp. 385-391, 1985. [12] T. Shiozawa, H. Miyamoto, H. Ohta, M. Yamaguchi, and T. Oki, “Determination of two-dimensional optical waveguide index distribution function parameters from effective indexes,” J. Lightwave Technol., vo. 8, pp. 497-505, 1990. [13] K. Morishita, “Measurement of refractive-index profile of single-mode optical fibers by the propagation-mode near-field method,” J. Lightwave Technol., vol. 3, no. 2, Apr. 1985. [14] L. Mccaughan and E. E. Bergmann, “Index distribution of optical waveguides from their mode profile,” J. Lightwave Technol., vol. 1, no. 1, 1983. [15] K. Morishita, “Index profiling of three-dimensional optical waveguides by the propagation-mode near-field method,” J. Lightwave Technol., vol. 4, no. 8, 1986. [16] J. Helms, J. Schmidtchen, B. Schüppert, and K. Petermann, “Error analysis for refractive-index profile determination from near-field measurements,” J. Lightwave Technol. Vol. 8, no. 5, pp. 625-633, 1990. [17] Mark L. von Bibra and A. Roberts, “Refractive index reconstruction of graded-index buried channel waveguides from their mode intensities,” J. Lightwave Technol., vol. 15, no. 9, pp. 1695-1699, Sep. 1983. [18] D. Brooks and S. Ruschin, “Improved near-field method for refractive index measurement of optical waveguides,” IEEE Photo. Technol. Lett., vol. 8, no. 2, pp. 254-256, Feb. 1996. [19] F. Caccavale, F. Segato, I. Mansour, and M. Gianesin, “A finite differences method for the reconstruction of refractive index profiles from near-field measurements,” J. Lightwave Technol., vol. 16, pp. 1348-1353, July 1998. [20] L. Dhar, H. J. Lee, E. J. Laskowski, S. K. Buratto, C. Narayanan, H. M. Presby, C. C. Bahr, P. J. Anthony, and M. J. Cardillo, “Refractive index profiling of planar optical waveguides using near-field scanning optical microscopy,” SPIE Proceedings, vol. 2535, pp. 120-124, 1996. [21] W. S. Tsai, W. S. Wang, and P. K. Wei, “Two-dimensional refractive index profiling by using differential near-field scanning optical microscopy,” Appl. Phys. Lett., vol. 91, no. 6, pp. 061123, Aug. 2007. [22] E. Abbe, 'Beiträge zur Theorie des Mikroskops und der mikroskopischen Wahrnehmung,' Schultzes Archiv für Mikroskopische Anatomie, no. 9, pp. 413-468, 1873. [23] J. W. Strutt (III Lord RAYLEIGH), 'Investigations in Optics, with special reference to the spectroscope,' Philosophical Magazine, vol. 8, pp. 261; 403; 477 (1879) and vol. 9, pp. 40 (1880). [24] E. H. Synge, “A suggested method for extending microscopic resolution into the ultra-microscopy region,” Philosophical Magazine, vol. 6, no. 35, pp. 356-362, 1928. [25] EA Ash and G. Nicholls, “Super-resolution aperture scanning microscope,” Nature, vol. 237, pp. 510-513, 1972. [26] E. Betzig, J. K. Trautman, T. D. Harris, J. S. Weiner, and R. L. Kostelak, “Breaking the diffraction barrier: Optical microscopy on a nanometric scale,” Science, vol. 251, pp. 1468-1470, 1991. [27] E. Betzig, and J. K. Trautman,” Near-field optics: Microscopy, spectroscopy, and surface modification beyond the diffraction limit,” Science, vol. 257, pp. 189-195, 1992. [28] 高宗聖、蔡定平，「近場光學新視界」，《科學發展》2005 年2 月， 386 期，22-27 頁。 [29] P. K. Wei, S. Y. Chiu, and W. L. Chang, “Determination of mesoscale crystallization by collection-mode polarization modulated near-field optical microscopy,” Rev. Sci. Instrum., vol. 73, no. 7, pp. 2624-2628, July 2002. [30] E. Betzig, P. L. Finn, and J. S. Weiner, “Combined shear force and near-field scanning optical microscopy,” Appl. Phys. Lett., vol. 60, no. 20, pp. 2484-2486, May 1992. [31] F. F. Froehlich and T. D. Milster, “Minimum detectable displacement in near-field scanning optical microscopy,” Appl. Phys. Lett., vol. 65,no. 18, pp. 2254-2256, Oct. 1994. [32] J. W. P. Hsu, A. A. McDaniel, and H. D. Hallen, “A shear force feedback control system for near-field scanning optical microscopes without lock-in detection,” Rev. Sci. Instrum., vol. 68, no. 8, pp. 3093-3095, Aug. 1997. [33] K. Karrai and R. D. Grober, “Piezoelectric tip-sample distance control for near field optical microscopes,” Appl. Phys. Lett., vol. 66, no. 3, pp. 1842-1844, Apr. 1995. [34] P. K. Wei and W. S. Fann, “Large scanning area near field optical microscopy,” Rev. Sci. Instrum., vol. 69, no. 10, pp. 3614-3617, Oct. 1998. [35] P. L. Phillips, J. C. Knight, J. M. Pottage, G. Kakarantzas, and P. St. J. Russell “Direct measurement of optical phase in the near field,” Appl. Phys. Lett., vol. 76, no. 5, pp. 541-543, Jan. 2002. [36] A. L. Campillo, J. W. P. Hsu, C. A. White, and C. D. W. Jones, “Direct measurement of the guided modes in LiNbO3 waveguides,” Appl. Phys. Lett., vol. 80, no. 13, pp. 2239-2241, Apr. 2002. [37] D. P. Tsai and Y. Y. Lu, “Tapping-mode tuning fork force sensing for near-field scanning optical microscopy,” Appl. Phys. Lett., vol. 73, no. 19, pp. 2724-2726, Nov. 1998. [38] D. P. Tsai, C. W. Yang, S. Z. Lo, and H. E. Jackson, “Imaging local index variations in an optical waveguide using a tapping-mode near-field scanning optical microscope,” Appl. Phys. Lett., vol. 75, no. 7, pp. 1039-1041, Aug. 1999. [39] S. Bourzeix, M. M. Moison, F. Mignard, F. Barthe, A. C. Boccara, C.Licoppe, B. Mersali, M. Allovon, and A. Bruno, “Near-field optical imaging of light propagation in semiconductor waveguide structures,” Appl. Phys. Lett., vol. 73, no. 8, pp. 1035-1037, Aug. 1998. [40] D. P. Tsai and H. E. Jackson, “Photon scanning tunneling microscope study of optical waveguides,” Appl. Phys. Lett., vol. 56, no. 16, pp. 1515-1517, Apr. 1990. [41] M. J. Martin, T. Benyattou, R. Orobtchouk, F. Rooms, A. Morand, I. Schanen, and P. Benech, “Scaning near-field optical microscopy as a tool for the characterization of multimode interference devices,” Appl. Opt., vol. 44, no. 13, pp. 2558-2563, May 2005. [42] J. Shakya, J. Y. Lin, and H. X. Jiang, “Near-field optical study of AlGaN/GaN quantum-well waveguide,” Appl. Phys. Lett., vol. 84, no. 11, pp. 1832-1834, Mar. 2004. [43] W. D. Herzog, M. S. Ünlü, B. B. Goldberg, G. H. Rhodes, and C. Harder, “Beam divergence and waist measurements of laser diodes by near-field scanning optical microscopy,” Appl. Phys. Lett., vol. 70, no. 6, pp. 688-690, Feb. 1997. [44] D. K. Cheng, Field and wave electromagnetics, Addison Wesley, 1998. [45] K. Kawano and T. Kitoh, Introduction to optical waveguide analysis, Wiley, 2001. [46] M. S. Stern, “Rayleigh quotient solution of semivectorial field problems for optical waveguides with arbitrary index profiles,” IEE Proc. J, vol. 138, pp. 185-190, 1991 [47] W. S. Tsai, W. H. Hsu, and W. S. Wang, “The effect of noise on thereconstruction of waveguide index profile by the near-field method,” B-FR-IV 4-5, in Optics & Photonics Taiwan, 2005. [48] R. Ramaswami, K. N. Sivarajan, Optical Networks, Morgan Kaufmann, San Francisco, California, 1998. [49] P. K. Tien, S. Riva-Sanseverino, R. J. Martin, A. A. Ballman, and H. Brown, “Optical waveguide modes in single-crystalline LiNbO3-LiTaO3 solid-solution films,” Appl. Phys. Lett., vol. 24, no. 10, pp. 503-506, Apr. 1974. [50] J. M. White and P. F. Heidrich, “Optical waveguide refractive index profiles determined from measurement of mode indices: a simple analysis,” Appl. Opt., vol. 15, no. 1, pp. 151-155, Jan. 1976. [51] M. N. Armenise, “Fabrication techniques of lithium niobate waveguides,” IEE Proc., vol. 135, no. 2, pp. 85-91, Apr. 1988. [52] J. L. Jackel, “Suppression of outdiffusion in titanium diffused LiNbO3: a review,” J. Opt. Commun., vol. 3, no. 3, pp. 82-85, 1982. [53] L. Y. Chen, W. S. Tsai, W. H. Hsu, and W. S. Wang, “Fabrication and characterization of benzocyclobutene optical waveguides by UV pulsed-laser illumination,” IEEE J. Quantum Electron., vol. 43, no. 3, pp. 303-310, March, 2007. [54] R. Stöckle, C. Fokas, V. Deckert, R. Zenobi, B. Sick, B. Hecht, and U. P. Wild, “High-quality near-field optical probes by tube etching,” Appl. Phys. Lett., vol. 75, no. 2, pp. 160-162, 1999. [55] C. C. Wei, P. K. Wei, and W. Fann, “Direct measurements of the true vibrational amplitudes in shear force microscopy,” Appl. Phys. Lett., vol. 67, no. 26, pp. 3835-3837, Dec. 1995. [56] T. Wiener and S. Karp, “The role of blue/green laser systems in strategic submarine communications,” IEEE Trans. Comm., vol. 28, no. 9, pp.1602-1607, Sep. 1980. [57] R. L. Gunshor, N. Otsuka, and A. V. Nurmiko, “Blue lasers on the horizon,” IEEE Spectrum, vol. 30, no. 5, pp.28-33, May 1993. [58] S. K. Renukunta and D. H. Wells, “Optical memory and blue lasers,” IEEE Potentials, vol. 13, no. 4, pp.14-18, Oct.-Nov. 1994. [59] 蘇俊鐘，「電子束微影術(Electron-beam lithography)」，2005 年7 月。 http://nano.nchc.org.tw/dictionary/ebl.html. [60] A. Voigt, H. Elsner, H.-G. Meyer, and G. Gruetzner, “Nanometer patterning using ma-N 2400 series DUV negative photoresist and electron beam lithography,” Proc. SPIE, vol. 3676, pp. 485-491, June 1999. | |
| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/37243 | - |
| dc.description.abstract | 本論文提出以微分近場光學顯微術，來反推光波導中的折射率分布。微分近場光學顯微術係以量測微分場取代數值微分場。在反推計算中，大幅降低使用數值微分場造成的折射率分布的誤差，忠實呈現
光波導中的折射率分布，而不需使用額外的雜訊處理。 文中首先簡介近場光學顯微術，以及所改善的微分近場光學顯微術；接著介紹重建折射率的量測方法，包括稜鏡耦合量測系統、直接激發耦合量測系統等。接著介紹傳統式近場量測重建折射率的演算法，包含逆WKB 法、遞迴計算與直接反推計算，並詳述微分近場的直接反推計算。在模擬的部分，代入理論雜訊模擬量測的光場，比較重建折射率不同演算法之間的差異；模擬結果顯示，在雜訊為30dB 的情形，遞迴計算所重建出的折射率分布比直接反推計算準確。此外也以加入雜訊的方式，模擬以近場光學顯微術量測的場形，比較在重建折射率時有無微分場對於重建折射率的影響；模擬結果顯示，微分場大幅提高了所重建折射率的準確性，其折射率分布的均方根誤差為0.3150，與無微分場的結果1.2247 相比，誤差值較小。 在實驗結果方面，將所提出以微分近場光學顯微術反推光波導折射分布的技術，分別應用在一維的平面金屬擴散式波導和二維的單模光纖上面。一維的鈦金屬擴散式鈮酸鋰平面光波導在深度方向的折射率分布為漸變式，重建的折射率分布與已知的鈦擴散模型相吻合；比較有無微分場時所重建的折射率均方根誤差，分別為0.2440 與1.9143，也與模擬的誤差範圍一致。二維的單模光纖其折射率分布屬於步階式，利用其圓對稱性結構，可以用微分近場光學顯微術的技術直接重 建二維的折射率分布；同時也與在無微分場的情況下，各種對場形處 理的其他方法作比較。由重建的折射率分布看來，微分近場光學顯微 術展現了在反推計算上重建折射布分布的優勢。 | zh_TW |
| dc.description.abstract | In this dissertation, differential near-field scanning microscopy (DNSOM) is proposed to improve near-field scanning microscopy (NSOM) in the reconstruction of the refractive index profiles of optical waveguides.
Differential fields are measured in the DNSOM system, which avoid numerical differentiation in the inverse calculation algorithm and lower the noises of the reconstructed refractive index profile by the numerical differential fields. The refractive index profiles of optical waveguides are truly reconstructed with measured differential fields, and no other smoothing techniques are required. The measuring systems for the reconstruction of refractive index profiles are first introduced, which include prism coupler, end-fire coupling, NSOM, and the proposed DNSOM system. Then the algorithms for reconstructing the refractive index profile of the conventional methods are derived, which are inverse WKB, iterative calculation, and inverse calculation. The inverse calculation algorithm with differential fields is further derived. In the simulation, noises are added in the calculated fields to simulate measured fields and to compare the reconstructed index profile with different calculating algorithm. Simulated results show that at signal-to-noise level of 30 dB, iterative calculation algorithm is more accurate then inverse calculation algorithm in the reconstruction of refractive index profile. Furthermore, calculated fields with noises are also simulated to compare the reconstruction of refractive index profile with and without differential fields. Simulated results show that the DNSOM system provides more accurate index profile than the NSOM system. The root-mean-square errors of the reconstructed refractive index profile with and without differential fields are 0.3150 and 1.2247, respectively. The proposed DNSOM system is applied in both the one-dimensional planar metal-diffused optical waveguide and the two-dimensional single-mode optical fiber. The refractive index profile of the one-dimensional titanium diffused lithium niobate (Ti:LiNbO3) optical waveguide is graded-index distribution. And the reconstructed index profile is well-matched with the known Ti diffusion model. Moreover, the root-mean-square errors of the reconstructed refractive index profile with the DNSOM and the NSOM system are 0.2440 and 1.9143, respectively, which are in the same order with the simulated results. The refractive index profile of the single-mode optical fiber is step-index distribution. For its symmetrical structured, two-dimensional refractive index profile is reconstructed by the DNSOM system. The reconstructed index profile is also compared with other field-smoothing techniques by the NSOM system. The DNSOM system shows great advantages in the reconstruction of the refractive index profile with the inverse calculation algorithm. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-13T15:22:19Z (GMT). No. of bitstreams: 1 ntu-97-F91943030-1.pdf: 12422604 bytes, checksum: 3518182d6dcfa8999603d46f7030865f (MD5) Previous issue date: 2008 | en |
| dc.description.tableofcontents | 摘要 .................................................................................................................................. i
Abstract ............................................................................................................................ iii 目錄 .................................................................................................................................. I 圖目錄 ............................................................................................................................ III 表目錄 ............................................................................................................................ VI 第一章 緒論 .............................................................................................................. 1 1-1 研究背景與動機 ........................................................................................ 1 1-2 重建光波導折射率的方法 ........................................................................ 2 1-3 以近場重建光波導折射率的方式 ............................................................ 3 1-4 研究目標與架構 ........................................................................................ 6 1-5 內容簡介 .................................................................................................... 7 第二章 近場光學顯微術 .......................................................................................... 9 2-1 近場光學 ...................................................................................................... 9 2-1-1 近場光學的演進 .............................................................................. 9 2-1-2 近場光學的基本原理 .................................................................... 10 2-2 近場光學顯微術 ............................................................................................. 13 2-2-1 近場光學顯微術簡介 .................................................................... 13 2-2-2 剪力回饋 ........................................................................................ 15 2-3 近場光學顯微術在光波導上的應用 ............................................................. 17 2-4 微分近場光學顯微術 ................................................................................ 18 第三章 數值分析模擬 ............................................................................................ 20 3-1 解光波導模態 ............................................................................................ 20 3-1-1 折射率模型 .................................................................................... 22 3-1-2 有限差分法 .................................................................................... 22 3-1-3 邊界條件[46] ................................................................................. 24 3-2 遞迴計算 .................................................................................................... 25 3-3 直接反推 .................................................................................................... 26 3-3-1 傳統反推計算 ................................................................................ 27 3-3-2 微分場反推計算 ............................................................................ 28 3-3-3 濾波器選擇 .................................................................................... 29 3-4 雜訊模擬 .................................................................................................... 30 3-5 逆WKB 法 ................................................................................................. 34 3-5-1 遞迴WKB 法[49] .......................................................................... 34 3-5-2 逆WKB 法 ..................................................................................... 36 第四章 光學波導之製備與量測 ............................................................................ 38 4-1 光波導折射率分布特性 ............................................................................ 38 4-1-1 步階式折射率分布 ........................................................................ 39 4-1-2 漸變式折射率分布 ........................................................................ 40 4-2 樣品製備 .................................................................................................... 40 4-2-1 鈦擴散式鈮酸鋰光波導 ................................................................ 40 4-1-2 以紫外光照射之高分子光波導 .................................................... 45 4-3 稜鏡耦合系統 ............................................................................................ 47 4-3-1 稜鏡耦合系統架設 ........................................................................ 47 4-3-2 量測技巧 ........................................................................................ 48 4-3-3 量測BCB 平面光波導元件 .......................................................... 48 4-3-4 量測鈦擴散式鈮酸鋰光波導 ........................................................ 51 4-4 直接激發耦合近場量測 ............................................................................ 53 4-4-1 直接激發耦合量測架設 ................................................................ 53 4-4-2 量測技巧 ........................................................................................ 54 4-4-3 重建鈦擴散式鈮酸鋰光波導折射率分布 .................................... 57 第五章 微分近場光學顯微術與折射率分布之重建 ............................................ 65 5-1 微分近場光學顯微術量測系統 ................................................................ 65 5-1-1 系統架設 ........................................................................................ 65 5-1-2 量測技巧 ........................................................................................ 70 5-2 一維擴散式波導之折射率分布 ................................................................ 74 5-2-1 雜訊模擬微分近場光學顯微術之量測場形 ................................ 74 5-2-2 重建鈦擴散式鈮酸鋰平面光波導之折射率分布 ........................ 78 5-3 二維單模光纖之折射率分布 .................................................................... 85 第六章 結論 .................................................................................................................. 93 附錄A 以電子束微影術製作脊形波導 ................................................................ 96 A-1 研究背景與動機簡介 .................................................................................... 96 A-2 實驗流程 ........................................................................................................ 97 A-3 實驗結果與討論 .......................................................................................... 102 A-3-1 量測場形 ...................................................................................... 102 A-3-2 結果討論 ...................................................................................... 108 A-3-3 數值模擬 ....................................................................................... 112 參考文獻 ....................................................................................................................... 116 中英文名詞對照表 ...................................................................................................... 124 | |
| dc.language.iso | zh-TW | |
| dc.subject | 鈮酸鋰 | zh_TW |
| dc.subject | 積體光學 | zh_TW |
| dc.subject | 光學波導 | zh_TW |
| dc.subject | 折射率分布 | zh_TW |
| dc.subject | 近場光學顯微術 | zh_TW |
| dc.subject | 光纖 | zh_TW |
| dc.subject | optical fiber. | en |
| dc.subject | Integrated optics | en |
| dc.subject | optical waveguides | en |
| dc.subject | lithium niobate (LiNbO3) | en |
| dc.subject | refractive index profiles | en |
| dc.subject | near-field scanning optical microscopy (NSOM) | en |
| dc.title | 以微分近場光學顯微術重建光波導折射率分布 | zh_TW |
| dc.title | Reconstruction of Optical Waveguide Index Profiles by Differential Near-Field Scanning Optical Microscopy | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 96-2 | |
| dc.description.degree | 博士 | |
| dc.contributor.oralexamcommittee | 李清庭,魏培坤,胡振國,張宏鈞,彭隆瀚 | |
| dc.subject.keyword | 積體光學,鈮酸鋰,光學波導,折射率分布,近場光學顯微術,光纖, | zh_TW |
| dc.subject.keyword | Integrated optics,optical waveguides,lithium niobate (LiNbO3),refractive index profiles,near-field scanning optical microscopy (NSOM),optical fiber., | en |
| dc.relation.page | 131 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2008-07-23 | |
| dc.contributor.author-college | 電機資訊學院 | zh_TW |
| dc.contributor.author-dept | 電子工程學研究所 | zh_TW |
| 顯示於系所單位： | 電子工程學研究所 | |
文件中的檔案：
| 檔案 | 大小 | 格式 | |
|---|---|---|---|
| ntu-97-1.pdf 未授權公開取用 | 12.13 MB | Adobe PDF |
系統中的文件，除了特別指名其著作權條款之外，均受到著作權保護，並且保留所有的權利。